id	sid	tid	token	lemma	pos
iajs-89	1	1	microsoft	microsoft	PROPN
iajs-89	1	2	word	word	NOUN
iajs-89	1	3	104	104	NUM
iajs-89	1	4	-	-	SYM
iajs-89	1	5	114	114	NUM
iajs-89	1	6	physics	physics	NOUN
iajs-89	1	7	|	|	ADV
iajs-89	1	8	104	104	NUM
iajs-89	1	9	2016	2016	NUM
iajs-89	1	10	)	)	PUNCT
iajs-89	1	11	عام	عام	ADP
iajs-89	1	12	2(العدد	2(العدد	NUM
iajs-89	1	13	29المجلد	29المجلد	NUM
iajs-89	1	14	مجلة	مجلة	PROPN
iajs-89	1	15	إبن	إبن	NOUN
iajs-89	1	16	الهيثم	الهيثم	ADJ
iajs-89	1	17	للعلوم	للعلوم	NOUN
iajs-89	1	18	الصرفة	الصرفة	NOUN
iajs-89	2	1	و	و	PRON
iajs-89	2	2	التطبيقية	التطبيقية	ADJ
iajs-89	2	3	ibn	ibn	PROPN
iajs-89	2	4	al	al	PROPN
iajs-89	2	5	-	-	PUNCT
iajs-89	2	6	haitham	haitham	PROPN
iajs-89	2	7	j.	j.	PROPN
iajs-89	2	8	for	for	ADP
iajs-89	2	9	pure	pure	PROPN
iajs-89	2	10	&	&	CCONJ
iajs-89	2	11	appl	appl	PROPN
iajs-89	2	12	.	.	PUNCT
iajs-89	3	1	sci	sci	PROPN
iajs-89	3	2	.	.	PUNCT
iajs-89	4	1	vol.29	vol.29	PROPN
iajs-89	4	2	(	(	PUNCT
iajs-89	4	3	2	2	NUM
iajs-89	4	4	)	)	SYM
iajs-89	4	5	2016	2016	NUM
iajs-89	4	6	simulation	simulation	NOUN
iajs-89	4	7	study	study	NOUN
iajs-89	4	8	of	of	ADP
iajs-89	4	9	sputtering	sputtering	ADJ
iajs-89	4	10	yield	yield	NOUN
iajs-89	4	11	of	of	ADP
iajs-89	4	12	zn	zn	PROPN
iajs-89	4	13	target	target	NOUN
iajs-89	4	14	bombarded	bombard	VERB
iajs-89	4	15	by	by	ADP
iajs-89	4	16	xenon	xenon	PROPN
iajs-89	4	17	ions	ion	NOUN
iajs-89	5	1	samira	samira	PROPN
iajs-89	5	2	a.	a.	PROPN
iajs-89	5	3	ebrahiem	ebrahiem	PROPN
iajs-89	5	4	firas	firas	PROPN
iajs-89	5	5	m.	m.	PROPN
iajs-89	5	6	hady	hady	PROPN
iajs-89	5	7	mustafa	mustafa	PROPN
iajs-89	5	8	k.	k.	PROPN
iajs-89	5	9	jassim	jassim	PROPN
iajs-89	6	1	huda	huda	PROPN
iajs-89	6	2	m.	m.	PROPN
iajs-89	6	3	tawfeek	tawfeek	PROPN
iajs-89	6	4	dept	dept	PROPN
iajs-89	6	5	.	.	PROPN
iajs-89	6	6	of	of	ADP
iajs-89	6	7	physics	physics	PROPN
iajs-89	6	8	/	/	SYM
iajs-89	6	9	college	college	PROPN
iajs-89	6	10	of	of	ADP
iajs-89	6	11	education	education	NOUN
iajs-89	6	12	for	for	ADP
iajs-89	6	13	pure	pure	ADJ
iajs-89	6	14	science	science	NOUN
iajs-89	6	15	(	(	PUNCT
iajs-89	6	16	ibn	ibn	PROPN
iajs-89	6	17	al	al	PROPN
iajs-89	6	18	–	–	PUNCT
iajs-89	6	19	haitham)/	haitham)/	PROPN
iajs-89	6	20	university	university	NOUN
iajs-89	6	21	of	of	ADP
iajs-89	6	22	baghdad	baghdad	PROPN
iajs-89	6	23	received	receive	VERB
iajs-89	6	24	in	in	ADP
iajs-89	6	25	:	:	PUNCT
iajs-89	6	26	7	7	NUM
iajs-89	6	27	/	/	SYM
iajs-89	6	28	april/2016,accepted	april/2016,accepte	VERB
iajs-89	6	29	in	in	ADP
iajs-89	6	30	28	28	NUM
iajs-89	6	31	/	/	SYM
iajs-89	6	32	june/2016	june/2016	PROPN
iajs-89	6	33	abstract	abstract	ADV
iajs-89	6	34	using	use	VERB
iajs-89	6	35	a	a	DET
iajs-89	6	36	reduction	reduction	NOUN
iajs-89	6	37	of	of	ADP
iajs-89	6	38	trim	trim	ADJ
iajs-89	6	39	simulation	simulation	NOUN
iajs-89	6	40	data	datum	NOUN
iajs-89	6	41	,	,	PUNCT
iajs-89	6	42	the	the	DET
iajs-89	6	43	sputtering	sputtering	ADJ
iajs-89	6	44	yield	yield	NOUN
iajs-89	6	45	behaviour	behaviour	NOUN
iajs-89	6	46	of	of	ADP
iajs-89	6	47	zinc	zinc	NOUN
iajs-89	6	48	target	target	NOUN
iajs-89	6	49	bombard	bombard	NOUN
iajs-89	6	50	by	by	ADP
iajs-89	6	51	heavy	heavy	ADJ
iajs-89	6	52	xenon	xenon	NOUN
iajs-89	6	53	ions	ion	NOUN
iajs-89	6	54	plasma	plasma	NOUN
iajs-89	6	55	is	be	AUX
iajs-89	6	56	studied	study	VERB
iajs-89	6	57	.	.	PUNCT
iajs-89	7	1	the	the	DET
iajs-89	7	2	sputtering	sputtering	ADJ
iajs-89	7	3	yield	yield	NOUN
iajs-89	7	4	as	as	ADP
iajs-89	7	5	a	a	DET
iajs-89	7	6	function	function	NOUN
iajs-89	7	7	of	of	ADP
iajs-89	7	8	zinc	zinc	NOUN
iajs-89	7	9	layer	layer	NOUN
iajs-89	7	10	width	width	NOUN
iajs-89	7	11	,	,	PUNCT
iajs-89	7	12	xenon	xenon	NOUN
iajs-89	7	13	ion	ion	NOUN
iajs-89	7	14	number	number	NOUN
iajs-89	7	15	,	,	PUNCT
iajs-89	7	16	energy	energy	NOUN
iajs-89	7	17	of	of	ADP
iajs-89	7	18	ions	ion	NOUN
iajs-89	7	19	,	,	PUNCT
iajs-89	7	20	and	and	CCONJ
iajs-89	7	21	the	the	DET
iajs-89	7	22	angle	angle	NOUN
iajs-89	7	23	of	of	ADP
iajs-89	7	24	ion	ion	NOUN
iajs-89	7	25	incidence	incidence	NOUN
iajs-89	7	26	are	be	AUX
iajs-89	7	27	calculated	calculate	VERB
iajs-89	7	28	and	and	CCONJ
iajs-89	7	29	illustrated	illustrate	VERB
iajs-89	7	30	graphically	graphically	ADV
iajs-89	7	31	.	.	PUNCT
iajs-89	8	1	the	the	DET
iajs-89	8	2	corresponding	correspond	VERB
iajs-89	8	3	energy	energy	NOUN
iajs-89	8	4	loss	loss	NOUN
iajs-89	8	5	due	due	ADP
iajs-89	8	6	to	to	ADP
iajs-89	8	7	ionization	ionization	NOUN
iajs-89	8	8	,	,	PUNCT
iajs-89	8	9	vacancies	vacancy	NOUN
iajs-89	8	10	and	and	CCONJ
iajs-89	8	11	phonons	phonon	NOUN
iajs-89	8	12	,	,	PUNCT
iajs-89	8	13	are	be	AUX
iajs-89	8	14	graphically	graphically	ADV
iajs-89	8	15	shown	show	VERB
iajs-89	8	16	and	and	CCONJ
iajs-89	8	17	discussed	discuss	VERB
iajs-89	8	18	.	.	PUNCT
iajs-89	9	1	further	far	ADV
iajs-89	9	2	,	,	PUNCT
iajs-89	9	3	we	we	PRON
iajs-89	9	4	fit	fit	VERB
iajs-89	9	5	the	the	DET
iajs-89	9	6	calculations	calculation	NOUN
iajs-89	9	7	and	and	CCONJ
iajs-89	9	8	expressions	expression	NOUN
iajs-89	9	9	for	for	ADP
iajs-89	9	10	fitted	fit	VERB
iajs-89	9	11	curves	curve	NOUN
iajs-89	9	12	are	be	AUX
iajs-89	9	13	presented	present	VERB
iajs-89	9	14	with	with	ADP
iajs-89	9	15	its	its	PRON
iajs-89	9	16	coefficients	coefficient	NOUN
iajs-89	9	17	.	.	PUNCT
iajs-89	10	1	keywords	keyword	NOUN
iajs-89	10	2	:	:	PUNCT
iajs-89	10	3	trim	trim	VERB
iajs-89	10	4	program	program	NOUN
iajs-89	10	5	,	,	PUNCT
iajs-89	10	6	sputtering	sputtering	ADJ
iajs-89	10	7	yield	yield	NOUN
iajs-89	10	8	,	,	PUNCT
iajs-89	10	9	xenon	xenon	NOUN
iajs-89	10	10	ions	ion	NOUN
iajs-89	10	11	,	,	PUNCT
iajs-89	10	12	zinc	zinc	NOUN
iajs-89	10	13	physics	physics	NOUN
iajs-89	10	14	|	|	ADV
iajs-89	10	15	105	105	NUM
iajs-89	10	16	2016	2016	NUM
iajs-89	10	17	)	)	PUNCT
iajs-89	10	18	عام	عام	ADP
iajs-89	10	19	2(العدد	2(العدد	NUM
iajs-89	10	20	29المجلد	29المجلد	NUM
iajs-89	10	21	مجلة	مجلة	PROPN
iajs-89	10	22	إبن	إبن	NOUN
iajs-89	10	23	الهيثم	الهيثم	ADJ
iajs-89	10	24	للعلوم	للعلوم	NOUN
iajs-89	10	25	الصرفة	الصرفة	NOUN
iajs-89	11	1	و	و	PRON
iajs-89	11	2	التطبيقية	التطبيقية	ADJ
iajs-89	11	3	ibn	ibn	PROPN
iajs-89	11	4	al	al	PROPN
iajs-89	11	5	-	-	PUNCT
iajs-89	11	6	haitham	haitham	PROPN
iajs-89	11	7	j.	j.	PROPN
iajs-89	11	8	for	for	ADP
iajs-89	11	9	pure	pure	PROPN
iajs-89	11	10	&	&	CCONJ
iajs-89	11	11	appl	appl	PROPN
iajs-89	11	12	.	.	PUNCT
iajs-89	12	1	sci	sci	PROPN
iajs-89	12	2	.	.	PUNCT
iajs-89	13	1	vol.29	vol.29	PROPN
iajs-89	13	2	(	(	PUNCT
iajs-89	13	3	2	2	NUM
iajs-89	13	4	)	)	SYM
iajs-89	13	5	2016	2016	NUM
iajs-89	13	6	introduction	introduction	NOUN
iajs-89	13	7	the	the	DET
iajs-89	13	8	sputtering	sputtering	NOUN
iajs-89	13	9	,	,	PUNCT
iajs-89	13	10	which	which	PRON
iajs-89	13	11	is	be	AUX
iajs-89	13	12	caused	cause	VERB
iajs-89	13	13	by	by	ADP
iajs-89	13	14	the	the	DET
iajs-89	13	15	interaction	interaction	NOUN
iajs-89	13	16	of	of	ADP
iajs-89	13	17	incident	incident	NOUN
iajs-89	13	18	ions	ion	NOUN
iajs-89	13	19	with	with	ADP
iajs-89	13	20	target	target	NOUN
iajs-89	13	21	surface	surface	NOUN
iajs-89	13	22	atoms	atom	NOUN
iajs-89	13	23	,	,	PUNCT
iajs-89	13	24	was	be	AUX
iajs-89	13	25	first	first	ADV
iajs-89	13	26	observed	observe	VERB
iajs-89	13	27	in	in	ADP
iajs-89	13	28	middle	middle	NOUN
iajs-89	13	29	of	of	ADP
iajs-89	13	30	the	the	DET
iajs-89	13	31	nineteenth	nineteenth	ADJ
iajs-89	13	32	century	century	NOUN
iajs-89	14	1	[	[	X
iajs-89	14	2	1	1	NUM
iajs-89	14	3	]	]	PUNCT
iajs-89	14	4	.	.	PUNCT
iajs-89	15	1	the	the	DET
iajs-89	15	2	sputtering	sputtering	NOUN
iajs-89	15	3	is	be	AUX
iajs-89	15	4	defined	define	VERB
iajs-89	15	5	as	as	ADP
iajs-89	15	6	the	the	DET
iajs-89	15	7	physical	physical	ADJ
iajs-89	15	8	removal	removal	NOUN
iajs-89	15	9	of	of	ADP
iajs-89	15	10	material	material	NOUN
iajs-89	15	11	from	from	ADP
iajs-89	15	12	the	the	DET
iajs-89	15	13	surface	surface	NOUN
iajs-89	15	14	by	by	ADP
iajs-89	15	15	incident	incident	NOUN
iajs-89	15	16	energetic	energetic	ADJ
iajs-89	15	17	particle	particle	NOUN
iajs-89	15	18	bombardment	bombardment	NOUN
iajs-89	15	19	.	.	PUNCT
iajs-89	16	1	the	the	DET
iajs-89	16	2	physical	physical	ADJ
iajs-89	16	3	sputtering	sputtering	NOUN
iajs-89	16	4	is	be	AUX
iajs-89	16	5	driven	drive	VERB
iajs-89	16	6	by	by	ADP
iajs-89	16	7	mechanism	mechanism	NOUN
iajs-89	16	8	of	of	ADP
iajs-89	16	9	momentum	momentum	NOUN
iajs-89	16	10	exchange	exchange	NOUN
iajs-89	16	11	between	between	ADP
iajs-89	16	12	the	the	DET
iajs-89	16	13	ions	ion	NOUN
iajs-89	16	14	and	and	CCONJ
iajs-89	16	15	atoms	atom	NOUN
iajs-89	16	16	in	in	ADP
iajs-89	16	17	the	the	DET
iajs-89	16	18	material	material	NOUN
iajs-89	16	19	due	due	ADP
iajs-89	16	20	to	to	ADP
iajs-89	16	21	collisions	collision	NOUN
iajs-89	16	22	[	[	X
iajs-89	16	23	2	2	NUM
iajs-89	16	24	]	]	PUNCT
iajs-89	16	25	.	.	PUNCT
iajs-89	17	1	quantitatively	quantitatively	ADV
iajs-89	17	2	the	the	DET
iajs-89	17	3	sputtering	sputtering	NOUN
iajs-89	17	4	is	be	AUX
iajs-89	17	5	measured	measure	VERB
iajs-89	17	6	by	by	ADP
iajs-89	17	7	the	the	DET
iajs-89	17	8	sputtering	sputtering	ADJ
iajs-89	17	9	yield	yield	NOUN
iajs-89	17	10	produced	produce	VERB
iajs-89	17	11	by	by	ADP
iajs-89	17	12	the	the	DET
iajs-89	17	13	mean	mean	ADJ
iajs-89	17	14	number	number	NOUN
iajs-89	17	15	of	of	ADP
iajs-89	17	16	atoms	atom	NOUN
iajs-89	17	17	removed	remove	VERB
iajs-89	17	18	per	per	ADP
iajs-89	17	19	incident	incident	NOUN
iajs-89	17	20	particle	particle	NOUN
iajs-89	17	21	.	.	PUNCT
iajs-89	18	1	both	both	DET
iajs-89	18	2	the	the	DET
iajs-89	18	3	properties	property	NOUN
iajs-89	18	4	of	of	ADP
iajs-89	18	5	target	target	NOUN
iajs-89	18	6	and	and	CCONJ
iajs-89	18	7	the	the	DET
iajs-89	18	8	bombard	bombard	NOUN
iajs-89	18	9	ion	ion	NOUN
iajs-89	18	10	are	be	AUX
iajs-89	18	11	closed	close	VERB
iajs-89	18	12	related	relate	VERB
iajs-89	18	13	to	to	ADP
iajs-89	18	14	the	the	DET
iajs-89	18	15	sputtering	sputtering	ADJ
iajs-89	18	16	process	process	NOUN
iajs-89	18	17	.	.	PUNCT
iajs-89	19	1	sputtering	sputter	VERB
iajs-89	19	2	or	or	CCONJ
iajs-89	19	3	sometimes	sometimes	ADV
iajs-89	19	4	called	call	VERB
iajs-89	19	5	erosion	erosion	NOUN
iajs-89	19	6	of	of	ADP
iajs-89	19	7	target	target	NOUN
iajs-89	19	8	surface	surface	NOUN
iajs-89	19	9	material	material	NOUN
iajs-89	19	10	takes	take	VERB
iajs-89	19	11	place	place	NOUN
iajs-89	19	12	as	as	SCONJ
iajs-89	19	13	the	the	DET
iajs-89	19	14	fast	fast	ADJ
iajs-89	19	15	particles	particle	NOUN
iajs-89	19	16	bombard	bombard	VERB
iajs-89	19	17	a	a	DET
iajs-89	19	18	surface	surface	NOUN
iajs-89	19	19	material	material	NOUN
iajs-89	19	20	[	[	X
iajs-89	19	21	3	3	NUM
iajs-89	19	22	]	]	PUNCT
iajs-89	19	23	.	.	PUNCT
iajs-89	20	1	the	the	DET
iajs-89	20	2	incident	incident	NOUN
iajs-89	20	3	ions	ion	NOUN
iajs-89	20	4	establish	establish	VERB
iajs-89	20	5	cascades	cascade	NOUN
iajs-89	20	6	collision	collision	NOUN
iajs-89	20	7	in	in	ADP
iajs-89	20	8	the	the	DET
iajs-89	20	9	target	target	NOUN
iajs-89	20	10	.	.	PUNCT
iajs-89	21	1	when	when	SCONJ
iajs-89	21	2	the	the	DET
iajs-89	21	3	cascades	cascade	NOUN
iajs-89	21	4	recoil	recoil	NOUN
iajs-89	21	5	arrive	arrive	VERB
iajs-89	21	6	the	the	DET
iajs-89	21	7	surface	surface	NOUN
iajs-89	21	8	,	,	PUNCT
iajs-89	21	9	an	an	DET
iajs-89	21	10	atom	atom	NOUN
iajs-89	21	11	can	can	AUX
iajs-89	21	12	be	be	AUX
iajs-89	21	13	ejected	eject	VERB
iajs-89	21	14	.	.	PUNCT
iajs-89	22	1	this	this	PRON
iajs-89	22	2	takes	take	VERB
iajs-89	22	3	place	place	NOUN
iajs-89	22	4	when	when	SCONJ
iajs-89	22	5	the	the	DET
iajs-89	22	6	incident	incident	NOUN
iajs-89	22	7	ions	ion	NOUN
iajs-89	22	8	have	have	VERB
iajs-89	22	9	energy	energy	NOUN
iajs-89	22	10	above	above	ADP
iajs-89	22	11	the	the	DET
iajs-89	22	12	surface	surface	NOUN
iajs-89	22	13	binding	bind	VERB
iajs-89	22	14	energy	energy	NOUN
iajs-89	22	15	of	of	ADP
iajs-89	22	16	the	the	DET
iajs-89	22	17	target	target	NOUN
iajs-89	22	18	.	.	PUNCT
iajs-89	23	1	the	the	DET
iajs-89	23	2	sputtering	sputtering	ADJ
iajs-89	23	3	phenomenon	phenomenon	NOUN
iajs-89	23	4	is	be	AUX
iajs-89	23	5	regarded	regard	VERB
iajs-89	23	6	as	as	ADP
iajs-89	23	7	undesired	undesired	ADJ
iajs-89	23	8	side	side	NOUN
iajs-89	23	9	effect	effect	NOUN
iajs-89	23	10	such	such	ADJ
iajs-89	23	11	as	as	ADP
iajs-89	23	12	in	in	ADP
iajs-89	23	13	the	the	DET
iajs-89	23	14	tokamak	tokamak	PROPN
iajs-89	23	15	.	.	PUNCT
iajs-89	24	1	on	on	ADP
iajs-89	24	2	the	the	DET
iajs-89	24	3	other	other	ADJ
iajs-89	24	4	hand	hand	NOUN
iajs-89	24	5	,	,	PUNCT
iajs-89	24	6	sputtering	sputter	VERB
iajs-89	24	7	now	now	ADV
iajs-89	24	8	has	have	AUX
iajs-89	24	9	been	be	AUX
iajs-89	24	10	widely	widely	ADV
iajs-89	24	11	developed	develop	VERB
iajs-89	24	12	and	and	CCONJ
iajs-89	24	13	used	use	VERB
iajs-89	24	14	at	at	ADP
iajs-89	24	15	large	large	ADJ
iajs-89	24	16	for	for	ADP
iajs-89	24	17	surface	surface	NOUN
iajs-89	24	18	cleaning	cleaning	NOUN
iajs-89	24	19	and	and	CCONJ
iajs-89	24	20	etching	etch	VERB
iajs-89	24	21	,	,	PUNCT
iajs-89	24	22	surface	surface	NOUN
iajs-89	24	23	and	and	CCONJ
iajs-89	24	24	surface	surface	NOUN
iajs-89	24	25	layer	layer	NOUN
iajs-89	24	26	analysis	analysis	NOUN
iajs-89	24	27	,	,	PUNCT
iajs-89	24	28	thin	thin	ADJ
iajs-89	24	29	film	film	NOUN
iajs-89	24	30	deposition	deposition	NOUN
iajs-89	24	31	[	[	X
iajs-89	24	32	4	4	NUM
iajs-89	24	33	]	]	PUNCT
iajs-89	24	34	.	.	PUNCT
iajs-89	25	1	in	in	ADP
iajs-89	25	2	this	this	DET
iajs-89	25	3	work	work	NOUN
iajs-89	25	4	we	we	PRON
iajs-89	25	5	adapted	adapt	VERB
iajs-89	25	6	trim	trim	NOUN
iajs-89	25	7	(	(	PUNCT
iajs-89	25	8	transport	transport	NOUN
iajs-89	25	9	of	of	ADP
iajs-89	25	10	ions	ion	NOUN
iajs-89	25	11	in	in	ADP
iajs-89	25	12	matter	matter	NOUN
iajs-89	25	13	)	)	PUNCT
iajs-89	25	14	program	program	NOUN
iajs-89	25	15	for	for	ADP
iajs-89	25	16	calculations	calculation	NOUN
iajs-89	25	17	.	.	PUNCT
iajs-89	26	1	trim	trim	NOUN
iajs-89	26	2	is	be	AUX
iajs-89	26	3	based	base	VERB
iajs-89	26	4	on	on	ADP
iajs-89	26	5	monte	monte	PROPN
iajs-89	26	6	carlo	carlo	PROPN
iajs-89	26	7	simulation	simulation	PROPN
iajs-89	26	8	method	method	PROPN
iajs-89	26	9	,	,	PUNCT
iajs-89	26	10	specifically	specifically	ADV
iajs-89	26	11	the	the	DET
iajs-89	26	12	binary	binary	ADJ
iajs-89	26	13	collision	collision	PROPN
iajs-89	26	14	approximation	approximation	NOUN
iajs-89	26	15	with	with	ADP
iajs-89	26	16	random	random	ADJ
iajs-89	26	17	selection	selection	NOUN
iajs-89	26	18	of	of	ADP
iajs-89	26	19	the	the	DET
iajs-89	26	20	impact	impact	NOUN
iajs-89	26	21	parameter	parameter	NOUN
iajs-89	26	22	of	of	ADP
iajs-89	26	23	the	the	DET
iajs-89	26	24	next	next	ADJ
iajs-89	26	25	colliding	collide	VERB
iajs-89	26	26	ion	ion	NOUN
iajs-89	26	27	[	[	X
iajs-89	26	28	5	5	NUM
iajs-89	26	29	]	]	PUNCT
iajs-89	26	30	.	.	PUNCT
iajs-89	27	1	it	it	PRON
iajs-89	27	2	is	be	AUX
iajs-89	27	3	used	use	VERB
iajs-89	27	4	for	for	ADP
iajs-89	27	5	simulation	simulation	NOUN
iajs-89	27	6	due	due	ADP
iajs-89	27	7	to	to	ADP
iajs-89	27	8	their	their	PRON
iajs-89	27	9	widely	widely	ADV
iajs-89	27	10	considered	consider	VERB
iajs-89	27	11	to	to	PART
iajs-89	27	12	compute	compute	VERB
iajs-89	27	13	a	a	DET
iajs-89	27	14	number	number	NOUN
iajs-89	27	15	of	of	ADP
iajs-89	27	16	parameters	parameter	NOUN
iajs-89	27	17	relevant	relevant	ADJ
iajs-89	27	18	to	to	ADP
iajs-89	27	19	ion	ion	NOUN
iajs-89	27	20	beam	beam	NOUN
iajs-89	27	21	implantation	implantation	NOUN
iajs-89	27	22	and	and	CCONJ
iajs-89	27	23	ion	ion	NOUN
iajs-89	27	24	beam	beam	NOUN
iajs-89	27	25	processing	processing	NOUN
iajs-89	27	26	of	of	ADP
iajs-89	27	27	materials	material	NOUN
iajs-89	27	28	[	[	X
iajs-89	27	29	6	6	NUM
iajs-89	27	30	]	]	PUNCT
iajs-89	27	31	.	.	PUNCT
iajs-89	28	1	it	it	PRON
iajs-89	28	2	is	be	AUX
iajs-89	28	3	known	know	VERB
iajs-89	28	4	that	that	SCONJ
iajs-89	28	5	the	the	DET
iajs-89	28	6	silvery	silvery	NOUN
iajs-89	28	7	–	–	PUNCT
iajs-89	28	8	white	white	ADJ
iajs-89	28	9	metal	metal	NOUN
iajs-89	28	10	zinc	zinc	NOUN
iajs-89	28	11	is	be	AUX
iajs-89	28	12	considered	consider	VERB
iajs-89	28	13	to	to	PART
iajs-89	28	14	be	be	AUX
iajs-89	28	15	an	an	DET
iajs-89	28	16	important	important	ADJ
iajs-89	28	17	material	material	NOUN
iajs-89	28	18	for	for	ADP
iajs-89	28	19	coating	coating	NOUN
iajs-89	28	20	applications	application	NOUN
iajs-89	28	21	.	.	PUNCT
iajs-89	29	1	zinc	zinc	NOUN
iajs-89	29	2	and	and	CCONJ
iajs-89	29	3	its	its	PRON
iajs-89	29	4	compound	compound	NOUN
iajs-89	29	5	are	be	AUX
iajs-89	29	6	used	use	VERB
iajs-89	29	7	to	to	PART
iajs-89	29	8	coat	coat	VERB
iajs-89	29	9	(	(	PUNCT
iajs-89	29	10	galvanize	galvanize	VERB
iajs-89	29	11	)	)	PUNCT
iajs-89	29	12	iron	iron	NOUN
iajs-89	29	13	and	and	CCONJ
iajs-89	29	14	steel	steel	NOUN
iajs-89	29	15	to	to	PART
iajs-89	29	16	protect	protect	VERB
iajs-89	29	17	against	against	ADP
iajs-89	29	18	corrosion	corrosion	NOUN
iajs-89	29	19	and	and	CCONJ
iajs-89	29	20	rust	rust	NOUN
iajs-89	29	21	.	.	PUNCT
iajs-89	30	1	most	most	ADJ
iajs-89	30	2	of	of	ADP
iajs-89	30	3	the	the	DET
iajs-89	30	4	pipe	pipe	NOUN
iajs-89	30	5	interior	interior	NOUN
iajs-89	30	6	is	be	AUX
iajs-89	30	7	coated	coat	VERB
iajs-89	30	8	by	by	ADP
iajs-89	30	9	this	this	DET
iajs-89	30	10	rich	rich	ADJ
iajs-89	30	11	paint	paint	NOUN
iajs-89	30	12	.	.	PUNCT
iajs-89	31	1	however	however	ADV
iajs-89	31	2	,	,	PUNCT
iajs-89	31	3	there	there	PRON
iajs-89	31	4	are	be	VERB
iajs-89	31	5	a	a	DET
iajs-89	31	6	little	little	ADJ
iajs-89	31	7	studying	study	VERB
iajs-89	31	8	efforts	effort	NOUN
iajs-89	31	9	achieved	achieve	VERB
iajs-89	31	10	to	to	PART
iajs-89	31	11	explore	explore	VERB
iajs-89	31	12	the	the	DET
iajs-89	31	13	effect	effect	NOUN
iajs-89	31	14	of	of	ADP
iajs-89	31	15	an	an	DET
iajs-89	31	16	ion	ion	NOUN
iajs-89	31	17	–	–	PUNCT
iajs-89	31	18	induced	induce	VERB
iajs-89	31	19	zinc	zinc	NOUN
iajs-89	31	20	.	.	PUNCT
iajs-89	32	1	the	the	DET
iajs-89	32	2	latter	latter	ADJ
iajs-89	32	3	leads	lead	VERB
iajs-89	32	4	to	to	PART
iajs-89	32	5	modify	modify	VERB
iajs-89	32	6	the	the	DET
iajs-89	32	7	surface	surface	NOUN
iajs-89	32	8	properties	property	NOUN
iajs-89	32	9	and	and	CCONJ
iajs-89	32	10	becomes	become	VERB
iajs-89	32	11	morphologically	morphologically	ADV
iajs-89	32	12	rickety	rickety	ADJ
iajs-89	32	13	.	.	PUNCT
iajs-89	33	1	this	this	DET
iajs-89	33	2	work	work	NOUN
iajs-89	33	3	aims	aim	VERB
iajs-89	33	4	to	to	PART
iajs-89	33	5	explore	explore	VERB
iajs-89	33	6	the	the	DET
iajs-89	33	7	sputtering	sputtering	ADJ
iajs-89	33	8	yield	yield	NOUN
iajs-89	33	9	of	of	ADP
iajs-89	33	10	zinc	zinc	NOUN
iajs-89	33	11	bombarded	bombard	VERB
iajs-89	33	12	by	by	ADP
iajs-89	33	13	one	one	NUM
iajs-89	33	14	of	of	ADP
iajs-89	33	15	heavy	heavy	ADJ
iajs-89	33	16	ions	ion	NOUN
iajs-89	33	17	.	.	PUNCT
iajs-89	34	1	we	we	PRON
iajs-89	34	2	choose	choose	VERB
iajs-89	34	3	xe	xe	PROPN
iajs-89	34	4	ions	ion	NOUN
iajs-89	34	5	beam	beam	NOUN
iajs-89	34	6	to	to	PART
iajs-89	34	7	bombard	bombard	VERB
iajs-89	34	8	zinc	zinc	NOUN
iajs-89	34	9	to	to	PART
iajs-89	34	10	study	study	VERB
iajs-89	34	11	various	various	ADJ
iajs-89	34	12	parameters	parameter	NOUN
iajs-89	34	13	that	that	PRON
iajs-89	34	14	affect	affect	VERB
iajs-89	34	15	the	the	DET
iajs-89	34	16	sputtering	sputtering	ADJ
iajs-89	34	17	process	process	NOUN
iajs-89	34	18	.	.	PUNCT
iajs-89	35	1	description	description	NOUN
iajs-89	35	2	of	of	ADP
iajs-89	35	3	trim	trim	ADJ
iajs-89	35	4	simulation	simulation	NOUN
iajs-89	35	5	program	program	NOUN
iajs-89	35	6	so	so	ADV
iajs-89	35	7	many	many	ADJ
iajs-89	35	8	possible	possible	ADJ
iajs-89	35	9	processes	process	NOUN
iajs-89	35	10	could	could	AUX
iajs-89	35	11	be	be	AUX
iajs-89	35	12	occurred	occur	VERB
iajs-89	35	13	at	at	ADP
iajs-89	35	14	the	the	DET
iajs-89	35	15	surface	surface	NOUN
iajs-89	35	16	and	and	CCONJ
iajs-89	35	17	the	the	DET
iajs-89	35	18	core	core	NOUN
iajs-89	35	19	of	of	ADP
iajs-89	35	20	solid	solid	ADJ
iajs-89	35	21	which	which	PRON
iajs-89	35	22	is	be	AUX
iajs-89	35	23	bombarded	bombard	VERB
iajs-89	35	24	by	by	ADP
iajs-89	35	25	energetic	energetic	ADJ
iajs-89	35	26	particles	particle	NOUN
iajs-89	35	27	.	.	PUNCT
iajs-89	36	1	colliding	collide	VERB
iajs-89	36	2	energetic	energetic	ADJ
iajs-89	36	3	particles	particle	NOUN
iajs-89	36	4	may	may	AUX
iajs-89	36	5	be	be	AUX
iajs-89	36	6	single	single	ADJ
iajs-89	36	7	atoms	atom	NOUN
iajs-89	36	8	,	,	PUNCT
iajs-89	36	9	molecules	molecule	NOUN
iajs-89	36	10	,	,	PUNCT
iajs-89	36	11	or	or	CCONJ
iajs-89	36	12	ions	ion	NOUN
iajs-89	36	13	;	;	PUNCT
iajs-89	36	14	however	however	ADV
iajs-89	36	15	,	,	PUNCT
iajs-89	36	16	the	the	DET
iajs-89	36	17	yield	yield	NOUN
iajs-89	36	18	of	of	ADP
iajs-89	36	19	the	the	DET
iajs-89	36	20	collision	collision	NOUN
iajs-89	36	21	is	be	AUX
iajs-89	36	22	specified	specify	VERB
iajs-89	36	23	mostly	mostly	ADV
iajs-89	36	24	by	by	ADP
iajs-89	36	25	the	the	DET
iajs-89	36	26	kinetic	kinetic	ADJ
iajs-89	36	27	energy	energy	NOUN
iajs-89	36	28	of	of	ADP
iajs-89	36	29	the	the	DET
iajs-89	36	30	incident	incident	NOUN
iajs-89	36	31	particle	particle	NOUN
iajs-89	36	32	[	[	X
iajs-89	36	33	7	7	NUM
iajs-89	36	34	]	]	PUNCT
iajs-89	36	35	.	.	PUNCT
iajs-89	37	1	there	there	PRON
iajs-89	37	2	are	be	VERB
iajs-89	37	3	many	many	ADJ
iajs-89	37	4	theoretical	theoretical	ADJ
iajs-89	37	5	[	[	X
iajs-89	37	6	8	8	NUM
iajs-89	37	7	]	]	PUNCT
iajs-89	37	8	and	and	CCONJ
iajs-89	37	9	semi	semi	ADJ
iajs-89	37	10	–	–	PUNCT
iajs-89	37	11	empirical	empirical	ADJ
iajs-89	37	12	calculations	calculation	NOUN
iajs-89	38	1	[	[	X
iajs-89	38	2	9	9	NUM
iajs-89	38	3	-	-	SYM
iajs-89	38	4	11	11	NUM
iajs-89	38	5	]	]	PUNCT
iajs-89	38	6	which	which	PRON
iajs-89	38	7	supply	supply	VERB
iajs-89	38	8	worthy	worthy	ADJ
iajs-89	38	9	analytical	analytical	ADJ
iajs-89	38	10	expressions	expression	NOUN
iajs-89	38	11	to	to	PART
iajs-89	38	12	represent	represent	VERB
iajs-89	38	13	the	the	DET
iajs-89	38	14	substantial	substantial	ADJ
iajs-89	38	15	of	of	ADP
iajs-89	38	16	physical	physical	ADJ
iajs-89	38	17	mechanisms	mechanism	NOUN
iajs-89	38	18	related	relate	VERB
iajs-89	38	19	to	to	ADP
iajs-89	38	20	the	the	DET
iajs-89	38	21	sputtering	sputter	VERB
iajs-89	38	22	phenomena	phenomenon	NOUN
iajs-89	38	23	and	and	CCONJ
iajs-89	38	24	to	to	ADP
iajs-89	38	25	the	the	DET
iajs-89	38	26	other	other	ADJ
iajs-89	38	27	corresponding	corresponding	ADJ
iajs-89	38	28	dependency	dependency	NOUN
iajs-89	38	29	of	of	ADP
iajs-89	38	30	several	several	ADJ
iajs-89	38	31	variables	variable	NOUN
iajs-89	38	32	.	.	PUNCT
iajs-89	39	1	thus	thus	ADV
iajs-89	39	2	,	,	PUNCT
iajs-89	39	3	many	many	ADJ
iajs-89	39	4	of	of	ADP
iajs-89	39	5	software	software	NOUN
iajs-89	39	6	simulation	simulation	NOUN
iajs-89	39	7	programs	program	NOUN
iajs-89	39	8	such	such	ADJ
iajs-89	39	9	as	as	ADP
iajs-89	39	10	trim	trim	ADJ
iajs-89	39	11	,	,	PUNCT
iajs-89	39	12	acat	acat	ADJ
iajs-89	39	13	,	,	PUNCT
iajs-89	39	14	marlowe	marlowe	NOUN
iajs-89	39	15	,	,	PUNCT
iajs-89	39	16	and	and	CCONJ
iajs-89	39	17	tridyn	tridyn	NOUN
iajs-89	39	18	have	have	AUX
iajs-89	39	19	been	be	AUX
iajs-89	39	20	developed	develop	VERB
iajs-89	39	21	.	.	PUNCT
iajs-89	40	1	these	these	DET
iajs-89	40	2	programs	program	NOUN
iajs-89	40	3	simulate	simulate	VERB
iajs-89	40	4	the	the	DET
iajs-89	40	5	evolution	evolution	NOUN
iajs-89	40	6	of	of	ADP
iajs-89	40	7	the	the	DET
iajs-89	40	8	collision	collision	NOUN
iajs-89	40	9	cascade	cascade	NOUN
iajs-89	40	10	inside	inside	ADP
iajs-89	40	11	the	the	DET
iajs-89	40	12	target	target	NOUN
iajs-89	40	13	bombarded	bombard	VERB
iajs-89	40	14	by	by	ADP
iajs-89	40	15	a	a	DET
iajs-89	40	16	beam	beam	NOUN
iajs-89	40	17	of	of	ADP
iajs-89	40	18	ions	ion	NOUN
iajs-89	40	19	.	.	PUNCT
iajs-89	41	1	the	the	DET
iajs-89	41	2	program	program	NOUN
iajs-89	41	3	trim	trim	NOUN
iajs-89	41	4	is	be	AUX
iajs-89	41	5	a	a	DET
iajs-89	41	6	binary	binary	ADJ
iajs-89	41	7	collision	collision	NOUN
iajs-89	41	8	monte	monte	PROPN
iajs-89	41	9	carlo	carlo	PROPN
iajs-89	41	10	code	code	PROPN
iajs-89	41	11	that	that	PRON
iajs-89	41	12	simulates	simulate	VERB
iajs-89	41	13	the	the	DET
iajs-89	41	14	sputter	sputter	NOUN
iajs-89	41	15	process	process	NOUN
iajs-89	41	16	and	and	CCONJ
iajs-89	41	17	calculates	calculate	VERB
iajs-89	41	18	the	the	DET
iajs-89	41	19	sputtering	sputter	VERB
iajs-89	41	20	yield	yield	NOUN
iajs-89	41	21	and	and	CCONJ
iajs-89	41	22	other	other	ADJ
iajs-89	41	23	parameters	parameter	NOUN
iajs-89	41	24	corresponding	correspond	VERB
iajs-89	41	25	to	to	ADP
iajs-89	41	26	it	it	PRON
iajs-89	41	27	.	.	PUNCT
iajs-89	42	1	the	the	DET
iajs-89	42	2	program	program	NOUN
iajs-89	42	3	approximates	approximate	VERB
iajs-89	42	4	the	the	DET
iajs-89	42	5	binary	binary	ADJ
iajs-89	42	6	collision	collision	NOUN
iajs-89	42	7	by	by	ADP
iajs-89	42	8	treating	treat	VERB
iajs-89	42	9	the	the	DET
iajs-89	42	10	transport	transport	NOUN
iajs-89	42	11	of	of	ADP
iajs-89	42	12	atoms	atom	NOUN
iajs-89	42	13	in	in	ADP
iajs-89	42	14	a	a	DET
iajs-89	42	15	solid	solid	ADJ
iajs-89	42	16	as	as	SCONJ
iajs-89	42	17	it	it	PRON
iajs-89	42	18	is	be	AUX
iajs-89	42	19	a	a	DET
iajs-89	42	20	series	series	NOUN
iajs-89	42	21	of	of	ADP
iajs-89	42	22	consecutive	consecutive	ADJ
iajs-89	42	23	collisions	collision	NOUN
iajs-89	42	24	between	between	ADP
iajs-89	42	25	which	which	PRON
iajs-89	42	26	that	that	SCONJ
iajs-89	42	27	the	the	DET
iajs-89	42	28	particle	particle	NOUN
iajs-89	42	29	follows	follow	VERB
iajs-89	42	30	a	a	DET
iajs-89	42	31	straight	straight	ADJ
iajs-89	42	32	trajectory	trajectory	NOUN
iajs-89	42	33	(	(	PUNCT
iajs-89	42	34	figure	figure	NOUN
iajs-89	42	35	1	1	NUM
iajs-89	42	36	)	)	PUNCT
iajs-89	43	1	[	[	X
iajs-89	43	2	12	12	NUM
iajs-89	43	3	]	]	PUNCT
iajs-89	43	4	.	.	PUNCT
iajs-89	44	1	the	the	DET
iajs-89	44	2	motion	motion	NOUN
iajs-89	44	3	of	of	ADP
iajs-89	44	4	particle	particle	NOUN
iajs-89	44	5	that	that	PRON
iajs-89	44	6	have	have	VERB
iajs-89	44	7	energy	energy	NOUN
iajs-89	44	8	after	after	ADP
iajs-89	44	9	making	make	VERB
iajs-89	44	10	th	th	X
iajs-89	44	11	collision	collision	NOUN
iajs-89	44	12	is	be	AUX
iajs-89	44	13	expressed	express	VERB
iajs-89	44	14	by	by	ADP
iajs-89	44	15	the	the	DET
iajs-89	44	16	polar	polar	ADJ
iajs-89	44	17	and	and	CCONJ
iajs-89	44	18	azimuthal	azimuthal	NOUN
iajs-89	44	19	angles	angle	NOUN
iajs-89	44	20	and	and	CCONJ
iajs-89	44	21	.	.	PUNCT
iajs-89	45	1	it	it	PRON
iajs-89	45	2	is	be	AUX
iajs-89	45	3	allowed	allow	VERB
iajs-89	45	4	for	for	SCONJ
iajs-89	45	5	the	the	DET
iajs-89	45	6	recoil	recoil	NOUN
iajs-89	45	7	atom	atom	NOUN
iajs-89	45	8	(	(	PUNCT
iajs-89	45	9	ion	ion	NOUN
iajs-89	45	10	)	)	PUNCT
iajs-89	45	11	to	to	PART
iajs-89	45	12	move	move	VERB
iajs-89	45	13	over	over	ADP
iajs-89	45	14	the	the	DET
iajs-89	45	15	mean	mean	ADJ
iajs-89	45	16	free	free	ADJ
iajs-89	45	17	path	path	NOUN
iajs-89	45	18	length	length	NOUN
iajs-89	45	19	of	of	ADP
iajs-89	45	20	.	.	PUNCT
iajs-89	46	1	thus	thus	ADV
iajs-89	46	2	,	,	PUNCT
iajs-89	46	3	the	the	DET
iajs-89	46	4	mean	mean	ADJ
iajs-89	46	5	free	free	ADJ
iajs-89	46	6	path	path	NOUN
iajs-89	46	7	length	length	NOUN
iajs-89	46	8	is	be	AUX
iajs-89	46	9	defined	define	VERB
iajs-89	46	10	as	as	ADP
iajs-89	46	11	the	the	DET
iajs-89	46	12	average	average	ADJ
iajs-89	46	13	atomic	atomic	ADJ
iajs-89	46	14	distance	distance	NOUN
iajs-89	46	15	of	of	ADP
iajs-89	46	16	the	the	DET
iajs-89	46	17	target	target	NOUN
iajs-89	46	18	material	material	NOUN
iajs-89	46	19	√	√	NUM
iajs-89	46	20	(	(	PUNCT
iajs-89	46	21	1	1	NUM
iajs-89	46	22	)	)	PUNCT
iajs-89	46	23	physics	physics	NOUN
iajs-89	46	24	|	|	ADV
iajs-89	46	25	106	106	NUM
iajs-89	46	26	2016	2016	NUM
iajs-89	46	27	)	)	PUNCT
iajs-89	46	28	عام	عام	ADP
iajs-89	46	29	2(العدد	2(العدد	NUM
iajs-89	46	30	29المجلد	29المجلد	NUM
iajs-89	46	31	مجلة	مجلة	PROPN
iajs-89	46	32	إبن	إبن	NOUN
iajs-89	46	33	الهيثم	الهيثم	ADJ
iajs-89	46	34	للعلوم	للعلوم	NOUN
iajs-89	46	35	الصرفة	الصرفة	NOUN
iajs-89	47	1	و	و	PRON
iajs-89	47	2	التطبيقية	التطبيقية	ADJ
iajs-89	47	3	ibn	ibn	PROPN
iajs-89	47	4	al	al	PROPN
iajs-89	47	5	-	-	PUNCT
iajs-89	47	6	haitham	haitham	PROPN
iajs-89	47	7	j.	j.	PROPN
iajs-89	47	8	for	for	ADP
iajs-89	47	9	pure	pure	PROPN
iajs-89	47	10	&	&	CCONJ
iajs-89	47	11	appl	appl	PROPN
iajs-89	47	12	.	.	PUNCT
iajs-89	48	1	sci	sci	PROPN
iajs-89	48	2	.	.	PUNCT
iajs-89	49	1	vol.29	vol.29	PROPN
iajs-89	49	2	(	(	PUNCT
iajs-89	49	3	2	2	NUM
iajs-89	49	4	)	)	PUNCT
iajs-89	49	5	2016	2016	NUM
iajs-89	49	6	such	such	ADJ
iajs-89	49	7	that	that	PRON
iajs-89	49	8	is	be	AUX
iajs-89	49	9	the	the	DET
iajs-89	49	10	atomic	atomic	ADJ
iajs-89	49	11	density	density	NOUN
iajs-89	49	12	of	of	ADP
iajs-89	49	13	the	the	DET
iajs-89	49	14	material	material	NOUN
iajs-89	49	15	.	.	PUNCT
iajs-89	50	1	the	the	DET
iajs-89	50	2	particles	particle	NOUN
iajs-89	50	3	after	after	ADP
iajs-89	50	4	travelling	travel	VERB
iajs-89	50	5	distance	distance	NOUN
iajs-89	50	6	it	it	PRON
iajs-89	50	7	obey	obey	VERB
iajs-89	50	8	colliding	collide	VERB
iajs-89	50	9	again	again	ADV
iajs-89	50	10	and	and	CCONJ
iajs-89	50	11	scattered	scatter	VERB
iajs-89	50	12	over	over	ADP
iajs-89	50	13	the	the	DET
iajs-89	50	14	angles	angle	NOUN
iajs-89	50	15	and	and	CCONJ
iajs-89	50	16	with	with	ADP
iajs-89	50	17	respect	respect	NOUN
iajs-89	50	18	to	to	ADP
iajs-89	50	19	the	the	DET
iajs-89	50	20	mass	mass	NOUN
iajs-89	50	21	system	system	NOUN
iajs-89	50	22	.	.	PUNCT
iajs-89	51	1	the	the	DET
iajs-89	51	2	angle	angle	NOUN
iajs-89	51	3	in	in	ADP
iajs-89	51	4	cylindrical	cylindrical	ADJ
iajs-89	51	5	symmetry	symmetry	NOUN
iajs-89	51	6	can	can	AUX
iajs-89	51	7	be	be	AUX
iajs-89	51	8	randomly	randomly	ADV
iajs-89	51	9	selected	select	VERB
iajs-89	51	10	in	in	ADP
iajs-89	51	11	the	the	DET
iajs-89	51	12	interval	interval	NOUN
iajs-89	51	13	0	0	NUM
iajs-89	51	14	,	,	PUNCT
iajs-89	51	15	2	2	NUM
iajs-89	51	16	,	,	PUNCT
iajs-89	51	17	whilst	whilst	SCONJ
iajs-89	51	18	the	the	DET
iajs-89	51	19	polar	polar	ADJ
iajs-89	51	20	scattering	scatter	VERB
iajs-89	51	21	angle	angle	NOUN
iajs-89	51	22	can	can	AUX
iajs-89	51	23	be	be	AUX
iajs-89	51	24	numerically	numerically	ADV
iajs-89	51	25	calculated	calculate	VERB
iajs-89	51	26	using	use	VERB
iajs-89	51	27	the	the	DET
iajs-89	51	28	classical	classical	ADJ
iajs-89	51	29	path	path	NOUN
iajs-89	51	30	integral	integral	ADJ
iajs-89	52	1	[	[	X
iajs-89	52	2	13	13	NUM
iajs-89	52	3	]	]	SYM
iajs-89	52	4	2	2	NUM
iajs-89	52	5	∞	∞	NUM
iajs-89	52	6	(	(	PUNCT
iajs-89	52	7	2	2	NUM
iajs-89	52	8	)	)	PUNCT
iajs-89	52	9	where	where	SCONJ
iajs-89	52	10	is	be	AUX
iajs-89	52	11	the	the	DET
iajs-89	52	12	minimum	minimum	ADJ
iajs-89	52	13	distance	distance	NOUN
iajs-89	52	14	of	of	ADP
iajs-89	52	15	approach	approach	NOUN
iajs-89	52	16	,	,	PUNCT
iajs-89	52	17	is	be	AUX
iajs-89	52	18	the	the	DET
iajs-89	52	19	inter	inter	ADJ
iajs-89	52	20	atomic	atomic	ADJ
iajs-89	52	21	potential	potential	NOUN
iajs-89	52	22	,	,	PUNCT
iajs-89	52	23	is	be	AUX
iajs-89	52	24	the	the	DET
iajs-89	52	25	energy	energy	NOUN
iajs-89	52	26	of	of	ADP
iajs-89	52	27	the	the	DET
iajs-89	52	28	particle	particle	NOUN
iajs-89	52	29	in	in	ADP
iajs-89	52	30	the	the	DET
iajs-89	52	31	center	center	NOUN
iajs-89	52	32	of	of	ADP
iajs-89	52	33	mass	mass	ADJ
iajs-89	52	34	system	system	NOUN
iajs-89	52	35	,	,	PUNCT
iajs-89	52	36	and	and	CCONJ
iajs-89	52	37	is	be	AUX
iajs-89	52	38	the	the	DET
iajs-89	52	39	impact	impact	NOUN
iajs-89	52	40	parameter	parameter	NOUN
iajs-89	52	41	.	.	PUNCT
iajs-89	53	1	the	the	DET
iajs-89	53	2	impact	impact	NOUN
iajs-89	53	3	parameter	parameter	NOUN
iajs-89	53	4	value	value	NOUN
iajs-89	53	5	is	be	AUX
iajs-89	53	6	calculated	calculate	VERB
iajs-89	53	7	from	from	ADP
iajs-89	53	8	a	a	DET
iajs-89	53	9	random	random	ADJ
iajs-89	53	10	number	number	NOUN
iajs-89	53	11	,	,	PUNCT
iajs-89	53	12	equally	equally	ADV
iajs-89	53	13	distributed	distribute	VERB
iajs-89	53	14	in	in	ADP
iajs-89	53	15	0	0	NUM
iajs-89	53	16	,	,	PUNCT
iajs-89	53	17	1	1	NUM
iajs-89	53	18	(	(	PUNCT
iajs-89	53	19	3	3	NUM
iajs-89	53	20	)	)	PUNCT
iajs-89	53	21	where	where	SCONJ
iajs-89	53	22	the	the	DET
iajs-89	53	23	maximum	maximum	ADJ
iajs-89	53	24	impact	impact	NOUN
iajs-89	53	25	parameter	parameter	NOUN
iajs-89	53	26	is	be	AUX
iajs-89	53	27	given	give	VERB
iajs-89	53	28	by	by	ADP
iajs-89	53	29	(	(	PUNCT
iajs-89	53	30	4	4	X
iajs-89	53	31	)	)	PUNCT
iajs-89	53	32	this	this	PRON
iajs-89	53	33	means	mean	VERB
iajs-89	53	34	that	that	SCONJ
iajs-89	53	35	there	there	PRON
iajs-89	53	36	is	be	VERB
iajs-89	53	37	one	one	NUM
iajs-89	53	38	target	target	NOUN
iajs-89	53	39	atom	atom	NOUN
iajs-89	53	40	contained	contain	VERB
iajs-89	53	41	in	in	ADP
iajs-89	53	42	a	a	DET
iajs-89	53	43	cylindrical	cylindrical	ADJ
iajs-89	53	44	volume	volume	NOUN
iajs-89	53	45	with	with	ADP
iajs-89	53	46	length	length	NOUN
iajs-89	53	47	and	and	CCONJ
iajs-89	53	48	radius	radius	NOUN
iajs-89	53	49	and	and	CCONJ
iajs-89	53	50	this	this	DET
iajs-89	53	51	atom	atom	NOUN
iajs-89	53	52	corresponds	correspond	VERB
iajs-89	53	53	with	with	ADP
iajs-89	53	54	one	one	NUM
iajs-89	53	55	collision	collision	NOUN
iajs-89	53	56	per	per	ADP
iajs-89	53	57	atomic	atomic	ADJ
iajs-89	53	58	volume	volume	NOUN
iajs-89	53	59	1⁄	1⁄	NUM
iajs-89	53	60	.	.	PUNCT
iajs-89	54	1	after	after	ADP
iajs-89	54	2	correctly	correctly	ADV
iajs-89	54	3	rotating	rotating	NOUN
iajs-89	54	4	of	of	ADP
iajs-89	54	5	the	the	DET
iajs-89	54	6	angles	angle	NOUN
iajs-89	54	7	and	and	CCONJ
iajs-89	54	8	to	to	ADP
iajs-89	54	9	the	the	DET
iajs-89	54	10	laboratory	laboratory	NOUN
iajs-89	54	11	system	system	NOUN
iajs-89	54	12	the	the	DET
iajs-89	54	13	new	new	ADJ
iajs-89	54	14	directional	directional	ADJ
iajs-89	54	15	angles	angle	VERB
iajs-89	54	16	1	1	NUM
iajs-89	54	17	and	and	CCONJ
iajs-89	54	18	1	1	NUM
iajs-89	54	19	can	can	AUX
iajs-89	54	20	be	be	AUX
iajs-89	54	21	calculated	calculate	VERB
iajs-89	54	22	from	from	ADP
iajs-89	54	23	scattering	scatter	VERB
iajs-89	54	24	angles	angle	NOUN
iajs-89	54	25	θ	θ	PROPN
iajs-89	54	26	and	and	CCONJ
iajs-89	54	27	φ	φ	PROPN
iajs-89	54	28	.	.	PUNCT
iajs-89	55	1	therefore	therefore	ADV
iajs-89	55	2	,	,	PUNCT
iajs-89	55	3	after	after	ADP
iajs-89	55	4	the	the	DET
iajs-89	55	5	collision	collision	NOUN
iajs-89	55	6	the	the	DET
iajs-89	55	7	particle	particle	NOUN
iajs-89	55	8	energy	energy	NOUN
iajs-89	55	9	is	be	AUX
iajs-89	55	10	given	give	VERB
iajs-89	55	11	by	by	ADP
iajs-89	55	12	δ	δ	PROPN
iajs-89	55	13	(	(	PUNCT
iajs-89	55	14	5	5	NUM
iajs-89	55	15	)	)	PUNCT
iajs-89	55	16	where	where	SCONJ
iajs-89	55	17	∆	∆	PROPN
iajs-89	55	18	is	be	AUX
iajs-89	55	19	the	the	DET
iajs-89	55	20	electronic	electronic	ADJ
iajs-89	55	21	energy	energy	NOUN
iajs-89	55	22	loss	loss	NOUN
iajs-89	55	23	and	and	CCONJ
iajs-89	55	24	is	be	AUX
iajs-89	55	25	the	the	DET
iajs-89	55	26	transferred	transfer	VERB
iajs-89	55	27	kinetic	kinetic	ADJ
iajs-89	55	28	energy	energy	NOUN
iajs-89	55	29	.	.	PUNCT
iajs-89	56	1	it	it	PRON
iajs-89	56	2	is	be	AUX
iajs-89	56	3	almost	almost	ADV
iajs-89	56	4	often	often	ADV
iajs-89	56	5	,	,	PUNCT
iajs-89	56	6	due	due	ADP
iajs-89	56	7	to	to	ADP
iajs-89	56	8	lack	lack	NOUN
iajs-89	56	9	of	of	ADP
iajs-89	56	10	knowledge	knowledge	NOUN
iajs-89	56	11	,	,	PUNCT
iajs-89	56	12	that	that	SCONJ
iajs-89	56	13	the	the	DET
iajs-89	56	14	bulk	bulk	ADJ
iajs-89	56	15	binding	bind	VERB
iajs-89	56	16	energy	energy	NOUN
iajs-89	56	17	of	of	ADP
iajs-89	56	18	the	the	DET
iajs-89	56	19	target	target	NOUN
iajs-89	56	20	material	material	NOUN
iajs-89	56	21	is	be	AUX
iajs-89	56	22	set	set	VERB
iajs-89	56	23	to	to	ADP
iajs-89	56	24	zero	zero	NUM
iajs-89	56	25	.	.	PUNCT
iajs-89	57	1	if	if	SCONJ
iajs-89	57	2	the	the	DET
iajs-89	57	3	displacement	displacement	ADJ
iajs-89	57	4	energy	energy	NOUN
iajs-89	57	5	is	be	AUX
iajs-89	57	6	less	less	ADJ
iajs-89	57	7	than	than	ADP
iajs-89	57	8	the	the	DET
iajs-89	57	9	transferred	transfer	VERB
iajs-89	57	10	kinetic	kinetic	ADJ
iajs-89	57	11	energy	energy	NOUN
iajs-89	57	12	a	a	DET
iajs-89	57	13	recoil	recoil	NOUN
iajs-89	57	14	is	be	AUX
iajs-89	57	15	generated	generate	VERB
iajs-89	57	16	with	with	ADP
iajs-89	57	17	initial	initial	ADJ
iajs-89	57	18	energy	energy	NOUN
iajs-89	57	19	.	.	PUNCT
iajs-89	58	1	the	the	DET
iajs-89	58	2	incident	incident	NOUN
iajs-89	58	3	ion	ion	NOUN
iajs-89	58	4	and	and	CCONJ
iajs-89	58	5	the	the	DET
iajs-89	58	6	generated	generate	VERB
iajs-89	58	7	recoils	recoil	NOUN
iajs-89	58	8	are	be	AUX
iajs-89	58	9	tracked	track	VERB
iajs-89	58	10	until	until	SCONJ
iajs-89	58	11	their	their	PRON
iajs-89	58	12	kinetic	kinetic	ADJ
iajs-89	58	13	energy	energy	NOUN
iajs-89	58	14	falls	fall	VERB
iajs-89	58	15	below	below	ADP
iajs-89	58	16	a	a	DET
iajs-89	58	17	particular	particular	ADJ
iajs-89	58	18	cut	cut	NOUN
iajs-89	58	19	off	off	ADP
iajs-89	58	20	energy	energy	NOUN
iajs-89	58	21	.	.	PUNCT
iajs-89	59	1	this	this	DET
iajs-89	59	2	cutoff	cutoff	NOUN
iajs-89	59	3	energy	energy	NOUN
iajs-89	59	4	can	can	AUX
iajs-89	59	5	be	be	AUX
iajs-89	59	6	selected	select	VERB
iajs-89	59	7	to	to	PART
iajs-89	59	8	be	be	AUX
iajs-89	59	9	the	the	DET
iajs-89	59	10	surface	surface	NOUN
iajs-89	59	11	binding	bind	VERB
iajs-89	59	12	energy	energy	NOUN
iajs-89	59	13	which	which	PRON
iajs-89	59	14	represents	represent	VERB
iajs-89	59	15	the	the	DET
iajs-89	59	16	minimum	minimum	ADJ
iajs-89	59	17	energy	energy	NOUN
iajs-89	59	18	an	an	DET
iajs-89	59	19	atom	atom	NOUN
iajs-89	59	20	must	must	AUX
iajs-89	59	21	have	have	VERB
iajs-89	59	22	to	to	PART
iajs-89	59	23	escape	escape	VERB
iajs-89	59	24	the	the	DET
iajs-89	59	25	surface	surface	NOUN
iajs-89	60	1	[	[	X
iajs-89	60	2	14	14	NUM
iajs-89	60	3	]	]	PUNCT
iajs-89	60	4	.	.	PUNCT
iajs-89	61	1	result	result	NOUN
iajs-89	61	2	and	and	CCONJ
iajs-89	61	3	discussions	discussion	NOUN
iajs-89	61	4	figure	figure	NOUN
iajs-89	61	5	(	(	PUNCT
iajs-89	61	6	2a	2a	NUM
iajs-89	61	7	)	)	PUNCT
iajs-89	61	8	shows	show	VERB
iajs-89	61	9	the	the	DET
iajs-89	61	10	dependence	dependence	NOUN
iajs-89	61	11	of	of	ADP
iajs-89	61	12	the	the	DET
iajs-89	61	13	sputtering	sputtering	ADJ
iajs-89	61	14	yield	yield	NOUN
iajs-89	61	15	on	on	ADP
iajs-89	61	16	width	width	NOUN
iajs-89	61	17	of	of	ADP
iajs-89	61	18	the	the	DET
iajs-89	61	19	zn	zn	PROPN
iajs-89	61	20	bombarded	bombard	VERB
iajs-89	61	21	by	by	ADP
iajs-89	61	22	xenon	xenon	NOUN
iajs-89	61	23	at	at	ADP
iajs-89	61	24	normal	normal	ADJ
iajs-89	61	25	incident	incident	NOUN
iajs-89	61	26	with	with	ADP
iajs-89	61	27	5000	5000	NUM
iajs-89	61	28	ion	ion	NOUN
iajs-89	61	29	number	number	NOUN
iajs-89	61	30	and	and	CCONJ
iajs-89	61	31	ion	ion	NOUN
iajs-89	61	32	energy	energy	NOUN
iajs-89	61	33	of	of	ADP
iajs-89	61	34	50	50	NUM
iajs-89	61	35	kev	kev	NOUN
iajs-89	61	36	.	.	PUNCT
iajs-89	62	1	the	the	DET
iajs-89	62	2	sputtering	sputtering	ADJ
iajs-89	62	3	yield	yield	NOUN
iajs-89	62	4	profile	profile	NOUN
iajs-89	62	5	as	as	SCONJ
iajs-89	62	6	a	a	DET
iajs-89	62	7	function	function	NOUN
iajs-89	62	8	width	width	NOUN
iajs-89	62	9	behaves	behave	VERB
iajs-89	62	10	as	as	ADP
iajs-89	62	11	in	in	ADP
iajs-89	62	12	significantly	significantly	ADV
iajs-89	62	13	increased	increase	VERB
iajs-89	62	14	manner	manner	NOUN
iajs-89	62	15	then	then	ADV
iajs-89	62	16	obeys	obey	VERB
iajs-89	62	17	to	to	ADP
iajs-89	62	18	slowly	slowly	ADV
iajs-89	62	19	fluctuation	fluctuation	NOUN
iajs-89	62	20	until	until	SCONJ
iajs-89	62	21	it	it	PRON
iajs-89	62	22	remains	remain	VERB
iajs-89	62	23	stable	stable	ADJ
iajs-89	62	24	at	at	ADP
iajs-89	62	25	critical	critical	ADJ
iajs-89	62	26	width	width	NOUN
iajs-89	62	27	400	400	NUM
iajs-89	62	28	a	a	PRON
iajs-89	62	29	.	.	PUNCT
iajs-89	63	1	this	this	PRON
iajs-89	63	2	means	mean	VERB
iajs-89	63	3	that	that	SCONJ
iajs-89	63	4	anymore	anymore	ADV
iajs-89	63	5	further	further	ADJ
iajs-89	63	6	increase	increase	NOUN
iajs-89	63	7	in	in	ADP
iajs-89	63	8	the	the	DET
iajs-89	63	9	width	width	NOUN
iajs-89	63	10	would	would	AUX
iajs-89	63	11	not	not	PART
iajs-89	63	12	affect	affect	VERB
iajs-89	63	13	the	the	DET
iajs-89	63	14	sputtering	sputter	VERB
iajs-89	63	15	yields	yield	NOUN
iajs-89	63	16	.	.	PUNCT
iajs-89	64	1	therefore	therefore	ADV
iajs-89	64	2	,	,	PUNCT
iajs-89	64	3	to	to	PART
iajs-89	64	4	get	get	VERB
iajs-89	64	5	a	a	DET
iajs-89	64	6	rid	rid	NOUN
iajs-89	64	7	of	of	ADP
iajs-89	64	8	the	the	DET
iajs-89	64	9	fluctuation	fluctuation	NOUN
iajs-89	64	10	at	at	ADP
iajs-89	64	11	lower	low	ADJ
iajs-89	64	12	width	width	NOUN
iajs-89	64	13	of	of	ADP
iajs-89	64	14	zn	zn	PROPN
iajs-89	64	15	one	one	NUM
iajs-89	64	16	refers	refer	VERB
iajs-89	64	17	to	to	PART
iajs-89	64	18	use	use	VERB
iajs-89	64	19	this	this	DET
iajs-89	64	20	critical	critical	ADJ
iajs-89	64	21	value	value	NOUN
iajs-89	64	22	or	or	CCONJ
iajs-89	64	23	higher	high	ADJ
iajs-89	64	24	to	to	PART
iajs-89	64	25	study	study	VERB
iajs-89	64	26	other	other	ADJ
iajs-89	64	27	parameters	parameter	NOUN
iajs-89	64	28	.	.	PUNCT
iajs-89	65	1	figure	figure	NOUN
iajs-89	65	2	(	(	PUNCT
iajs-89	65	3	2b	2b	NOUN
iajs-89	65	4	)	)	PUNCT
iajs-89	65	5	shows	show	VERB
iajs-89	65	6	the	the	DET
iajs-89	65	7	corresponding	correspond	VERB
iajs-89	65	8	energy	energy	NOUN
iajs-89	65	9	loss	loss	NOUN
iajs-89	65	10	due	due	ADP
iajs-89	65	11	to	to	ADP
iajs-89	65	12	ionization	ionization	NOUN
iajs-89	65	13	.	.	PUNCT
iajs-89	66	1	this	this	DET
iajs-89	66	2	loss	loss	NOUN
iajs-89	66	3	is	be	AUX
iajs-89	66	4	electronic	electronic	ADJ
iajs-89	66	5	energy	energy	NOUN
iajs-89	66	6	loss	loss	NOUN
iajs-89	66	7	due	due	ADP
iajs-89	66	8	to	to	ADP
iajs-89	66	9	energy	energy	NOUN
iajs-89	66	10	loss	loss	NOUN
iajs-89	66	11	of	of	ADP
iajs-89	66	12	incident	incident	NOUN
iajs-89	66	13	ions	ion	NOUN
iajs-89	66	14	to	to	ADP
iajs-89	66	15	the	the	DET
iajs-89	66	16	electrons	electron	NOUN
iajs-89	66	17	of	of	ADP
iajs-89	66	18	the	the	DET
iajs-89	66	19	target	target	NOUN
iajs-89	66	20	whenever	whenever	SCONJ
iajs-89	66	21	the	the	DET
iajs-89	66	22	ions	ion	NOUN
iajs-89	66	23	penetrate	penetrate	VERB
iajs-89	66	24	into	into	ADP
iajs-89	66	25	the	the	DET
iajs-89	66	26	target	target	NOUN
iajs-89	66	27	.	.	PUNCT
iajs-89	67	1	the	the	DET
iajs-89	67	2	ions	ion	NOUN
iajs-89	67	3	soon	soon	ADV
iajs-89	67	4	interact	interact	VERB
iajs-89	67	5	with	with	ADP
iajs-89	67	6	the	the	DET
iajs-89	67	7	electrons	electron	NOUN
iajs-89	67	8	of	of	ADP
iajs-89	67	9	the	the	DET
iajs-89	67	10	target	target	NOUN
iajs-89	67	11	collectively	collectively	ADV
iajs-89	67	12	or	or	CCONJ
iajs-89	67	13	singly	singly	ADV
iajs-89	67	14	[	[	X
iajs-89	67	15	15	15	NUM
iajs-89	67	16	]	]	PUNCT
iajs-89	67	17	.	.	PUNCT
iajs-89	68	1	the	the	DET
iajs-89	68	2	way	way	NOUN
iajs-89	68	3	of	of	ADP
iajs-89	68	4	interaction	interaction	NOUN
iajs-89	68	5	seems	seem	VERB
iajs-89	68	6	to	to	PART
iajs-89	68	7	be	be	AUX
iajs-89	68	8	quite	quite	ADV
iajs-89	68	9	complicated	complicated	ADJ
iajs-89	68	10	and	and	CCONJ
iajs-89	68	11	it	it	PRON
iajs-89	68	12	is	be	AUX
iajs-89	68	13	divided	divide	VERB
iajs-89	68	14	to	to	ADP
iajs-89	68	15	two	two	NUM
iajs-89	68	16	categories	category	NOUN
iajs-89	68	17	;	;	PUNCT
iajs-89	68	18	ions	ion	NOUN
iajs-89	68	19	and	and	CCONJ
iajs-89	68	20	recoils	recoil	VERB
iajs-89	68	21	.	.	PUNCT
iajs-89	69	1	the	the	DET
iajs-89	69	2	recoils	recoil	VERB
iajs-89	69	3	loss	loss	NOUN
iajs-89	69	4	is	be	AUX
iajs-89	69	5	due	due	ADJ
iajs-89	69	6	to	to	ADP
iajs-89	69	7	very	very	ADV
iajs-89	69	8	much	much	ADV
iajs-89	69	9	less	less	ADJ
iajs-89	69	10	interaction	interaction	NOUN
iajs-89	69	11	of	of	ADP
iajs-89	69	12	relatively	relatively	ADV
iajs-89	69	13	slowly	slowly	ADJ
iajs-89	69	14	movement	movement	NOUN
iajs-89	69	15	of	of	ADP
iajs-89	69	16	recoiling	recoil	VERB
iajs-89	69	17	target	target	NOUN
iajs-89	69	18	atoms	atom	NOUN
iajs-89	69	19	with	with	ADP
iajs-89	69	20	very	very	ADV
iajs-89	69	21	fast	fast	ADJ
iajs-89	69	22	moving	moving	NOUN
iajs-89	69	23	electrons	electron	NOUN
iajs-89	69	24	of	of	ADP
iajs-89	69	25	the	the	DET
iajs-89	69	26	target	target	NOUN
iajs-89	69	27	.	.	PUNCT
iajs-89	70	1	it	it	PRON
iajs-89	70	2	is	be	AUX
iajs-89	70	3	evidence	evidence	NOUN
iajs-89	70	4	that	that	SCONJ
iajs-89	70	5	the	the	DET
iajs-89	70	6	ions	ion	NOUN
iajs-89	70	7	loss	loss	NOUN
iajs-89	70	8	decreases	decrease	NOUN
iajs-89	70	9	as	as	ADP
iajs-89	70	10	the	the	DET
iajs-89	70	11	target	target	NOUN
iajs-89	70	12	width	width	NOUN
iajs-89	70	13	increases	increase	NOUN
iajs-89	70	14	to	to	ADP
iajs-89	70	15	a	a	DET
iajs-89	70	16	limit	limit	NOUN
iajs-89	70	17	and	and	CCONJ
iajs-89	70	18	remains	remain	VERB
iajs-89	70	19	stable	stable	ADJ
iajs-89	70	20	then	then	ADV
iajs-89	70	21	while	while	SCONJ
iajs-89	70	22	the	the	PRON
iajs-89	70	23	recoils	recoil	VERB
iajs-89	70	24	loss	loss	NOUN
iajs-89	70	25	increases	increase	NOUN
iajs-89	70	26	to	to	ADP
iajs-89	70	27	a	a	DET
iajs-89	70	28	peak	peak	NOUN
iajs-89	70	29	and	and	CCONJ
iajs-89	70	30	then	then	ADV
iajs-89	70	31	steadily	steadily	ADV
iajs-89	70	32	stabilizes	stabilize	VERB
iajs-89	70	33	as	as	ADP
iajs-89	70	34	the	the	DET
iajs-89	70	35	width	width	ADJ
iajs-89	70	36	increases	increase	NOUN
iajs-89	70	37	.	.	PUNCT
iajs-89	71	1	the	the	DET
iajs-89	71	2	ion	ion	NOUN
iajs-89	71	3	losses	loss	NOUN
iajs-89	71	4	by	by	ADP
iajs-89	71	5	ionization	ionization	NOUN
iajs-89	71	6	will	will	AUX
iajs-89	71	7	result	result	VERB
iajs-89	71	8	in	in	ADP
iajs-89	71	9	target	target	NOUN
iajs-89	71	10	damage	damage	NOUN
iajs-89	71	11	.	.	PUNCT
iajs-89	72	1	firstly	firstly	ADV
iajs-89	72	2	,	,	PUNCT
iajs-89	72	3	the	the	DET
iajs-89	72	4	target	target	NOUN
iajs-89	72	5	damage	damage	NOUN
iajs-89	72	6	happens	happen	VERB
iajs-89	72	7	in	in	ADP
iajs-89	72	8	the	the	DET
iajs-89	72	9	insulators	insulator	NOUN
iajs-89	72	10	whereas	whereas	SCONJ
iajs-89	72	11	the	the	DET
iajs-89	72	12	change	change	NOUN
iajs-89	72	13	is	be	AUX
iajs-89	72	14	building	build	VERB
iajs-89	72	15	and	and	CCONJ
iajs-89	72	16	then	then	ADV
iajs-89	72	17	the	the	DET
iajs-89	72	18	cracking	cracking	NOUN
iajs-89	72	19	takes	take	VERB
iajs-89	72	20	place	place	NOUN
iajs-89	72	21	.	.	PUNCT
iajs-89	73	1	figure	figure	NOUN
iajs-89	73	2	(	(	PUNCT
iajs-89	73	3	2c	2c	NUM
iajs-89	73	4	)	)	PUNCT
iajs-89	73	5	shows	show	VERB
iajs-89	73	6	the	the	DET
iajs-89	73	7	correspondent	correspondent	NOUN
iajs-89	73	8	energy	energy	NOUN
iajs-89	73	9	loss	loss	NOUN
iajs-89	73	10	due	due	ADP
iajs-89	73	11	to	to	ADP
iajs-89	73	12	vacancies	vacancy	NOUN
iajs-89	73	13	that	that	PRON
iajs-89	73	14	is	be	AUX
iajs-89	73	15	the	the	DET
iajs-89	73	16	energy	energy	NOUN
iajs-89	73	17	loss	loss	NOUN
iajs-89	73	18	to	to	ADP
iajs-89	73	19	the	the	DET
iajs-89	73	20	target	target	NOUN
iajs-89	73	21	producing	produce	VERB
iajs-89	73	22	vacancies	vacancy	NOUN
iajs-89	73	23	.	.	PUNCT
iajs-89	74	1	the	the	DET
iajs-89	74	2	vacancy	vacancy	NOUN
iajs-89	74	3	losses	loss	NOUN
iajs-89	74	4	due	due	ADJ
iajs-89	74	5	to	to	ADP
iajs-89	74	6	ions	ion	NOUN
iajs-89	74	7	behave	behave	VERB
iajs-89	74	8	similarly	similarly	ADV
iajs-89	74	9	as	as	ADP
iajs-89	74	10	in	in	ADP
iajs-89	74	11	the	the	DET
iajs-89	74	12	ionization	ionization	NOUN
iajs-89	74	13	,	,	PUNCT
iajs-89	74	14	however	however	ADV
iajs-89	74	15	,	,	PUNCT
iajs-89	74	16	the	the	DET
iajs-89	74	17	recoils	recoil	NOUN
iajs-89	74	18	increase	increase	VERB
iajs-89	74	19	to	to	ADP
iajs-89	74	20	a	a	DET
iajs-89	74	21	peak	peak	NOUN
iajs-89	74	22	at	at	ADP
iajs-89	74	23	a	a	DET
iajs-89	74	24	certain	certain	ADJ
iajs-89	74	25	width	width	NOUN
iajs-89	74	26	,	,	PUNCT
iajs-89	74	27	physics	physics	NOUN
iajs-89	74	28	|	|	ADV
iajs-89	74	29	107	107	NUM
iajs-89	74	30	2016	2016	NUM
iajs-89	74	31	)	)	PUNCT
iajs-89	74	32	عام	عام	ADP
iajs-89	74	33	2(العدد	2(العدد	NUM
iajs-89	74	34	29المجلد	29المجلد	NUM
iajs-89	74	35	مجلة	مجلة	PROPN
iajs-89	74	36	إبن	إبن	NOUN
iajs-89	74	37	الهيثم	الهيثم	ADJ
iajs-89	74	38	للعلوم	للعلوم	NOUN
iajs-89	74	39	الصرفة	الصرفة	NOUN
iajs-89	75	1	و	و	PRON
iajs-89	75	2	التطبيقية	التطبيقية	ADJ
iajs-89	75	3	ibn	ibn	PROPN
iajs-89	75	4	al	al	PROPN
iajs-89	75	5	-	-	PUNCT
iajs-89	75	6	haitham	haitham	PROPN
iajs-89	75	7	j.	j.	PROPN
iajs-89	75	8	for	for	ADP
iajs-89	75	9	pure	pure	PROPN
iajs-89	75	10	&	&	CCONJ
iajs-89	75	11	appl	appl	PROPN
iajs-89	75	12	.	.	PUNCT
iajs-89	76	1	sci	sci	PROPN
iajs-89	76	2	.	.	PUNCT
iajs-89	77	1	vol.29	vol.29	PROPN
iajs-89	77	2	(	(	PUNCT
iajs-89	77	3	2	2	NUM
iajs-89	77	4	)	)	PUNCT
iajs-89	77	5	2016	2016	NUM
iajs-89	77	6	decrease	decrease	NOUN
iajs-89	77	7	and	and	CCONJ
iajs-89	77	8	then	then	ADV
iajs-89	77	9	remain	remain	VERB
iajs-89	77	10	constant	constant	ADJ
iajs-89	77	11	as	as	ADP
iajs-89	77	12	the	the	DET
iajs-89	77	13	width	width	ADJ
iajs-89	77	14	increases	increase	NOUN
iajs-89	77	15	.	.	PUNCT
iajs-89	78	1	the	the	DET
iajs-89	78	2	number	number	NOUN
iajs-89	78	3	of	of	ADP
iajs-89	78	4	vacancies	vacancy	NOUN
iajs-89	78	5	depends	depend	VERB
iajs-89	78	6	on	on	ADP
iajs-89	78	7	the	the	DET
iajs-89	78	8	displacement	displacement	ADJ
iajs-89	78	9	energy	energy	NOUN
iajs-89	78	10	assigned	assign	VERB
iajs-89	78	11	to	to	ADP
iajs-89	78	12	each	each	DET
iajs-89	78	13	target	target	NOUN
iajs-89	78	14	atom	atom	NOUN
iajs-89	78	15	.	.	PUNCT
iajs-89	79	1	if	if	SCONJ
iajs-89	79	2	the	the	DET
iajs-89	79	3	displacement	displacement	ADJ
iajs-89	79	4	energy	energy	NOUN
iajs-89	79	5	is	be	AUX
iajs-89	79	6	larger	large	ADJ
iajs-89	79	7	than	than	ADP
iajs-89	79	8	the	the	DET
iajs-89	79	9	transferred	transfer	VERB
iajs-89	79	10	energy	energy	NOUN
iajs-89	79	11	,	,	PUNCT
iajs-89	79	12	the	the	DET
iajs-89	79	13	atom	atom	NOUN
iajs-89	79	14	stays	stay	VERB
iajs-89	79	15	in	in	ADP
iajs-89	79	16	its	its	PRON
iajs-89	79	17	lattice	lattice	NOUN
iajs-89	79	18	site	site	NOUN
iajs-89	79	19	.	.	PUNCT
iajs-89	80	1	thus	thus	ADV
iajs-89	80	2	the	the	DET
iajs-89	80	3	energy	energy	NOUN
iajs-89	80	4	is	be	AUX
iajs-89	80	5	moved	move	VERB
iajs-89	80	6	into	into	ADP
iajs-89	80	7	target	target	NOUN
iajs-89	80	8	phonons	phonon	NOUN
iajs-89	80	9	.	.	PUNCT
iajs-89	81	1	if	if	SCONJ
iajs-89	81	2	the	the	DET
iajs-89	81	3	displacement	displacement	ADJ
iajs-89	81	4	energy	energy	NOUN
iajs-89	81	5	is	be	AUX
iajs-89	81	6	lower	low	ADJ
iajs-89	81	7	than	than	ADP
iajs-89	81	8	the	the	DET
iajs-89	81	9	transferred	transfer	VERB
iajs-89	81	10	energy	energy	NOUN
iajs-89	81	11	,	,	PUNCT
iajs-89	81	12	the	the	DET
iajs-89	81	13	new	new	ADJ
iajs-89	81	14	recoil	recoil	NOUN
iajs-89	81	15	has	have	VERB
iajs-89	81	16	this	this	DET
iajs-89	81	17	movement	movement	NOUN
iajs-89	81	18	of	of	ADP
iajs-89	81	19	energy	energy	NOUN
iajs-89	81	20	subtracted	subtract	VERB
iajs-89	81	21	the	the	DET
iajs-89	81	22	binding	bind	VERB
iajs-89	81	23	energy	energy	NOUN
iajs-89	81	24	of	of	ADP
iajs-89	81	25	the	the	DET
iajs-89	81	26	atom	atom	NOUN
iajs-89	81	27	to	to	ADP
iajs-89	81	28	its	its	PRON
iajs-89	81	29	lattice	lattice	NOUN
iajs-89	81	30	position	position	NOUN
iajs-89	81	31	.	.	PUNCT
iajs-89	82	1	figure	figure	NOUN
iajs-89	82	2	(	(	PUNCT
iajs-89	82	3	2d	2d	NOUN
iajs-89	82	4	)	)	PUNCT
iajs-89	82	5	illustrates	illustrate	VERB
iajs-89	82	6	the	the	DET
iajs-89	82	7	correspondent	correspondent	NOUN
iajs-89	82	8	energy	energy	NOUN
iajs-89	82	9	loss	loss	NOUN
iajs-89	82	10	due	due	ADP
iajs-89	82	11	to	to	ADP
iajs-89	82	12	phonons	phonon	NOUN
iajs-89	82	13	.	.	PUNCT
iajs-89	83	1	although	although	SCONJ
iajs-89	83	2	,	,	PUNCT
iajs-89	83	3	the	the	DET
iajs-89	83	4	phonon	phonon	NOUN
iajs-89	83	5	losses	loss	NOUN
iajs-89	83	6	due	due	ADJ
iajs-89	83	7	to	to	ADP
iajs-89	83	8	ions	ion	NOUN
iajs-89	83	9	have	have	VERB
iajs-89	83	10	similar	similar	ADJ
iajs-89	83	11	behavior	behavior	NOUN
iajs-89	83	12	as	as	ADP
iajs-89	83	13	in	in	ADP
iajs-89	83	14	the	the	DET
iajs-89	83	15	ionization	ionization	NOUN
iajs-89	83	16	and	and	CCONJ
iajs-89	83	17	vacancies	vacancy	NOUN
iajs-89	83	18	,	,	PUNCT
iajs-89	83	19	the	the	DET
iajs-89	83	20	recoils	recoil	NOUN
iajs-89	83	21	are	be	AUX
iajs-89	83	22	higher	high	ADJ
iajs-89	83	23	than	than	ADP
iajs-89	83	24	the	the	DET
iajs-89	83	25	former	former	NOUN
iajs-89	83	26	.	.	PUNCT
iajs-89	84	1	the	the	DET
iajs-89	84	2	energy	energy	NOUN
iajs-89	84	3	loss	loss	NOUN
iajs-89	84	4	due	due	ADP
iajs-89	84	5	to	to	ADP
iajs-89	84	6	phonons	phonon	NOUN
iajs-89	84	7	by	by	ADP
iajs-89	84	8	recoils	recoil	NOUN
iajs-89	84	9	rises	rise	NOUN
iajs-89	84	10	as	as	ADP
iajs-89	84	11	the	the	DET
iajs-89	84	12	width	width	ADJ
iajs-89	84	13	increases	increase	NOUN
iajs-89	84	14	until	until	SCONJ
iajs-89	84	15	it	it	PRON
iajs-89	84	16	stays	stay	VERB
iajs-89	84	17	at	at	ADP
iajs-89	84	18	the	the	DET
iajs-89	84	19	same	same	ADJ
iajs-89	84	20	level	level	NOUN
iajs-89	84	21	whatever	whatever	PRON
iajs-89	84	22	the	the	DET
iajs-89	84	23	value	value	NOUN
iajs-89	84	24	of	of	ADP
iajs-89	84	25	width	width	NOUN
iajs-89	84	26	would	would	AUX
iajs-89	84	27	be	be	AUX
iajs-89	84	28	.	.	PUNCT
iajs-89	85	1	the	the	DET
iajs-89	85	2	ion	ion	NOUN
iajs-89	85	3	’s	’s	PART
iajs-89	85	4	energy	energy	NOUN
iajs-89	85	5	loss	loss	NOUN
iajs-89	85	6	to	to	ADP
iajs-89	85	7	the	the	DET
iajs-89	85	8	target	target	NOUN
iajs-89	85	9	phonon	phonon	NOUN
iajs-89	85	10	can	can	AUX
iajs-89	85	11	be	be	AUX
iajs-89	85	12	understood	understand	VERB
iajs-89	85	13	from	from	ADP
iajs-89	85	14	the	the	DET
iajs-89	85	15	following	following	ADJ
iajs-89	85	16	physical	physical	ADJ
iajs-89	85	17	picture	picture	NOUN
iajs-89	85	18	;	;	PUNCT
iajs-89	85	19	whenever	whenever	SCONJ
iajs-89	85	20	,	,	PUNCT
iajs-89	85	21	the	the	DET
iajs-89	85	22	colliding	colliding	NOUN
iajs-89	85	23	takes	take	VERB
iajs-89	85	24	place	place	NOUN
iajs-89	85	25	between	between	ADP
iajs-89	85	26	ion	ion	NOUN
iajs-89	85	27	and	and	CCONJ
iajs-89	85	28	target	target	NOUN
iajs-89	85	29	nucleus	nucleus	NOUN
iajs-89	85	30	,	,	PUNCT
iajs-89	85	31	it	it	PRON
iajs-89	85	32	imparts	impart	VERB
iajs-89	85	33	some	some	DET
iajs-89	85	34	recoil	recoil	NOUN
iajs-89	85	35	energy	energy	NOUN
iajs-89	85	36	to	to	ADP
iajs-89	85	37	this	this	DET
iajs-89	85	38	atom	atom	NOUN
iajs-89	85	39	.	.	PUNCT
iajs-89	86	1	when	when	SCONJ
iajs-89	86	2	the	the	DET
iajs-89	86	3	transferred	transfer	VERB
iajs-89	86	4	energy	energy	NOUN
iajs-89	86	5	is	be	AUX
iajs-89	86	6	less	less	ADJ
iajs-89	86	7	than	than	ADP
iajs-89	86	8	the	the	DET
iajs-89	86	9	displacement	displacement	ADJ
iajs-89	86	10	energy	energy	NOUN
iajs-89	86	11	then	then	ADV
iajs-89	86	12	it	it	PRON
iajs-89	86	13	is	be	AUX
iajs-89	86	14	assumed	assume	VERB
iajs-89	86	15	that	that	SCONJ
iajs-89	86	16	the	the	DET
iajs-89	86	17	atom	atom	NOUN
iajs-89	86	18	returns	return	NOUN
iajs-89	86	19	to	to	ADP
iajs-89	86	20	its	its	PRON
iajs-89	86	21	lattice	lattice	NOUN
iajs-89	86	22	site	site	NOUN
iajs-89	86	23	and	and	CCONJ
iajs-89	86	24	its	its	PRON
iajs-89	86	25	recoil	recoil	NOUN
iajs-89	86	26	energy	energy	NOUN
iajs-89	86	27	is	be	AUX
iajs-89	86	28	transferred	transfer	VERB
iajs-89	86	29	into	into	ADP
iajs-89	86	30	target	target	NOUN
iajs-89	86	31	phonons	phonon	NOUN
iajs-89	86	32	.	.	PUNCT
iajs-89	87	1	to	to	PART
iajs-89	87	2	understand	understand	VERB
iajs-89	87	3	the	the	DET
iajs-89	87	4	vacancy	vacancy	NOUN
iajs-89	87	5	occurrence	occurrence	NOUN
iajs-89	87	6	,	,	PUNCT
iajs-89	87	7	let	let	VERB
iajs-89	87	8	the	the	DET
iajs-89	87	9	incident	incident	NOUN
iajs-89	87	10	ion	ion	NOUN
iajs-89	87	11	energy	energy	NOUN
iajs-89	87	12	is	be	AUX
iajs-89	87	13	and	and	CCONJ
iajs-89	87	14	that	that	PRON
iajs-89	87	15	for	for	ADP
iajs-89	87	16	struck	strike	VERB
iajs-89	87	17	atom	atom	NOUN
iajs-89	87	18	is	be	AUX
iajs-89	87	19	and	and	CCONJ
iajs-89	87	20	the	the	DET
iajs-89	87	21	target	target	NOUN
iajs-89	87	22	has	have	VERB
iajs-89	87	23	energy	energy	NOUN
iajs-89	87	24	.	.	PUNCT
iajs-89	88	1	the	the	DET
iajs-89	88	2	vacancy	vacancy	NOUN
iajs-89	88	3	occurs	occur	VERB
iajs-89	88	4	when	when	SCONJ
iajs-89	88	5	both	both	PRON
iajs-89	88	6	,	,	PUNCT
iajs-89	88	7	the	the	DET
iajs-89	88	8	incident	incident	NOUN
iajs-89	88	9	ion	ion	NOUN
iajs-89	88	10	and	and	CCONJ
iajs-89	88	11	the	the	DET
iajs-89	88	12	struck	strike	VERB
iajs-89	88	13	atom	atom	NOUN
iajs-89	88	14	have	have	VERB
iajs-89	88	15	enough	enough	ADJ
iajs-89	88	16	energy	energy	NOUN
iajs-89	88	17	to	to	PART
iajs-89	88	18	leave	leave	VERB
iajs-89	88	19	the	the	DET
iajs-89	88	20	site	site	NOUN
iajs-89	88	21	,	,	PUNCT
iajs-89	88	22	i.e.	i.e.	X
iajs-89	88	23	and	and	CCONJ
iajs-89	88	24	,	,	PUNCT
iajs-89	88	25	then	then	ADV
iajs-89	88	26	both	both	PRON
iajs-89	88	27	of	of	ADP
iajs-89	88	28	them	they	PRON
iajs-89	88	29	become	become	AUX
iajs-89	88	30	moving	move	VERB
iajs-89	88	31	atoms	atom	NOUN
iajs-89	88	32	of	of	ADP
iajs-89	88	33	the	the	DET
iajs-89	88	34	cascade	cascade	NOUN
iajs-89	88	35	.	.	PUNCT
iajs-89	89	1	the	the	DET
iajs-89	89	2	energy	energy	NOUN
iajs-89	89	3	of	of	ADP
iajs-89	89	4	struck	strike	VERB
iajs-89	89	5	atom	atom	NOUN
iajs-89	89	6	is	be	AUX
iajs-89	89	7	reduced	reduce	VERB
iajs-89	89	8	the	the	DET
iajs-89	89	9	displacement	displacement	ADJ
iajs-89	89	10	energy	energy	NOUN
iajs-89	89	11	before	before	SCONJ
iajs-89	89	12	it	it	PRON
iajs-89	89	13	has	have	VERB
iajs-89	89	14	next	next	ADJ
iajs-89	89	15	collision	collision	NOUN
iajs-89	89	16	.	.	PUNCT
iajs-89	90	1	now	now	ADV
iajs-89	90	2	releasing	release	VERB
iajs-89	90	3	a	a	DET
iajs-89	90	4	phonon	phonon	NOUN
iajs-89	90	5	takes	take	VERB
iajs-89	90	6	place	place	NOUN
iajs-89	90	7	if	if	SCONJ
iajs-89	90	8	since	since	SCONJ
iajs-89	90	9	the	the	DET
iajs-89	90	10	struck	strike	VERB
iajs-89	90	11	atom	atom	NOUN
iajs-89	90	12	does	do	AUX
iajs-89	90	13	not	not	PART
iajs-89	90	14	have	have	VERB
iajs-89	90	15	enough	enough	ADJ
iajs-89	90	16	energy	energy	NOUN
iajs-89	90	17	yielding	yield	VERB
iajs-89	90	18	it	it	PRON
iajs-89	90	19	to	to	PART
iajs-89	90	20	vibrate	vibrate	VERB
iajs-89	90	21	towards	towards	ADP
iajs-89	90	22	back	back	ADJ
iajs-89	90	23	direction	direction	NOUN
iajs-89	90	24	to	to	ADP
iajs-89	90	25	its	its	PRON
iajs-89	90	26	original	original	ADJ
iajs-89	90	27	position	position	NOUN
iajs-89	90	28	releasing	release	VERB
iajs-89	90	29	energy	energy	NOUN
iajs-89	90	30	a	a	DET
iajs-89	90	31	phonon	phonon	NOUN
iajs-89	90	32	as	as	ADP
iajs-89	90	33	.	.	PUNCT
iajs-89	91	1	figure	figure	NOUN
iajs-89	91	2	(	(	PUNCT
iajs-89	91	3	3	3	X
iajs-89	91	4	)	)	PUNCT
iajs-89	91	5	shows	show	VERB
iajs-89	91	6	that	that	SCONJ
iajs-89	91	7	there	there	PRON
iajs-89	91	8	is	be	VERB
iajs-89	91	9	a	a	DET
iajs-89	91	10	bit	bit	NOUN
iajs-89	91	11	slightly	slightly	ADJ
iajs-89	91	12	changes	change	NOUN
iajs-89	91	13	at	at	ADP
iajs-89	91	14	lower	low	ADJ
iajs-89	91	15	ion	ion	NOUN
iajs-89	91	16	energy	energy	NOUN
iajs-89	91	17	in	in	ADP
iajs-89	91	18	the	the	DET
iajs-89	91	19	sputtering	sputtering	ADJ
iajs-89	91	20	yield	yield	NOUN
iajs-89	91	21	values	value	NOUN
iajs-89	91	22	of	of	ADP
iajs-89	91	23	zn	zn	PROPN
iajs-89	91	24	as	as	SCONJ
iajs-89	91	25	the	the	DET
iajs-89	91	26	number	number	NOUN
iajs-89	91	27	of	of	ADP
iajs-89	91	28	incident	incident	NOUN
iajs-89	91	29	xenon	xenon	NOUN
iajs-89	91	30	ions	ion	NOUN
iajs-89	91	31	increased	increase	VERB
iajs-89	91	32	for	for	ADP
iajs-89	91	33	direct	direct	ADJ
iajs-89	91	34	bombardment	bombardment	NOUN
iajs-89	91	35	and	and	CCONJ
iajs-89	91	36	constant	constant	ADJ
iajs-89	91	37	layer	layer	NOUN
iajs-89	91	38	of	of	ADP
iajs-89	91	39	zn	zn	PROPN
iajs-89	91	40	.	.	PUNCT
iajs-89	92	1	however	however	ADV
iajs-89	92	2	,	,	PUNCT
iajs-89	92	3	at	at	ADP
iajs-89	92	4	higher	high	ADJ
iajs-89	92	5	ion	ion	NOUN
iajs-89	92	6	energy	energy	NOUN
iajs-89	92	7	35	35	NUM
iajs-89	92	8	kev	kev	VERB
iajs-89	92	9	the	the	DET
iajs-89	92	10	fitted	fit	VERB
iajs-89	92	11	curves	curve	NOUN
iajs-89	92	12	split	split	VERB
iajs-89	92	13	up	up	ADP
iajs-89	92	14	.	.	PUNCT
iajs-89	93	1	the	the	DET
iajs-89	93	2	whole	whole	ADJ
iajs-89	93	3	curves	curve	NOUN
iajs-89	93	4	of	of	ADP
iajs-89	93	5	sputtering	sputter	VERB
iajs-89	93	6	yield	yield	NOUN
iajs-89	93	7	increase	increase	NOUN
iajs-89	93	8	monotonically	monotonically	ADV
iajs-89	93	9	with	with	ADP
iajs-89	93	10	increased	increase	VERB
iajs-89	93	11	ion	ion	NOUN
iajs-89	93	12	energy	energy	NOUN
iajs-89	93	13	.	.	PUNCT
iajs-89	94	1	the	the	DET
iajs-89	94	2	fitted	fit	VERB
iajs-89	94	3	curves	curve	NOUN
iajs-89	94	4	are	be	AUX
iajs-89	94	5	made	make	VERB
iajs-89	94	6	in	in	ADP
iajs-89	94	7	igor	igor	ADJ
iajs-89	94	8	pro	pro	ADJ
iajs-89	94	9	software	software	NOUN
iajs-89	94	10	and	and	CCONJ
iajs-89	94	11	the	the	DET
iajs-89	94	12	profile	profile	NOUN
iajs-89	94	13	of	of	ADP
iajs-89	94	14	them	they	PRON
iajs-89	94	15	obeys	obey	VERB
iajs-89	94	16	to	to	ADP
iajs-89	94	17	lognormal	lognormal	ADJ
iajs-89	94	18	equation	equation	NOUN
iajs-89	94	19	given	give	VERB
iajs-89	94	20	by	by	ADP
iajs-89	94	21	exp	exp	NOUN
iajs-89	94	22	(	(	PUNCT
iajs-89	94	23	6	6	NUM
iajs-89	94	24	)	)	PUNCT
iajs-89	94	25	where	where	SCONJ
iajs-89	94	26	the	the	DET
iajs-89	94	27	coefficients	coefficient	NOUN
iajs-89	94	28	of	of	ADP
iajs-89	94	29	each	each	DET
iajs-89	94	30	curve	curve	NOUN
iajs-89	94	31	are	be	AUX
iajs-89	94	32	tableted	tablete	VERB
iajs-89	94	33	in	in	ADP
iajs-89	94	34	table	table	NOUN
iajs-89	94	35	1	1	NUM
iajs-89	94	36	.	.	PUNCT
iajs-89	95	1	in	in	ADP
iajs-89	95	2	spite	spite	NOUN
iajs-89	95	3	of	of	ADP
iajs-89	95	4	difference	difference	NOUN
iajs-89	95	5	of	of	ADP
iajs-89	95	6	sputtering	sputtering	ADJ
iajs-89	95	7	yield	yield	NOUN
iajs-89	95	8	with	with	ADP
iajs-89	95	9	ion	ion	NOUN
iajs-89	95	10	number	number	NOUN
iajs-89	95	11	at	at	ADP
iajs-89	95	12	higher	high	ADJ
iajs-89	95	13	ion	ion	NOUN
iajs-89	95	14	energies	energy	NOUN
iajs-89	95	15	,	,	PUNCT
iajs-89	95	16	we	we	PRON
iajs-89	95	17	prefer	prefer	VERB
iajs-89	95	18	to	to	PART
iajs-89	95	19	use	use	VERB
iajs-89	95	20	5000	5000	NUM
iajs-89	95	21	ion	ion	NOUN
iajs-89	95	22	number	number	NOUN
iajs-89	95	23	in	in	ADP
iajs-89	95	24	this	this	DET
iajs-89	95	25	work	work	NOUN
iajs-89	95	26	to	to	PART
iajs-89	95	27	study	study	VERB
iajs-89	95	28	other	other	ADJ
iajs-89	95	29	parameters	parameter	NOUN
iajs-89	95	30	that	that	PRON
iajs-89	95	31	affect	affect	VERB
iajs-89	95	32	the	the	DET
iajs-89	95	33	sputtering	sputter	VERB
iajs-89	95	34	yield	yield	NOUN
iajs-89	95	35	to	to	PART
iajs-89	95	36	save	save	VERB
iajs-89	95	37	the	the	DET
iajs-89	95	38	time	time	NOUN
iajs-89	95	39	of	of	ADP
iajs-89	95	40	calculations	calculation	NOUN
iajs-89	95	41	and	and	CCONJ
iajs-89	95	42	that	that	SCONJ
iajs-89	95	43	the	the	DET
iajs-89	95	44	sputtering	sputter	VERB
iajs-89	95	45	yield	yield	NOUN
iajs-89	95	46	is	be	AUX
iajs-89	95	47	considerably	considerably	ADV
iajs-89	95	48	not	not	PART
iajs-89	95	49	changed	change	VERB
iajs-89	95	50	in	in	ADP
iajs-89	95	51	great	great	ADJ
iajs-89	95	52	manner	manner	NOUN
iajs-89	95	53	.	.	PUNCT
iajs-89	96	1	figure	figure	NOUN
iajs-89	96	2	(	(	PUNCT
iajs-89	96	3	4	4	NUM
iajs-89	96	4	)	)	PUNCT
iajs-89	96	5	shows	show	VERB
iajs-89	96	6	the	the	DET
iajs-89	96	7	effect	effect	NOUN
iajs-89	96	8	of	of	ADP
iajs-89	96	9	increasing	increase	VERB
iajs-89	96	10	the	the	DET
iajs-89	96	11	ion	ion	NOUN
iajs-89	96	12	number	number	NOUN
iajs-89	96	13	on	on	ADP
iajs-89	96	14	the	the	DET
iajs-89	96	15	sputtering	sputtering	ADJ
iajs-89	96	16	yield	yield	NOUN
iajs-89	96	17	at	at	ADP
iajs-89	96	18	fixed	fix	VERB
iajs-89	96	19	width	width	NOUN
iajs-89	96	20	of	of	ADP
iajs-89	96	21	zn	zn	PROPN
iajs-89	96	22	target	target	PROPN
iajs-89	96	23	,	,	PUNCT
iajs-89	96	24	normal	normal	ADJ
iajs-89	96	25	bombardment	bombardment	NOUN
iajs-89	96	26	,	,	PUNCT
iajs-89	96	27	and	and	CCONJ
iajs-89	96	28	constant	constant	ADJ
iajs-89	96	29	xenon	xenon	NOUN
iajs-89	96	30	ion	ion	NOUN
iajs-89	96	31	energy	energy	NOUN
iajs-89	96	32	.	.	PUNCT
iajs-89	97	1	it	it	PRON
iajs-89	97	2	is	be	AUX
iajs-89	97	3	clear	clear	ADJ
iajs-89	97	4	that	that	SCONJ
iajs-89	97	5	there	there	PRON
iajs-89	97	6	is	be	VERB
iajs-89	97	7	a	a	DET
iajs-89	97	8	frequent	frequent	ADJ
iajs-89	97	9	change	change	NOUN
iajs-89	97	10	between	between	ADP
iajs-89	97	11	in	in	ADP
iajs-89	97	12	this	this	DET
iajs-89	97	13	graph	graph	NOUN
iajs-89	97	14	.	.	PUNCT
iajs-89	98	1	for	for	ADP
iajs-89	98	2	lower	low	ADJ
iajs-89	98	3	value	value	NOUN
iajs-89	98	4	of	of	ADP
iajs-89	98	5	ion	ion	NOUN
iajs-89	98	6	number	number	NOUN
iajs-89	98	7	the	the	DET
iajs-89	98	8	sputtering	sputtering	ADJ
iajs-89	98	9	yield	yield	NOUN
iajs-89	98	10	exhibits	exhibit	VERB
iajs-89	98	11	higher	high	ADJ
iajs-89	98	12	fluctuations	fluctuation	NOUN
iajs-89	98	13	than	than	ADP
iajs-89	98	14	that	that	PRON
iajs-89	98	15	for	for	ADP
iajs-89	98	16	higher	high	ADJ
iajs-89	98	17	ion	ion	NOUN
iajs-89	98	18	number	number	NOUN
iajs-89	98	19	.	.	PUNCT
iajs-89	99	1	as	as	SCONJ
iajs-89	99	2	mentioned	mention	VERB
iajs-89	99	3	before	before	ADV
iajs-89	99	4	to	to	PART
iajs-89	99	5	avoid	avoid	VERB
iajs-89	99	6	higher	high	ADJ
iajs-89	99	7	fluctuations	fluctuation	NOUN
iajs-89	99	8	in	in	ADP
iajs-89	99	9	sputtering	sputtering	ADJ
iajs-89	99	10	yield	yield	NOUN
iajs-89	99	11	at	at	ADP
iajs-89	99	12	low	low	ADJ
iajs-89	99	13	ion	ion	NOUN
iajs-89	99	14	number	number	NOUN
iajs-89	99	15	we	we	PRON
iajs-89	99	16	prefer	prefer	VERB
iajs-89	99	17	to	to	PART
iajs-89	99	18	work	work	VERB
iajs-89	99	19	with	with	ADP
iajs-89	99	20	5000	5000	NUM
iajs-89	99	21	ion	ion	NOUN
iajs-89	99	22	number	number	NOUN
iajs-89	99	23	to	to	PART
iajs-89	99	24	study	study	VERB
iajs-89	99	25	other	other	ADJ
iajs-89	99	26	parameters	parameter	NOUN
iajs-89	99	27	due	due	ADJ
iajs-89	99	28	to	to	ADP
iajs-89	99	29	very	very	ADV
iajs-89	99	30	less	less	ADJ
iajs-89	99	31	change	change	NOUN
iajs-89	99	32	in	in	ADP
iajs-89	99	33	the	the	DET
iajs-89	99	34	values	value	NOUN
iajs-89	99	35	sputtering	sputter	VERB
iajs-89	99	36	yield	yield	NOUN
iajs-89	99	37	compared	compare	VERB
iajs-89	99	38	to	to	ADP
iajs-89	99	39	the	the	DET
iajs-89	99	40	higher	high	ADJ
iajs-89	99	41	ion	ion	NOUN
iajs-89	99	42	number	number	NOUN
iajs-89	99	43	.	.	PUNCT
iajs-89	100	1	it	it	PRON
iajs-89	100	2	is	be	AUX
iajs-89	100	3	often	often	ADV
iajs-89	100	4	usually	usually	ADV
iajs-89	100	5	for	for	ADP
iajs-89	100	6	the	the	DET
iajs-89	100	7	researchers	researcher	NOUN
iajs-89	100	8	in	in	ADP
iajs-89	100	9	topic	topic	NOUN
iajs-89	100	10	of	of	ADP
iajs-89	100	11	sputtering	sputter	VERB
iajs-89	100	12	to	to	PART
iajs-89	100	13	use	use	NOUN
iajs-89	100	14	normalized	normalize	VERB
iajs-89	100	15	sputter	sputter	NOUN
iajs-89	100	16	yield	yield	NOUN
iajs-89	100	17	rather	rather	ADV
iajs-89	100	18	than	than	ADP
iajs-89	100	19	direct	direct	ADJ
iajs-89	100	20	sputter	sputter	NOUN
iajs-89	100	21	yield	yield	NOUN
iajs-89	100	22	as	as	ADV
iajs-89	100	23	soon	soon	ADV
iajs-89	100	24	as	as	SCONJ
iajs-89	100	25	they	they	PRON
iajs-89	100	26	treat	treat	VERB
iajs-89	100	27	with	with	ADP
iajs-89	100	28	ion	ion	NOUN
iajs-89	100	29	angle	angle	NOUN
iajs-89	100	30	of	of	ADP
iajs-89	100	31	incidence	incidence	ADJ
iajs-89	100	32	dependence	dependence	NOUN
iajs-89	100	33	.	.	PUNCT
iajs-89	101	1	for	for	ADP
iajs-89	101	2	different	different	ADJ
iajs-89	101	3	values	value	NOUN
iajs-89	101	4	of	of	ADP
iajs-89	101	5	incident	incident	NOUN
iajs-89	101	6	ions	ion	NOUN
iajs-89	101	7	energy	energy	NOUN
iajs-89	101	8	,	,	PUNCT
iajs-89	101	9	figure	figure	NOUN
iajs-89	101	10	(	(	PUNCT
iajs-89	101	11	5	5	NUM
iajs-89	101	12	)	)	PUNCT
iajs-89	101	13	illustrates	illustrate	VERB
iajs-89	101	14	the	the	DET
iajs-89	101	15	normalized	normalize	VERB
iajs-89	101	16	sputtering	sputtering	ADJ
iajs-89	101	17	yield	yield	NOUN
iajs-89	101	18	as	as	ADP
iajs-89	101	19	a	a	DET
iajs-89	101	20	function	function	NOUN
iajs-89	101	21	of	of	ADP
iajs-89	101	22	ion	ion	NOUN
iajs-89	101	23	incident	incident	NOUN
iajs-89	101	24	angle	angle	NOUN
iajs-89	101	25	.	.	PUNCT
iajs-89	102	1	the	the	DET
iajs-89	102	2	data	datum	NOUN
iajs-89	102	3	are	be	AUX
iajs-89	102	4	fitted	fit	VERB
iajs-89	102	5	using	use	VERB
iajs-89	102	6	matlab	matlab	PROPN
iajs-89	102	7	software	software	NOUN
iajs-89	102	8	by	by	ADP
iajs-89	102	9	6th	6th	ADJ
iajs-89	102	10	degree	degree	NOUN
iajs-89	102	11	polynomials	polynomial	NOUN
iajs-89	102	12	for	for	ADP
iajs-89	102	13	four	four	NUM
iajs-89	102	14	curves	curve	NOUN
iajs-89	102	15	.	.	PUNCT
iajs-89	103	1	it	it	PRON
iajs-89	103	2	is	be	AUX
iajs-89	103	3	noted	note	VERB
iajs-89	103	4	that	that	SCONJ
iajs-89	103	5	,	,	PUNCT
iajs-89	103	6	a	a	DET
iajs-89	103	7	slightly	slightly	ADJ
iajs-89	103	8	increase	increase	NOUN
iajs-89	103	9	of	of	ADP
iajs-89	103	10	the	the	DET
iajs-89	103	11	angle	angle	NOUN
iajs-89	103	12	of	of	ADP
iajs-89	103	13	incidence	incidence	NOUN
iajs-89	103	14	yields	yield	NOUN
iajs-89	103	15	to	to	ADP
iajs-89	103	16	a	a	DET
iajs-89	103	17	gradual	gradual	ADJ
iajs-89	103	18	increases	increase	NOUN
iajs-89	103	19	in	in	ADP
iajs-89	103	20	the	the	DET
iajs-89	103	21	normalized	normalize	VERB
iajs-89	103	22	sputter	sputter	NOUN
iajs-89	103	23	yield	yield	NOUN
iajs-89	103	24	reaching	reach	VERB
iajs-89	103	25	to	to	ADP
iajs-89	103	26	a	a	DET
iajs-89	103	27	highest	high	ADJ
iajs-89	103	28	point	point	NOUN
iajs-89	103	29	and	and	CCONJ
iajs-89	103	30	then	then	ADV
iajs-89	103	31	it	it	PRON
iajs-89	103	32	drops	drop	VERB
iajs-89	103	33	rapidly	rapidly	ADV
iajs-89	103	34	towards	towards	ADP
iajs-89	103	35	low	low	ADJ
iajs-89	103	36	values	value	NOUN
iajs-89	103	37	as	as	SCONJ
iajs-89	103	38	it	it	PRON
iajs-89	103	39	approaches	approach	VERB
iajs-89	103	40	89	89	NUM
iajs-89	103	41	.	.	PUNCT
iajs-89	104	1	obviously	obviously	ADV
iajs-89	104	2	,	,	PUNCT
iajs-89	104	3	the	the	DET
iajs-89	104	4	normalized	normalize	VERB
iajs-89	104	5	sputtering	sputtering	ADJ
iajs-89	104	6	yield	yield	NOUN
iajs-89	104	7	considerably	considerably	ADV
iajs-89	104	8	increases	increase	NOUN
iajs-89	104	9	as	as	ADP
iajs-89	104	10	the	the	DET
iajs-89	104	11	xenon	xenon	NOUN
iajs-89	104	12	ion	ion	NOUN
iajs-89	104	13	energy	energy	NOUN
iajs-89	104	14	increases	increase	NOUN
iajs-89	104	15	.	.	PUNCT
iajs-89	105	1	from	from	ADP
iajs-89	105	2	the	the	DET
iajs-89	105	3	extended	extended	ADJ
iajs-89	105	4	calculations	calculation	NOUN
iajs-89	105	5	and	and	CCONJ
iajs-89	105	6	also	also	ADV
iajs-89	105	7	the	the	DET
iajs-89	105	8	graph	graph	NOUN
iajs-89	105	9	,	,	PUNCT
iajs-89	105	10	it	it	PRON
iajs-89	105	11	appears	appear	VERB
iajs-89	105	12	that	that	SCONJ
iajs-89	105	13	that	that	DET
iajs-89	105	14	peak	peak	NOUN
iajs-89	105	15	of	of	ADP
iajs-89	105	16	sputtering	sputtering	ADJ
iajs-89	105	17	yield	yield	NOUN
iajs-89	105	18	physics	physics	NOUN
iajs-89	105	19	|	|	ADV
iajs-89	105	20	108	108	NUM
iajs-89	105	21	2016	2016	NUM
iajs-89	105	22	)	)	PUNCT
iajs-89	105	23	عام	عام	ADP
iajs-89	105	24	2(العدد	2(العدد	NUM
iajs-89	105	25	29المجلد	29المجلد	NUM
iajs-89	105	26	مجلة	مجلة	PROPN
iajs-89	105	27	إبن	إبن	NOUN
iajs-89	105	28	الهيثم	الهيثم	ADJ
iajs-89	105	29	للعلوم	للعلوم	NOUN
iajs-89	105	30	الصرفة	الصرفة	NOUN
iajs-89	106	1	و	و	PRON
iajs-89	106	2	التطبيقية	التطبيقية	ADJ
iajs-89	106	3	ibn	ibn	PROPN
iajs-89	106	4	al	al	PROPN
iajs-89	106	5	-	-	PUNCT
iajs-89	106	6	haitham	haitham	PROPN
iajs-89	106	7	j.	j.	PROPN
iajs-89	106	8	for	for	ADP
iajs-89	106	9	pure	pure	PROPN
iajs-89	106	10	&	&	CCONJ
iajs-89	106	11	appl	appl	PROPN
iajs-89	106	12	.	.	PUNCT
iajs-89	107	1	sci	sci	PROPN
iajs-89	107	2	.	.	PUNCT
iajs-89	108	1	vol.29	vol.29	PROPN
iajs-89	108	2	(	(	PUNCT
iajs-89	108	3	2	2	NUM
iajs-89	108	4	)	)	PUNCT
iajs-89	108	5	2016	2016	NUM
iajs-89	108	6	shifted	shift	VERB
iajs-89	108	7	towards	towards	ADP
iajs-89	108	8	higher	high	ADJ
iajs-89	108	9	angle	angle	NOUN
iajs-89	108	10	as	as	SCONJ
iajs-89	108	11	the	the	DET
iajs-89	108	12	energy	energy	NOUN
iajs-89	108	13	of	of	ADP
iajs-89	108	14	incident	incident	NOUN
iajs-89	108	15	ions	ion	NOUN
iajs-89	108	16	increased	increase	VERB
iajs-89	108	17	even	even	ADV
iajs-89	108	18	if	if	SCONJ
iajs-89	108	19	the	the	DET
iajs-89	108	20	profiles	profile	NOUN
iajs-89	108	21	are	be	AUX
iajs-89	108	22	similar	similar	ADJ
iajs-89	108	23	but	but	CCONJ
iajs-89	108	24	the	the	DET
iajs-89	108	25	magnitude	magnitude	NOUN
iajs-89	108	26	of	of	ADP
iajs-89	108	27	the	the	DET
iajs-89	108	28	slope	slope	NOUN
iajs-89	108	29	decreases	decrease	VERB
iajs-89	108	30	as	as	SCONJ
iajs-89	108	31	the	the	DET
iajs-89	108	32	ion	ion	NOUN
iajs-89	108	33	energy	energy	NOUN
iajs-89	108	34	decreases	decrease	VERB
iajs-89	108	35	.	.	PUNCT
iajs-89	109	1	we	we	PRON
iajs-89	109	2	refer	refer	VERB
iajs-89	109	3	to	to	ADP
iajs-89	109	4	one	one	NUM
iajs-89	109	5	of	of	ADP
iajs-89	109	6	interest	interest	NOUN
iajs-89	109	7	in	in	ADP
iajs-89	109	8	the	the	DET
iajs-89	109	9	calculations	calculation	NOUN
iajs-89	109	10	using	use	VERB
iajs-89	109	11	trim	trim	NOUN
iajs-89	109	12	that	that	SCONJ
iajs-89	109	13	the	the	DET
iajs-89	109	14	sputtering	sputter	VERB
iajs-89	109	15	yield	yield	NOUN
iajs-89	109	16	in	in	ADP
iajs-89	109	17	nearby	nearby	ADJ
iajs-89	109	18	angle	angle	NOUN
iajs-89	109	19	to	to	ADP
iajs-89	109	20	0	0	NUM
iajs-89	109	21	gives	give	VERB
iajs-89	109	22	lower	low	ADJ
iajs-89	109	23	value	value	NOUN
iajs-89	109	24	than	than	ADP
iajs-89	109	25	that	that	PRON
iajs-89	109	26	of	of	ADP
iajs-89	109	27	the	the	DET
iajs-89	109	28	normal	normal	ADJ
iajs-89	109	29	incidence	incidence	NOUN
iajs-89	109	30	whatever	whatever	PRON
iajs-89	109	31	the	the	DET
iajs-89	109	32	ion	ion	NOUN
iajs-89	109	33	energy	energy	NOUN
iajs-89	109	34	used	use	VERB
iajs-89	109	35	.	.	PUNCT
iajs-89	110	1	in	in	ADP
iajs-89	110	2	the	the	DET
iajs-89	110	3	calculation	calculation	NOUN
iajs-89	110	4	we	we	PRON
iajs-89	110	5	use	use	VERB
iajs-89	110	6	a	a	DET
iajs-89	110	7	zn	zn	NOUN
iajs-89	110	8	layer	layer	NOUN
iajs-89	110	9	with	with	ADP
iajs-89	110	10	500	500	NUM
iajs-89	110	11	a	a	DET
iajs-89	110	12	and	and	CCONJ
iajs-89	110	13	5000	5000	NUM
iajs-89	110	14	ion	ion	NOUN
iajs-89	110	15	number	number	NOUN
iajs-89	110	16	.	.	PUNCT
iajs-89	111	1	for	for	ADP
iajs-89	111	2	fixed	fix	VERB
iajs-89	111	3	xenon	xenon	PROPN
iajs-89	111	4	ion	ion	NOUN
iajs-89	111	5	incident	incident	NOUN
iajs-89	111	6	angle	angle	NOUN
iajs-89	111	7	,	,	PUNCT
iajs-89	111	8	width	width	NOUN
iajs-89	111	9	of	of	ADP
iajs-89	111	10	the	the	DET
iajs-89	111	11	zn	zn	PROPN
iajs-89	111	12	target	target	NOUN
iajs-89	111	13	,	,	PUNCT
iajs-89	111	14	and	and	CCONJ
iajs-89	111	15	ion	ion	NOUN
iajs-89	111	16	number	number	NOUN
iajs-89	111	17	mentioned	mention	VERB
iajs-89	111	18	the	the	DET
iajs-89	111	19	sputtering	sputtering	ADJ
iajs-89	111	20	yield	yield	NOUN
iajs-89	111	21	nonlinearly	nonlinearly	ADV
iajs-89	111	22	grows	grow	VERB
iajs-89	111	23	as	as	ADP
iajs-89	111	24	the	the	DET
iajs-89	111	25	ion	ion	NOUN
iajs-89	111	26	energy	energy	NOUN
iajs-89	111	27	increases	increase	NOUN
iajs-89	111	28	.	.	PUNCT
iajs-89	112	1	figure	figure	NOUN
iajs-89	112	2	(	(	PUNCT
iajs-89	112	3	6	6	NUM
iajs-89	112	4	)	)	PUNCT
iajs-89	112	5	shows	show	VERB
iajs-89	112	6	this	this	DET
iajs-89	112	7	dependence	dependence	NOUN
iajs-89	112	8	using	use	VERB
iajs-89	112	9	four	four	NUM
iajs-89	112	10	angles	angle	NOUN
iajs-89	112	11	of	of	ADP
iajs-89	112	12	incidence	incidence	NOUN
iajs-89	112	13	.	.	PUNCT
iajs-89	113	1	the	the	DET
iajs-89	113	2	curves	curve	NOUN
iajs-89	113	3	are	be	AUX
iajs-89	113	4	fitted	fit	VERB
iajs-89	113	5	using	use	VERB
iajs-89	113	6	igor	igor	ADJ
iajs-89	113	7	pro	pro	ADJ
iajs-89	113	8	software	software	NOUN
iajs-89	113	9	package	package	NOUN
iajs-89	113	10	by	by	ADP
iajs-89	113	11	hill	hill	NOUN
iajs-89	113	12	-	-	PUNCT
iajs-89	113	13	equation	equation	NOUN
iajs-89	113	14	which	which	PRON
iajs-89	113	15	is	be	AUX
iajs-89	113	16	given	give	VERB
iajs-89	113	17	by	by	ADP
iajs-89	113	18	y	y	PROPN
iajs-89	113	19	(	(	PUNCT
iajs-89	113	20	7	7	NUM
iajs-89	113	21	)	)	PUNCT
iajs-89	113	22	table	table	NOUN
iajs-89	113	23	(	(	PUNCT
iajs-89	113	24	2	2	X
iajs-89	113	25	)	)	PUNCT
iajs-89	113	26	gives	give	VERB
iajs-89	113	27	the	the	DET
iajs-89	113	28	coefficients	coefficient	NOUN
iajs-89	113	29	for	for	ADP
iajs-89	113	30	each	each	DET
iajs-89	113	31	fit	fit	NOUN
iajs-89	113	32	of	of	ADP
iajs-89	113	33	curves	curve	NOUN
iajs-89	113	34	.	.	PUNCT
iajs-89	114	1	one	one	NUM
iajs-89	114	2	notices	notice	NOUN
iajs-89	114	3	from	from	ADP
iajs-89	114	4	the	the	DET
iajs-89	114	5	graph	graph	NOUN
iajs-89	114	6	that	that	PRON
iajs-89	114	7	at	at	ADP
iajs-89	114	8	higher	high	ADJ
iajs-89	114	9	angle	angle	NOUN
iajs-89	114	10	,	,	PUNCT
iajs-89	114	11	the	the	DET
iajs-89	114	12	higher	high	ADJ
iajs-89	114	13	energies	energy	NOUN
iajs-89	114	14	result	result	VERB
iajs-89	114	15	in	in	ADP
iajs-89	114	16	the	the	DET
iajs-89	114	17	higher	high	ADJ
iajs-89	114	18	sputtering	sputtering	ADJ
iajs-89	114	19	yield	yield	NOUN
iajs-89	114	20	.	.	PUNCT
iajs-89	115	1	conclusion	conclusion	NOUN
iajs-89	115	2	using	use	VERB
iajs-89	115	3	trim	trim	NOUN
iajs-89	115	4	simulation	simulation	NOUN
iajs-89	115	5	program	program	NOUN
iajs-89	115	6	we	we	PRON
iajs-89	115	7	studied	study	VERB
iajs-89	115	8	some	some	PRON
iajs-89	115	9	of	of	ADP
iajs-89	115	10	the	the	DET
iajs-89	115	11	parameters	parameter	NOUN
iajs-89	115	12	that	that	PRON
iajs-89	115	13	affect	affect	VERB
iajs-89	115	14	the	the	DET
iajs-89	115	15	sputtering	sputtering	ADJ
iajs-89	115	16	yield	yield	NOUN
iajs-89	115	17	of	of	ADP
iajs-89	115	18	zinc	zinc	NOUN
iajs-89	115	19	bombarded	bombard	VERB
iajs-89	115	20	by	by	ADP
iajs-89	115	21	xenon	xenon	NOUN
iajs-89	115	22	ions	ion	NOUN
iajs-89	115	23	.	.	PUNCT
iajs-89	116	1	regard	regard	NOUN
iajs-89	116	2	to	to	ADP
iajs-89	116	3	the	the	DET
iajs-89	116	4	increasing	increase	VERB
iajs-89	116	5	the	the	DET
iajs-89	116	6	width	width	NOUN
iajs-89	116	7	of	of	ADP
iajs-89	116	8	zinc	zinc	NOUN
iajs-89	116	9	and	and	CCONJ
iajs-89	116	10	its	its	PRON
iajs-89	116	11	effect	effect	NOUN
iajs-89	116	12	on	on	ADP
iajs-89	116	13	the	the	DET
iajs-89	116	14	sputtering	sputtering	ADJ
iajs-89	116	15	yield	yield	NOUN
iajs-89	116	16	,	,	PUNCT
iajs-89	116	17	we	we	PRON
iajs-89	116	18	found	find	VERB
iajs-89	116	19	that	that	SCONJ
iajs-89	116	20	the	the	DET
iajs-89	116	21	sputtering	sputter	VERB
iajs-89	116	22	yield	yield	NOUN
iajs-89	116	23	profile	profile	NOUN
iajs-89	116	24	possesses	possess	VERB
iajs-89	116	25	fluctuations	fluctuation	NOUN
iajs-89	116	26	before	before	ADP
iajs-89	116	27	a	a	DET
iajs-89	116	28	critical	critical	ADJ
iajs-89	116	29	width	width	NOUN
iajs-89	116	30	400	400	NUM
iajs-89	116	31	a	a	PRON
iajs-89	116	32	whereas	whereas	SCONJ
iajs-89	116	33	any	any	DET
iajs-89	116	34	larger	large	ADJ
iajs-89	116	35	value	value	NOUN
iajs-89	116	36	of	of	ADP
iajs-89	116	37	width	width	NOUN
iajs-89	116	38	more	more	ADV
iajs-89	116	39	than	than	SCONJ
iajs-89	116	40	the	the	DET
iajs-89	116	41	mentioned	mention	VERB
iajs-89	116	42	the	the	DET
iajs-89	116	43	sputtering	sputtering	ADJ
iajs-89	116	44	yield	yield	NOUN
iajs-89	116	45	mostly	mostly	ADV
iajs-89	116	46	unaffected	unaffected	ADJ
iajs-89	116	47	and	and	CCONJ
iajs-89	116	48	stable	stable	ADJ
iajs-89	116	49	.	.	PUNCT
iajs-89	117	1	the	the	DET
iajs-89	117	2	energy	energy	NOUN
iajs-89	117	3	loss	loss	NOUN
iajs-89	117	4	due	due	ADP
iajs-89	117	5	to	to	ADP
iajs-89	117	6	ions	ion	NOUN
iajs-89	117	7	by	by	ADP
iajs-89	117	8	ionization	ionization	NOUN
iajs-89	117	9	,	,	PUNCT
iajs-89	117	10	vacancies	vacancy	NOUN
iajs-89	117	11	,	,	PUNCT
iajs-89	117	12	and	and	CCONJ
iajs-89	117	13	phonon	phonon	NOUN
iajs-89	117	14	has	have	VERB
iajs-89	117	15	commonly	commonly	ADV
iajs-89	117	16	the	the	DET
iajs-89	117	17	same	same	ADJ
iajs-89	117	18	behavior	behavior	NOUN
iajs-89	117	19	.	.	PUNCT
iajs-89	118	1	similarly	similarly	ADV
iajs-89	118	2	,	,	PUNCT
iajs-89	118	3	the	the	DET
iajs-89	118	4	energy	energy	NOUN
iajs-89	118	5	loss	loss	NOUN
iajs-89	118	6	due	due	ADP
iajs-89	118	7	to	to	ADP
iajs-89	118	8	the	the	DET
iajs-89	118	9	recoils	recoil	NOUN
iajs-89	118	10	has	have	AUX
iajs-89	118	11	the	the	DET
iajs-89	118	12	same	same	ADJ
iajs-89	118	13	profile	profile	NOUN
iajs-89	118	14	expect	expect	VERB
iajs-89	118	15	for	for	ADP
iajs-89	118	16	the	the	DET
iajs-89	118	17	phonons	phonon	NOUN
iajs-89	118	18	where	where	SCONJ
iajs-89	118	19	it	it	PRON
iajs-89	118	20	is	be	AUX
iajs-89	118	21	somehow	somehow	ADV
iajs-89	118	22	different	different	ADJ
iajs-89	118	23	.	.	PUNCT
iajs-89	119	1	for	for	ADP
iajs-89	119	2	different	different	ADJ
iajs-89	119	3	xenon	xenon	NOUN
iajs-89	119	4	ion	ion	NOUN
iajs-89	119	5	number	number	NOUN
iajs-89	119	6	,	,	PUNCT
iajs-89	119	7	the	the	DET
iajs-89	119	8	sputtering	sputter	VERB
iajs-89	119	9	yields	yield	NOUN
iajs-89	119	10	vs.	vs.	ADP
iajs-89	119	11	ions	ion	NOUN
iajs-89	119	12	energy	energy	NOUN
iajs-89	119	13	curves	curve	NOUN
iajs-89	119	14	have	have	VERB
iajs-89	119	15	only	only	ADJ
iajs-89	119	16	separation	separation	NOUN
iajs-89	119	17	at	at	ADP
iajs-89	119	18	higher	high	ADJ
iajs-89	119	19	energy	energy	NOUN
iajs-89	119	20	.	.	PUNCT
iajs-89	120	1	for	for	ADP
iajs-89	120	2	constant	constant	ADJ
iajs-89	120	3	ions	ion	NOUN
iajs-89	120	4	energy	energy	NOUN
iajs-89	120	5	the	the	DET
iajs-89	120	6	sputtering	sputter	VERB
iajs-89	120	7	yields	yield	NOUN
iajs-89	120	8	as	as	ADP
iajs-89	120	9	a	a	DET
iajs-89	120	10	function	function	NOUN
iajs-89	120	11	of	of	ADP
iajs-89	120	12	ion	ion	NOUN
iajs-89	120	13	numbers	number	NOUN
iajs-89	120	14	have	have	VERB
iajs-89	120	15	larger	large	ADJ
iajs-89	120	16	fluctuations	fluctuation	NOUN
iajs-89	120	17	at	at	ADP
iajs-89	120	18	lower	low	ADJ
iajs-89	120	19	number	number	NOUN
iajs-89	120	20	of	of	ADP
iajs-89	120	21	ions	ion	NOUN
iajs-89	120	22	.	.	PUNCT
iajs-89	121	1	the	the	DET
iajs-89	121	2	normalized	normalize	VERB
iajs-89	121	3	sputter	sputter	NOUN
iajs-89	121	4	yield	yield	NOUN
iajs-89	121	5	increased	increase	VERB
iajs-89	121	6	as	as	ADP
iajs-89	121	7	the	the	DET
iajs-89	121	8	angle	angle	NOUN
iajs-89	121	9	of	of	ADP
iajs-89	121	10	incident	incident	NOUN
iajs-89	121	11	ion	ion	NOUN
iajs-89	121	12	increases	increase	NOUN
iajs-89	121	13	leading	lead	VERB
iajs-89	121	14	to	to	ADP
iajs-89	121	15	a	a	DET
iajs-89	121	16	maximum	maximum	ADJ
iajs-89	121	17	peak	peak	NOUN
iajs-89	121	18	and	and	CCONJ
iajs-89	121	19	then	then	ADV
iajs-89	121	20	to	to	ADP
iajs-89	121	21	a	a	DET
iajs-89	121	22	quickly	quickly	ADV
iajs-89	121	23	drops	drop	VERB
iajs-89	121	24	towards	towards	ADP
iajs-89	121	25	lowest	low	ADJ
iajs-89	121	26	values	value	NOUN
iajs-89	121	27	as	as	SCONJ
iajs-89	121	28	it	it	PRON
iajs-89	121	29	approaches	approach	VERB
iajs-89	121	30	89	89	NUM
iajs-89	121	31	.	.	PUNCT
iajs-89	122	1	the	the	DET
iajs-89	122	2	normalized	normalize	VERB
iajs-89	122	3	sputtering	sputtering	ADJ
iajs-89	122	4	yield	yield	NOUN
iajs-89	122	5	increases	increase	NOUN
iajs-89	122	6	as	as	ADP
iajs-89	122	7	the	the	DET
iajs-89	122	8	xenon	xenon	NOUN
iajs-89	122	9	ion	ion	NOUN
iajs-89	122	10	energy	energy	NOUN
iajs-89	122	11	increases	increase	NOUN
iajs-89	122	12	and	and	CCONJ
iajs-89	122	13	it	it	PRON
iajs-89	122	14	appears	appear	VERB
iajs-89	122	15	that	that	SCONJ
iajs-89	122	16	that	that	DET
iajs-89	122	17	peak	peak	NOUN
iajs-89	122	18	of	of	ADP
iajs-89	122	19	sputtering	sputtering	ADJ
iajs-89	122	20	yield	yield	NOUN
iajs-89	122	21	shifted	shift	VERB
iajs-89	122	22	towards	towards	ADP
iajs-89	122	23	higher	high	ADJ
iajs-89	122	24	angle	angle	NOUN
iajs-89	122	25	as	as	SCONJ
iajs-89	122	26	the	the	DET
iajs-89	122	27	energy	energy	NOUN
iajs-89	122	28	of	of	ADP
iajs-89	122	29	incident	incident	NOUN
iajs-89	122	30	ions	ion	NOUN
iajs-89	122	31	increased	increase	VERB
iajs-89	122	32	.	.	PUNCT
iajs-89	123	1	for	for	ADP
iajs-89	123	2	different	different	ADJ
iajs-89	123	3	angle	angle	NOUN
iajs-89	123	4	rather	rather	ADV
iajs-89	123	5	than	than	ADP
iajs-89	123	6	the	the	DET
iajs-89	123	7	normal	normal	ADJ
iajs-89	123	8	incidence	incidence	NOUN
iajs-89	123	9	,	,	PUNCT
iajs-89	123	10	the	the	DET
iajs-89	123	11	sputtering	sputtering	ADJ
iajs-89	123	12	yield	yield	NOUN
iajs-89	123	13	as	as	ADP
iajs-89	123	14	a	a	DET
iajs-89	123	15	function	function	NOUN
iajs-89	123	16	of	of	ADP
iajs-89	123	17	ion	ion	NOUN
iajs-89	123	18	energy	energy	NOUN
iajs-89	123	19	grows	grow	VERB
iajs-89	123	20	in	in	ADP
iajs-89	123	21	nonlinearly	nonlinearly	ADV
iajs-89	123	22	manner	manner	NOUN
iajs-89	123	23	.	.	PUNCT
iajs-89	124	1	finally	finally	ADV
iajs-89	124	2	,	,	PUNCT
iajs-89	124	3	we	we	PRON
iajs-89	124	4	carried	carry	VERB
iajs-89	124	5	out	out	ADP
iajs-89	124	6	new	new	ADJ
iajs-89	124	7	fitting	fitting	NOUN
iajs-89	124	8	for	for	ADP
iajs-89	124	9	some	some	DET
iajs-89	124	10	calculations	calculation	NOUN
iajs-89	124	11	.	.	PUNCT
iajs-89	125	1	physics	physics	NOUN
iajs-89	125	2	|	|	ADV
iajs-89	125	3	109	109	NUM
iajs-89	125	4	2016	2016	NUM
iajs-89	125	5	)	)	PUNCT
iajs-89	125	6	عام	عام	ADP
iajs-89	125	7	2(العدد	2(العدد	NUM
iajs-89	125	8	29المجلد	29المجلد	NUM
iajs-89	125	9	مجلة	مجلة	PROPN
iajs-89	125	10	إبن	إبن	NOUN
iajs-89	125	11	الهيثم	الهيثم	ADJ
iajs-89	125	12	للعلوم	للعلوم	NOUN
iajs-89	125	13	الصرفة	الصرفة	NOUN
iajs-89	126	1	و	و	PRON
iajs-89	126	2	التطبيقية	التطبيقية	ADJ
iajs-89	126	3	ibn	ibn	PROPN
iajs-89	126	4	al	al	PROPN
iajs-89	126	5	-	-	PUNCT
iajs-89	126	6	haitham	haitham	PROPN
iajs-89	126	7	j.	j.	PROPN
iajs-89	126	8	for	for	ADP
iajs-89	126	9	pure	pure	PROPN
iajs-89	126	10	&	&	CCONJ
iajs-89	126	11	appl	appl	PROPN
iajs-89	126	12	.	.	PUNCT
iajs-89	127	1	sci	sci	PROPN
iajs-89	127	2	.	.	PUNCT
iajs-89	128	1	vol.29	vol.29	PROPN
iajs-89	128	2	(	(	PUNCT
iajs-89	128	3	2	2	NUM
iajs-89	128	4	)	)	SYM
iajs-89	128	5	2016	2016	NUM
iajs-89	128	6	references	reference	NOUN
iajs-89	128	7	1	1	NUM
iajs-89	128	8	.	.	PUNCT
iajs-89	129	1	wasa	wasa	PROPN
iajs-89	129	2	,	,	PUNCT
iajs-89	129	3	k.	k.	PROPN
iajs-89	129	4	;	;	PUNCT
iajs-89	129	5	kitabatake	kitabatake	NOUN
iajs-89	129	6	,	,	PUNCT
iajs-89	129	7	m.	m.	NOUN
iajs-89	129	8	and	and	CCONJ
iajs-89	129	9	adachi	adachi	PROPN
iajs-89	129	10	,	,	PUNCT
iajs-89	129	11	h.	h.	PROPN
iajs-89	129	12	,	,	PUNCT
iajs-89	129	13	(	(	PUNCT
iajs-89	129	14	2004	2004	NUM
iajs-89	129	15	)	)	PUNCT
iajs-89	129	16	,	,	PUNCT
iajs-89	129	17	“	"	PUNCT
iajs-89	129	18	thin	thin	ADJ
iajs-89	129	19	film	film	NOUN
iajs-89	129	20	materials	material	NOUN
iajs-89	129	21	technology	technology	NOUN
iajs-89	129	22	sputtering	sputtering	NOUN
iajs-89	129	23	of	of	ADP
iajs-89	129	24	compound	compound	NOUN
iajs-89	129	25	materials	material	NOUN
iajs-89	129	26	”	"	PUNCT
iajs-89	129	27	,	,	PUNCT
iajs-89	129	28	william	william	PROPN
iajs-89	129	29	andrew	andrew	PROPN
iajs-89	129	30	publishing	publishing	PROPN
iajs-89	129	31	/	/	SYM
iajs-89	129	32	noyes	noyes	PROPN
iajs-89	129	33	.	.	PUNCT
iajs-89	130	1	2	2	X
iajs-89	130	2	.	.	X
iajs-89	130	3	behrisch	behrisch	PROPN
iajs-89	130	4	,	,	PUNCT
iajs-89	130	5	r.	r.	PROPN
iajs-89	130	6	and	and	CCONJ
iajs-89	130	7	eckstein	eckstein	PROPN
iajs-89	130	8	,	,	PUNCT
iajs-89	130	9	w.	w.	PROPN
iajs-89	130	10	,	,	PUNCT
iajs-89	130	11	(	(	PUNCT
iajs-89	130	12	2007	2007	NUM
iajs-89	130	13	)	)	PUNCT
iajs-89	130	14	,	,	PUNCT
iajs-89	130	15	“	"	PUNCT
iajs-89	130	16	sputtering	sputter	VERB
iajs-89	130	17	by	by	ADP
iajs-89	130	18	particle	particle	NOUN
iajs-89	130	19	bombardment	bombardment	NOUN
iajs-89	130	20	:	:	PUNCT
iajs-89	130	21	experiments	experiment	NOUN
iajs-89	130	22	and	and	CCONJ
iajs-89	130	23	computer	computer	NOUN
iajs-89	130	24	calculations	calculation	NOUN
iajs-89	130	25	from	from	ADP
iajs-89	130	26	threshold	threshold	NOUN
iajs-89	130	27	to	to	ADP
iajs-89	130	28	mev	mev	PROPN
iajs-89	130	29	energies	energy	NOUN
iajs-89	130	30	”	"	PUNCT
iajs-89	130	31	,	,	PUNCT
iajs-89	130	32	springer	springer	NOUN
iajs-89	130	33	,	,	PUNCT
iajs-89	130	34	berlin	berlin	PROPN
iajs-89	130	35	(	(	PUNCT
iajs-89	130	36	eds	ed	NOUN
iajs-89	130	37	.	.	PUNCT
iajs-89	130	38	)	)	PUNCT
iajs-89	130	39	.	.	PUNCT
iajs-89	131	1	3	3	X
iajs-89	131	2	.	.	X
iajs-89	131	3	abdelrahman	abdelrahman	NOUN
iajs-89	131	4	,	,	PUNCT
iajs-89	131	5	m.	m.	NOUN
iajs-89	131	6	m.	m.	NOUN
iajs-89	131	7	,	,	PUNCT
iajs-89	131	8	(	(	PUNCT
iajs-89	131	9	2010	2010	NUM
iajs-89	131	10	)	)	PUNCT
iajs-89	131	11	,	,	PUNCT
iajs-89	131	12	“	"	PUNCT
iajs-89	131	13	study	study	NOUN
iajs-89	131	14	of	of	ADP
iajs-89	131	15	ion	ion	NOUN
iajs-89	131	16	beam	beam	NOUN
iajs-89	131	17	sputtering	sputtering	NOUN
iajs-89	131	18	using	use	VERB
iajs-89	131	19	a	a	DET
iajs-89	131	20	glow	glow	NOUN
iajs-89	131	21	discharge	discharge	NOUN
iajs-89	131	22	ion	ion	NOUN
iajs-89	131	23	source	source	NOUN
iajs-89	131	24	”	"	PUNCT
iajs-89	131	25	,	,	PUNCT
iajs-89	131	26	brazilian	brazilian	ADJ
iajs-89	131	27	journal	journal	NOUN
iajs-89	131	28	of	of	ADP
iajs-89	131	29	physics	physics	PROPN
iajs-89	131	30	,	,	PUNCT
iajs-89	131	31	(	(	PUNCT
iajs-89	131	32	40	40	NUM
iajs-89	131	33	)	)	PUNCT
iajs-89	131	34	,	,	PUNCT
iajs-89	131	35	(	(	PUNCT
iajs-89	131	36	1	1	NUM
iajs-89	131	37	)	)	PUNCT
iajs-89	131	38	,	,	PUNCT
iajs-89	131	39	(	(	PUNCT
iajs-89	131	40	26	26	NUM
iajs-89	131	41	–	–	SYM
iajs-89	131	42	29	29	NUM
iajs-89	131	43	)	)	PUNCT
iajs-89	131	44	.	.	PUNCT
iajs-89	132	1	4	4	X
iajs-89	132	2	.	.	X
iajs-89	132	3	wang	wang	PROPN
iajs-89	132	4	,	,	PUNCT
iajs-89	132	5	y.	y.	PROPN
iajs-89	132	6	;	;	PUNCT
iajs-89	132	7	yoon	yoon	PROPN
iajs-89	132	8	,	,	PUNCT
iajs-89	132	9	s.	s.	PROPN
iajs-89	132	10	f.	f.	PROPN
iajs-89	132	11	;	;	PUNCT
iajs-89	132	12	ngo	ngo	PROPN
iajs-89	132	13	,	,	PUNCT
iajs-89	132	14	c.	c.	PROPN
iajs-89	132	15	y.and	y.and	PROPN
iajs-89	132	16	ahn	ahn	PROPN
iajs-89	132	17	,	,	PUNCT
iajs-89	132	18	j.	j.	PROPN
iajs-89	132	19	,	,	PUNCT
iajs-89	132	20	(	(	PUNCT
iajs-89	132	21	2007	2007	NUM
iajs-89	132	22	)	)	PUNCT
iajs-89	132	23	,	,	PUNCT
iajs-89	132	24	“	"	PUNCT
iajs-89	132	25	surface	surface	NOUN
iajs-89	132	26	morphology	morphology	NOUN
iajs-89	132	27	evolution	evolution	NOUN
iajs-89	132	28	of	of	ADP
iajs-89	132	29	gaas	gaas	PROPN
iajs-89	132	30	by	by	ADP
iajs-89	132	31	low	low	ADJ
iajs-89	132	32	energy	energy	NOUN
iajs-89	132	33	ion	ion	NOUN
iajs-89	132	34	sputtering	sputtering	NOUN
iajs-89	132	35	”	"	PUNCT
iajs-89	132	36	,	,	PUNCT
iajs-89	132	37	nanoscale	nanoscale	NOUN
iajs-89	132	38	res	re	NOUN
iajs-89	132	39	lett	lett	PROPN
iajs-89	132	40	,	,	PUNCT
iajs-89	132	41	(	(	PUNCT
iajs-89	132	42	2).504–508	2).504–508	NUM
iajs-89	132	43	.	.	PUNCT
iajs-89	133	1	5	5	NUM
iajs-89	133	2	.	.	NUM
iajs-89	133	3	was	be	AUX
iajs-89	133	4	,	,	PUNCT
iajs-89	133	5	g.	g.	PROPN
iajs-89	133	6	s.	s.	PROPN
iajs-89	133	7	,	,	PUNCT
iajs-89	133	8	(	(	PUNCT
iajs-89	133	9	2012	2012	NUM
iajs-89	133	10	)	)	PUNCT
iajs-89	133	11	,	,	PUNCT
iajs-89	133	12	“	"	PUNCT
iajs-89	133	13	fundamentals	fundamental	NOUN
iajs-89	133	14	of	of	ADP
iajs-89	133	15	radiation	radiation	NOUN
iajs-89	133	16	materials	material	NOUN
iajs-89	133	17	science	science	NOUN
iajs-89	133	18	”	"	PUNCT
iajs-89	133	19	,	,	PUNCT
iajs-89	133	20	springer	springer	NOUN
iajs-89	133	21	.	.	PUNCT
iajs-89	134	1	6	6	NUM
iajs-89	134	2	.	.	X
iajs-89	134	3	stoller	stoller	PROPN
iajs-89	134	4	,	,	PUNCT
iajs-89	134	5	r.	r.	PROPN
iajs-89	134	6	e.	e.	PROPN
iajs-89	134	7	;	;	PUNCT
iajs-89	134	8	toloczko	toloczko	PROPN
iajs-89	134	9	,	,	PUNCT
iajs-89	134	10	m.	m.	PROPN
iajs-89	134	11	b.	b.	PROPN
iajs-89	134	12	;	;	PUNCT
iajs-89	134	13	was	be	AUX
iajs-89	134	14	,	,	PUNCT
iajs-89	134	15	g.	g.	PROPN
iajs-89	134	16	s.;certain	s.;certain	PROPN
iajs-89	134	17	,	,	PUNCT
iajs-89	134	18	a.	a.	NOUN
iajs-89	134	19	g.	g.	PROPN
iajs-89	134	20	;	;	PUNCT
iajs-89	134	21	dwaraknath	dwaraknath	NOUN
iajs-89	134	22	,	,	PUNCT
iajs-89	134	23	s.and	s.and	PROPN
iajs-89	134	24	garner	garner	NOUN
iajs-89	134	25	,	,	PUNCT
iajs-89	134	26	f.	f.	PROPN
iajs-89	134	27	a.	a.	PROPN
iajs-89	134	28	,	,	PUNCT
iajs-89	134	29	(	(	PUNCT
iajs-89	134	30	2013	2013	NUM
iajs-89	134	31	)	)	PUNCT
iajs-89	134	32	,	,	PUNCT
iajs-89	134	33	“	"	PUNCT
iajs-89	134	34	on	on	ADP
iajs-89	134	35	the	the	DET
iajs-89	134	36	use	use	NOUN
iajs-89	134	37	of	of	ADP
iajs-89	134	38	srim	srim	NOUN
iajs-89	134	39	for	for	ADP
iajs-89	134	40	computing	compute	VERB
iajs-89	134	41	radiation	radiation	NOUN
iajs-89	134	42	damage	damage	NOUN
iajs-89	134	43	exposure	exposure	NOUN
iajs-89	134	44	”	"	PUNCT
iajs-89	134	45	,	,	PUNCT
iajs-89	134	46	physics	physics	NOUN
iajs-89	134	47	research	research	NOUN
iajs-89	134	48	section	section	PROPN
iajs-89	134	49	b	b	NOUN
iajs-89	134	50	:	:	PUNCT
iajs-89	134	51	beam	beam	NOUN
iajs-89	134	52	interactions	interaction	NOUN
iajs-89	134	53	with	with	ADP
iajs-89	134	54	materials	material	NOUN
iajs-89	134	55	and	and	CCONJ
iajs-89	134	56	atoms	atom	NOUN
iajs-89	134	57	,	,	PUNCT
iajs-89	134	58	(	(	PUNCT
iajs-89	134	59	310	310	NUM
iajs-89	134	60	)	)	PUNCT
iajs-89	134	61	,	,	PUNCT
iajs-89	134	62	(	(	PUNCT
iajs-89	134	63	75	75	NUM
iajs-89	134	64	–	–	SYM
iajs-89	134	65	80	80	NUM
iajs-89	134	66	)	)	PUNCT
iajs-89	134	67	.	.	PUNCT
iajs-89	135	1	7	7	X
iajs-89	135	2	.	.	X
iajs-89	135	3	michael	michael	PROPN
iajs-89	135	4	,	,	PUNCT
iajs-89	135	5	r.	r.	PROPN
iajs-89	135	6	nakles	nakles	PROPN
iajs-89	135	7	,	,	PUNCT
iajs-89	135	8	(	(	PUNCT
iajs-89	135	9	2004	2004	NUM
iajs-89	135	10	)	)	PUNCT
iajs-89	135	11	,	,	PUNCT
iajs-89	135	12	“	"	PUNCT
iajs-89	135	13	experimental	experimental	ADJ
iajs-89	135	14	and	and	CCONJ
iajs-89	135	15	modeling	model	VERB
iajs-89	135	16	studies	study	NOUN
iajs-89	135	17	of	of	ADP
iajs-89	135	18	low	low	ADJ
iajs-89	135	19	-	-	PUNCT
iajs-89	135	20	energy	energy	NOUN
iajs-89	135	21	ion	ion	NOUN
iajs-89	135	22	sputtering	sputtering	NOUN
iajs-89	135	23	for	for	ADP
iajs-89	135	24	ion	ion	NOUN
iajs-89	135	25	thrusters	thruster	NOUN
iajs-89	135	26	”	"	PUNCT
iajs-89	135	27	,	,	PUNCT
iajs-89	135	28	msc	msc	PROPN
iajs-89	135	29	thesis	thesis	PROPN
iajs-89	135	30	,	,	PUNCT
iajs-89	135	31	virginia	virginia	PROPN
iajs-89	135	32	polytechnic	polytechnic	PROPN
iajs-89	135	33	institute	institute	PROPN
iajs-89	135	34	and	and	CCONJ
iajs-89	135	35	state	state	PROPN
iajs-89	135	36	university	university	PROPN
iajs-89	135	37	,	,	PUNCT
iajs-89	135	38	usa	usa	PROPN
iajs-89	135	39	.	.	PROPN
iajs-89	135	40	8	8	NUM
iajs-89	135	41	.	.	X
iajs-89	135	42	sigmund	sigmund	NOUN
iajs-89	135	43	,	,	PUNCT
iajs-89	135	44	p.	p.	PROPN
iajs-89	135	45	,	,	PUNCT
iajs-89	135	46	(	(	PUNCT
iajs-89	135	47	1969	1969	NUM
iajs-89	135	48	)	)	PUNCT
iajs-89	135	49	,	,	PUNCT
iajs-89	135	50	“	"	PUNCT
iajs-89	135	51	theory	theory	NOUN
iajs-89	135	52	of	of	ADP
iajs-89	135	53	sputtering	sputtering	NOUN
iajs-89	135	54	.	.	PUNCT
iajs-89	136	1	1	1	X
iajs-89	136	2	.	.	X
iajs-89	136	3	sputtering	sputtering	ADJ
iajs-89	136	4	yield	yield	NOUN
iajs-89	136	5	of	of	ADP
iajs-89	136	6	amorphous	amorphous	ADJ
iajs-89	136	7	and	and	CCONJ
iajs-89	136	8	polycrystalline	polycrystalline	ADJ
iajs-89	136	9	targets	target	NOUN
iajs-89	136	10	”	"	PUNCT
iajs-89	136	11	physical	physical	ADJ
iajs-89	136	12	review	review	NOUN
iajs-89	136	13	,	,	PUNCT
iajs-89	136	14	(	(	PUNCT
iajs-89	136	15	184	184	NUM
iajs-89	136	16	)	)	PUNCT
iajs-89	136	17	,	,	PUNCT
iajs-89	136	18	(	(	PUNCT
iajs-89	136	19	2	2	NUM
iajs-89	136	20	)	)	PUNCT
iajs-89	136	21	,	,	PUNCT
iajs-89	136	22	(	(	PUNCT
iajs-89	136	23	383	383	NUM
iajs-89	136	24	–	–	SYM
iajs-89	136	25	416	416	NUM
iajs-89	136	26	)	)	PUNCT
iajs-89	136	27	.	.	PUNCT
iajs-89	137	1	9	9	X
iajs-89	137	2	.	.	X
iajs-89	137	3	yamamura	yamamura	NOUN
iajs-89	137	4	,	,	PUNCT
iajs-89	137	5	y.	y.	PROPN
iajs-89	137	6	,	,	PUNCT
iajs-89	137	7	(	(	PUNCT
iajs-89	137	8	1981	1981	NUM
iajs-89	137	9	)	)	PUNCT
iajs-89	137	10	,	,	PUNCT
iajs-89	137	11	“	"	PUNCT
iajs-89	137	12	contribution	contribution	NOUN
iajs-89	137	13	of	of	ADP
iajs-89	137	14	anisotropic	anisotropic	NOUN
iajs-89	137	15	velocity	velocity	NOUN
iajs-89	137	16	distribution	distribution	NOUN
iajs-89	137	17	of	of	ADP
iajs-89	137	18	recoil	recoil	NOUN
iajs-89	137	19	to	to	ADP
iajs-89	137	20	sputtering	sputter	VERB
iajs-89	137	21	yields	yield	NOUN
iajs-89	137	22	and	and	CCONJ
iajs-89	137	23	angular	angular	ADJ
iajs-89	137	24	distribution	distribution	NOUN
iajs-89	137	25	of	of	ADP
iajs-89	137	26	sputtered	sputtered	ADJ
iajs-89	137	27	atoms	atom	NOUN
iajs-89	137	28	”	"	PUNCT
iajs-89	137	29	radiation	radiation	NOUN
iajs-89	137	30	effects	effect	NOUN
iajs-89	137	31	and	and	CCONJ
iajs-89	137	32	defects	defect	NOUN
iajs-89	137	33	in	in	ADP
iajs-89	137	34	solids	solid	NOUN
iajs-89	137	35	,	,	PUNCT
iajs-89	137	36	(	(	PUNCT
iajs-89	137	37	55	55	NUM
iajs-89	137	38	)	)	PUNCT
iajs-89	137	39	,	,	PUNCT
iajs-89	137	40	(	(	PUNCT
iajs-89	137	41	1	1	NUM
iajs-89	137	42	-	-	SYM
iajs-89	137	43	2	2	NUM
iajs-89	137	44	)	)	PUNCT
iajs-89	137	45	,	,	PUNCT
iajs-89	137	46	(	(	PUNCT
iajs-89	137	47	49–55	49–55	NUM
iajs-89	137	48	)	)	PUNCT
iajs-89	137	49	.	.	PUNCT
iajs-89	138	1	10	10	NUM
iajs-89	138	2	.	.	X
iajs-89	138	3	takeuchi	takeuchi	PROPN
iajs-89	138	4	,	,	PUNCT
iajs-89	138	5	w.	w.	PROPN
iajs-89	138	6	and	and	CCONJ
iajs-89	138	7	yamamura	yamamura	PROPN
iajs-89	138	8	,	,	PUNCT
iajs-89	138	9	y.	y.	PROPN
iajs-89	138	10	,	,	PUNCT
iajs-89	138	11	(	(	PUNCT
iajs-89	138	12	1983	1983	NUM
iajs-89	138	13	)	)	PUNCT
iajs-89	138	14	,	,	PUNCT
iajs-89	138	15	“	"	PUNCT
iajs-89	138	16	computer	computer	NOUN
iajs-89	138	17	studies	study	NOUN
iajs-89	138	18	of	of	ADP
iajs-89	138	19	the	the	DET
iajs-89	138	20	energy	energy	NOUN
iajs-89	138	21	spectra	spectra	NOUN
iajs-89	138	22	and	and	CCONJ
iajs-89	138	23	reflection	reflection	NOUN
iajs-89	138	24	coefficients	coefficient	NOUN
iajs-89	138	25	of	of	ADP
iajs-89	138	26	light	light	ADJ
iajs-89	138	27	ions	ion	NOUN
iajs-89	138	28	”	"	PUNCT
iajs-89	138	29	,	,	PUNCT
iajs-89	138	30	radiation	radiation	NOUN
iajs-89	138	31	effects	effect	NOUN
iajs-89	138	32	and	and	CCONJ
iajs-89	138	33	defects	defect	NOUN
iajs-89	138	34	in	in	ADP
iajs-89	138	35	solids	solid	NOUN
iajs-89	138	36	,	,	PUNCT
iajs-89	138	37	(	(	PUNCT
iajs-89	138	38	71	71	NUM
iajs-89	138	39	)	)	PUNCT
iajs-89	138	40	,	,	PUNCT
iajs-89	138	41	(	(	PUNCT
iajs-89	138	42	1	1	NUM
iajs-89	138	43	-	-	SYM
iajs-89	138	44	2	2	NUM
iajs-89	138	45	)	)	PUNCT
iajs-89	138	46	,	,	PUNCT
iajs-89	138	47	(	(	PUNCT
iajs-89	138	48	53–64	53–64	NUM
iajs-89	138	49	)	)	PUNCT
iajs-89	138	50	.	.	PUNCT
iajs-89	139	1	11	11	NUM
iajs-89	139	2	.	.	X
iajs-89	140	1	yamamura	yamamura	NOUN
iajs-89	140	2	,	,	PUNCT
iajs-89	140	3	y.	y.	PROPN
iajs-89	140	4	and	and	CCONJ
iajs-89	140	5	tawara	tawara	PROPN
iajs-89	140	6	,	,	PUNCT
iajs-89	140	7	h.	h.	PROPN
iajs-89	140	8	,	,	PUNCT
iajs-89	140	9	(	(	PUNCT
iajs-89	140	10	1996	1996	NUM
iajs-89	140	11	)	)	PUNCT
iajs-89	140	12	,	,	PUNCT
iajs-89	140	13	“	"	PUNCT
iajs-89	140	14	erratum	erratum	PROPN
iajs-89	140	15	,	,	PUNCT
iajs-89	140	16	62	62	NUM
iajs-89	140	17	,	,	PUNCT
iajs-89	140	18	2	2	NUM
iajs-89	140	19	(	(	PUNCT
iajs-89	140	20	1995	1995	NUM
iajs-89	140	21	)	)	PUNCT
iajs-89	140	22	energy	energy	NOUN
iajs-89	140	23	dependence	dependence	NOUN
iajs-89	140	24	of	of	ADP
iajs-89	140	25	ion	ion	NOUN
iajs-89	140	26	–	–	PUNCT
iajs-89	140	27	induce	induce	VERB
iajs-89	140	28	sputtering	sputtering	ADJ
iajs-89	140	29	yield	yield	NOUN
iajs-89	140	30	from	from	ADP
iajs-89	140	31	monatomic	monatomic	ADJ
iajs-89	140	32	solids	solid	NOUN
iajs-89	140	33	at	at	ADP
iajs-89	140	34	normal	normal	ADJ
iajs-89	140	35	incidence	incidence	NOUN
iajs-89	140	36	”	"	PUNCT
iajs-89	140	37	,	,	PUNCT
iajs-89	140	38	atomic	atomic	ADJ
iajs-89	140	39	data	datum	NOUN
iajs-89	140	40	and	and	CCONJ
iajs-89	140	41	nuclear	nuclear	ADJ
iajs-89	140	42	data	datum	NOUN
iajs-89	140	43	tables	table	NOUN
iajs-89	140	44	,	,	PUNCT
iajs-89	140	45	(	(	PUNCT
iajs-89	140	46	63	63	NUM
iajs-89	140	47	)	)	PUNCT
iajs-89	140	48	,	,	PUNCT
iajs-89	140	49	(	(	PUNCT
iajs-89	140	50	2	2	NUM
iajs-89	140	51	)	)	PUNCT
iajs-89	140	52	,	,	PUNCT
iajs-89	140	53	(	(	PUNCT
iajs-89	140	54	353–353	353–353	NUM
iajs-89	140	55	)	)	PUNCT
iajs-89	140	56	.	.	PUNCT
iajs-89	141	1	12	12	NUM
iajs-89	141	2	.	.	PUNCT
iajs-89	142	1	boydens	boyden	NOUN
iajs-89	142	2	,	,	PUNCT
iajs-89	142	3	f.	f.	PROPN
iajs-89	142	4	,	,	PUNCT
iajs-89	142	5	(	(	PUNCT
iajs-89	142	6	2013	2013	NUM
iajs-89	142	7	)	)	PUNCT
iajs-89	142	8	,	,	PUNCT
iajs-89	142	9	“	"	PUNCT
iajs-89	142	10	key	key	ADJ
iajs-89	142	11	aspects	aspect	NOUN
iajs-89	142	12	of	of	ADP
iajs-89	142	13	sputtering	sputter	VERB
iajs-89	142	14	illustrated	illustrate	VERB
iajs-89	142	15	by	by	ADP
iajs-89	142	16	the	the	DET
iajs-89	142	17	use	use	NOUN
iajs-89	142	18	of	of	ADP
iajs-89	142	19	multi	multi	ADJ
iajs-89	142	20	-	-	ADJ
iajs-89	142	21	element	element	ADJ
iajs-89	142	22	powder	powder	NOUN
iajs-89	142	23	mixtures	mixture	NOUN
iajs-89	142	24	”	"	PUNCT
iajs-89	142	25	phd	phd	NOUN
iajs-89	142	26	thesis	thesis	NOUN
iajs-89	142	27	,	,	PUNCT
iajs-89	142	28	gent	gent	NOUN
iajs-89	142	29	university	university	PROPN
iajs-89	142	30	,	,	PUNCT
iajs-89	142	31	belgium	belgium	NOUN
iajs-89	142	32	.	.	PUNCT
iajs-89	143	1	13	13	NUM
iajs-89	143	2	.	.	X
iajs-89	144	1	dolique	dolique	NOUN
iajs-89	144	2	,	,	PUNCT
iajs-89	144	3	v.	v.	PROPN
iajs-89	144	4	;	;	PUNCT
iajs-89	144	5	thomann	thomann	PROPN
iajs-89	144	6	,	,	PUNCT
iajs-89	144	7	a.-l	a.-l	PROPN
iajs-89	144	8	.	.	PUNCT
iajs-89	145	1	,	,	PUNCT
iajs-89	145	2	;	;	PUNCT
iajs-89	145	3	brault	brault	NOUN
iajs-89	145	4	,	,	PUNCT
iajs-89	145	5	p.;tessier	p.;tessi	ADJ
iajs-89	145	6	,	,	PUNCT
iajs-89	145	7	y.	y.	NOUN
iajs-89	145	8	and	and	CCONJ
iajs-89	145	9	gillon	gillon	NOUN
iajs-89	145	10	,	,	PUNCT
iajs-89	145	11	p.	p.	PROPN
iajs-89	145	12	,	,	PUNCT
iajs-89	145	13	(	(	PUNCT
iajs-89	145	14	2009	2009	NUM
iajs-89	145	15	)	)	PUNCT
iajs-89	145	16	,	,	PUNCT
iajs-89	145	17	“	"	PUNCT
iajs-89	145	18	complex	complex	ADJ
iajs-89	145	19	structure	structure	NOUN
iajs-89	145	20	/	/	SYM
iajs-89	145	21	composition	composition	NOUN
iajs-89	145	22	relationship	relationship	NOUN
iajs-89	145	23	in	in	ADP
iajs-89	145	24	thin	thin	ADJ
iajs-89	145	25	films	film	NOUN
iajs-89	145	26	of	of	ADP
iajs-89	145	27	alcocrcufeni	alcocrcufeni	PROPN
iajs-89	145	28	high	high	ADJ
iajs-89	145	29	entropy	entropy	NOUN
iajs-89	145	30	alloy	alloy	NOUN
iajs-89	145	31	”	"	PUNCT
iajs-89	145	32	,	,	PUNCT
iajs-89	145	33	materials	material	NOUN
iajs-89	145	34	chemistry	chemistry	NOUN
iajs-89	145	35	and	and	CCONJ
iajs-89	145	36	physics	physics	NOUN
iajs-89	145	37	,	,	PUNCT
iajs-89	145	38	(	(	PUNCT
iajs-89	145	39	117	117	NUM
iajs-89	145	40	)	)	PUNCT
iajs-89	145	41	,	,	PUNCT
iajs-89	145	42	(	(	PUNCT
iajs-89	145	43	1	1	NUM
iajs-89	145	44	)	)	PUNCT
iajs-89	145	45	,	,	PUNCT
iajs-89	145	46	(	(	PUNCT
iajs-89	145	47	142–147	142–147	NUM
iajs-89	145	48	)	)	PUNCT
iajs-89	145	49	.	.	PUNCT
iajs-89	146	1	14	14	NUM
iajs-89	146	2	.	.	X
iajs-89	147	1	egerton	egerton	PROPN
iajs-89	147	2	,	,	PUNCT
iajs-89	147	3	r.f	r.f	PROPN
iajs-89	147	4	.	.	PROPN
iajs-89	147	5	;	;	PUNCT
iajs-89	147	6	mcleod	mcleod	PROPN
iajs-89	147	7	,	,	PUNCT
iajs-89	147	8	r.	r.	PROPN
iajs-89	147	9	;	;	PUNCT
iajs-89	147	10	wang	wang	PROPN
iajs-89	147	11	,	,	PUNCT
iajs-89	147	12	f.and	f.and	PROPN
iajs-89	147	13	malac	malac	PROPN
iajs-89	147	14	m.	m.	NOUN
iajs-89	147	15	,	,	PUNCT
iajs-89	147	16	(	(	PUNCT
iajs-89	147	17	2010	2010	NUM
iajs-89	147	18	)	)	PUNCT
iajs-89	147	19	,	,	PUNCT
iajs-89	147	20	“	"	PUNCT
iajs-89	147	21	basic	basic	ADJ
iajs-89	147	22	questions	question	NOUN
iajs-89	147	23	related	relate	VERB
iajs-89	147	24	to	to	ADP
iajs-89	147	25	electron	electron	NOUN
iajs-89	147	26	-	-	PUNCT
iajs-89	147	27	induced	induce	VERB
iajs-89	147	28	sputtering	sputtering	NOUN
iajs-89	147	29	in	in	ADP
iajs-89	147	30	the	the	DET
iajs-89	147	31	tem	tem	NOUN
iajs-89	147	32	”	"	PUNCT
iajs-89	147	33	,	,	PUNCT
iajs-89	147	34	ultramicroscopy	ultramicroscopy	NOUN
iajs-89	147	35	,	,	PUNCT
iajs-89	147	36	(	(	PUNCT
iajs-89	147	37	110	110	NUM
iajs-89	147	38	)	)	PUNCT
iajs-89	147	39	,	,	PUNCT
iajs-89	147	40	(	(	PUNCT
iajs-89	147	41	991–997	991–997	NUM
iajs-89	147	42	)	)	PUNCT
iajs-89	147	43	.	.	PUNCT
iajs-89	148	1	15	15	NUM
iajs-89	148	2	.	.	X
iajs-89	149	1	ziegler	ziegler	PROPN
iajs-89	149	2	,	,	PUNCT
iajs-89	149	3	j.	j.	PROPN
iajs-89	149	4	f.	f.	PROPN
iajs-89	149	5	;	;	PUNCT
iajs-89	149	6	biersck	biersck	VERB
iajs-89	149	7	,	,	PUNCT
iajs-89	149	8	j.	j.	PROPN
iajs-89	149	9	p.	p.	PROPN
iajs-89	149	10	and	and	CCONJ
iajs-89	149	11	ziegler	ziegler	PROPN
iajs-89	149	12	,	,	PUNCT
iajs-89	149	13	m.	m.	PROPN
iajs-89	149	14	d.	d.	PROPN
iajs-89	149	15	(	(	PUNCT
iajs-89	149	16	2008	2008	NUM
iajs-89	149	17	)	)	PUNCT
iajs-89	149	18	,	,	PUNCT
iajs-89	149	19	“	"	PUNCT
iajs-89	149	20	srim	srim	PROPN
iajs-89	149	21	:	:	PUNCT
iajs-89	149	22	the	the	DET
iajs-89	149	23	stopping	stopping	NOUN
iajs-89	149	24	and	and	CCONJ
iajs-89	149	25	range	range	NOUN
iajs-89	149	26	of	of	ADP
iajs-89	149	27	ions	ion	NOUN
iajs-89	149	28	in	in	ADP
iajs-89	149	29	matter	matter	NOUN
iajs-89	149	30	”	"	PUNCT
iajs-89	149	31	,	,	PUNCT
iajs-89	149	32	lulu	lulu	PROPN
iajs-89	149	33	press	press	PROPN
iajs-89	149	34	co.	co.	PROPN
iajs-89	149	35	physics	physics	PROPN
iajs-89	149	36	|	|	ADV
iajs-89	149	37	110	110	NUM
iajs-89	149	38	2016	2016	NUM
iajs-89	149	39	)	)	PUNCT
iajs-89	149	40	عام	عام	ADP
iajs-89	149	41	2(العدد	2(العدد	NUM
iajs-89	149	42	29المجلد	29المجلد	NUM
iajs-89	149	43	مجلة	مجلة	PROPN
iajs-89	149	44	إبن	إبن	NOUN
iajs-89	149	45	الهيثم	الهيثم	ADJ
iajs-89	149	46	للعلوم	للعلوم	NOUN
iajs-89	149	47	الصرفة	الصرفة	NOUN
iajs-89	150	1	و	و	PRON
iajs-89	150	2	التطبيقية	التطبيقية	ADJ
iajs-89	150	3	ibn	ibn	PROPN
iajs-89	150	4	al	al	PROPN
iajs-89	150	5	-	-	PUNCT
iajs-89	150	6	haitham	haitham	PROPN
iajs-89	150	7	j.	j.	PROPN
iajs-89	150	8	for	for	ADP
iajs-89	150	9	pure	pure	PROPN
iajs-89	150	10	&	&	CCONJ
iajs-89	150	11	appl	appl	PROPN
iajs-89	150	12	.	.	PUNCT
iajs-89	151	1	sci	sci	PROPN
iajs-89	151	2	.	.	PUNCT
iajs-89	152	1	vol.29	vol.29	PROPN
iajs-89	152	2	(	(	PUNCT
iajs-89	152	3	2	2	NUM
iajs-89	152	4	)	)	SYM
iajs-89	152	5	2016	2016	NUM
iajs-89	152	6	table	table	NOUN
iajs-89	152	7	(	(	PUNCT
iajs-89	152	8	1	1	NUM
iajs-89	152	9	):	):	PUNCT
iajs-89	152	10	the	the	DET
iajs-89	152	11	coefficients	coefficient	NOUN
iajs-89	152	12	of	of	ADP
iajs-89	152	13	equation	equation	NOUN
iajs-89	152	14	(	(	PUNCT
iajs-89	152	15	6	6	NUM
iajs-89	152	16	)	)	PUNCT
iajs-89	152	17	that	that	PRON
iajs-89	152	18	appears	appear	VERB
iajs-89	152	19	in	in	ADP
iajs-89	152	20	figure	figure	NOUN
iajs-89	152	21	3	3	NUM
iajs-89	152	22	.	.	PUNCT
iajs-89	153	1	3.1383	3.1383	NUM
iajs-89	153	2	29.94	29.94	NUM
iajs-89	153	3	1.8699	1.8699	NUM
iajs-89	153	4	1.8699	1.8699	NUM
iajs-89	153	5	29.554	29.554	NUM
iajs-89	153	6	30.571	30.571	NUM
iajs-89	153	7	27.919	27.919	NUM
iajs-89	153	8	26.812	26.812	NUM
iajs-89	153	9	26.812	26.812	NUM
iajs-89	153	10	27.388	27.388	NUM
iajs-89	153	11	318.24	318.24	NUM
iajs-89	153	12	0.26056	0.26056	NUM
iajs-89	153	13	163.63	163.63	NUM
iajs-89	153	14	163.63	163.63	NUM
iajs-89	153	15	0.27565	0.27565	NUM
iajs-89	153	16	width	width	VERB
iajs-89	153	17	4.9255	4.9255	NUM
iajs-89	153	18	4.4593	4.4593	NUM
iajs-89	153	19	4.2811	4.2811	NUM
iajs-89	153	20	4.2811	4.2811	NUM
iajs-89	153	21	4.3591	4.3591	NUM
iajs-89	153	22	table	table	NOUN
iajs-89	153	23	(	(	PUNCT
iajs-89	153	24	2	2	NUM
iajs-89	153	25	):	):	PUNCT
iajs-89	153	26	the	the	DET
iajs-89	153	27	values	value	NOUN
iajs-89	153	28	of	of	ADP
iajs-89	153	29	coefficient	coefficient	NOUN
iajs-89	153	30	in	in	ADP
iajs-89	153	31	equation	equation	NOUN
iajs-89	153	32	(	(	PUNCT
iajs-89	153	33	7	7	NUM
iajs-89	153	34	)	)	PUNCT
iajs-89	153	35	for	for	ADP
iajs-89	153	36	each	each	DET
iajs-89	153	37	angle	angle	NOUN
iajs-89	153	38	base	base	NOUN
iajs-89	153	39	1.8233	1.8233	NUM
iajs-89	154	1	1.5304	1.5304	NUM
iajs-89	154	2	3.9611	3.9611	NUM
iajs-89	154	3	2.8846	2.8846	NUM
iajs-89	154	4	max	max	PROPN
iajs-89	154	5	28.804	28.804	NUM
iajs-89	154	6	37.198	37.198	NUM
iajs-89	154	7	163.16	163.16	NUM
iajs-89	154	8	339.07	339.07	NUM
iajs-89	154	9	rate	rate	NOUN
iajs-89	154	10	0.70117	0.70117	NUM
iajs-89	154	11	0.77313	0.77313	NUM
iajs-89	154	12	0.71694	0.71694	NUM
iajs-89	154	13	0.68002	0.68002	NUM
iajs-89	154	14	xhalf	xhalf	NOUN
iajs-89	154	15	6.5833	6.5833	NUM
iajs-89	154	16	5.6775	5.6775	NUM
iajs-89	154	17	20.05	20.05	NUM
iajs-89	154	18	124.61	124.61	NUM
iajs-89	154	19	figure(1	figure(1	ADJ
iajs-89	154	20	)	)	PUNCT
iajs-89	154	21	section	section	NOUN
iajs-89	154	22	of	of	ADP
iajs-89	154	23	an	an	DET
iajs-89	154	24	ion	ion	NOUN
iajs-89	154	25	or	or	CCONJ
iajs-89	154	26	recoil	recoil	NOUN
iajs-89	154	27	trajectory	trajectory	NOUN
iajs-89	154	28	with	with	ADP
iajs-89	154	29	consecutive	consecutive	ADJ
iajs-89	154	30	collision	collision	NOUN
iajs-89	154	31	with	with	ADP
iajs-89	154	32	target	target	NOUN
iajs-89	154	33	atoms	atom	NOUN
iajs-89	154	34	denoted	denote	VERB
iajs-89	154	35	by	by	ADP
iajs-89	154	36	,	,	PUNCT
iajs-89	154	37	and	and	CCONJ
iajs-89	154	38	.	.	PUNCT
iajs-89	155	1	the	the	DET
iajs-89	155	2	solid	solid	ADJ
iajs-89	155	3	lines	line	NOUN
iajs-89	155	4	represent	represent	VERB
iajs-89	155	5	the	the	DET
iajs-89	155	6	ion	ion	NOUN
iajs-89	155	7	trajectory	trajectory	NOUN
iajs-89	155	8	[	[	X
iajs-89	155	9	12	12	NUM
iajs-89	155	10	]	]	PUNCT
iajs-89	155	11	.	.	PUNCT
iajs-89	156	1	physics	physics	NOUN
iajs-89	156	2	|	|	ADV
iajs-89	156	3	111	111	NUM
iajs-89	156	4	2016	2016	NUM
iajs-89	156	5	)	)	PUNCT
iajs-89	156	6	عام	عام	ADP
iajs-89	156	7	2(العدد	2(العدد	NUM
iajs-89	156	8	29المجلد	29المجلد	NUM
iajs-89	156	9	مجلة	مجلة	PROPN
iajs-89	156	10	إبن	إبن	NOUN
iajs-89	156	11	الهيثم	الهيثم	ADJ
iajs-89	156	12	للعلوم	للعلوم	NOUN
iajs-89	156	13	الصرفة	الصرفة	NOUN
iajs-89	157	1	و	و	PRON
iajs-89	157	2	التطبيقية	التطبيقية	ADJ
iajs-89	157	3	ibn	ibn	PROPN
iajs-89	157	4	al	al	PROPN
iajs-89	157	5	-	-	PUNCT
iajs-89	157	6	haitham	haitham	PROPN
iajs-89	157	7	j.	j.	PROPN
iajs-89	157	8	for	for	ADP
iajs-89	157	9	pure	pure	PROPN
iajs-89	157	10	&	&	CCONJ
iajs-89	157	11	appl	appl	PROPN
iajs-89	157	12	.	.	PUNCT
iajs-89	158	1	sci	sci	PROPN
iajs-89	158	2	.	.	PUNCT
iajs-89	159	1	vol.29	vol.29	PROPN
iajs-89	159	2	(	(	PUNCT
iajs-89	159	3	2	2	NUM
iajs-89	159	4	)	)	PUNCT
iajs-89	159	5	2016	2016	NUM
iajs-89	159	6	figure	figure	NOUN
iajs-89	159	7	2	2	NUM
iajs-89	159	8	(	(	PUNCT
iajs-89	159	9	a	a	X
iajs-89	159	10	)	)	PUNCT
iajs-89	159	11	the	the	DET
iajs-89	159	12	sputtering	sputtering	ADJ
iajs-89	159	13	yield	yield	NOUN
iajs-89	159	14	vs.	vs.	ADP
iajs-89	159	15	width	width	NOUN
iajs-89	159	16	of	of	ADP
iajs-89	159	17	zn	zn	PROPN
iajs-89	159	18	bombarded	bombard	VERB
iajs-89	159	19	by	by	ADP
iajs-89	159	20	xenon	xenon	NOUN
iajs-89	159	21	at	at	ADP
iajs-89	159	22	normal	normal	ADJ
iajs-89	159	23	incident	incident	NOUN
iajs-89	159	24	with	with	ADP
iajs-89	159	25	ion	ion	NOUN
iajs-89	159	26	number	number	NOUN
iajs-89	159	27	and	and	CCONJ
iajs-89	159	28	ion	ion	NOUN
iajs-89	159	29	energy	energy	NOUN
iajs-89	159	30	of	of	ADP
iajs-89	159	31	.	.	PUNCT
iajs-89	160	1	(	(	PUNCT
iajs-89	160	2	b	b	NOUN
iajs-89	160	3	)	)	PUNCT
iajs-89	160	4	–	–	PUNCT
iajs-89	160	5	(	(	PUNCT
iajs-89	160	6	d	d	X
iajs-89	160	7	)	)	PUNCT
iajs-89	160	8	the	the	DET
iajs-89	160	9	correspondent	correspondent	NOUN
iajs-89	160	10	energy	energy	NOUN
iajs-89	160	11	loss	loss	NOUN
iajs-89	160	12	due	due	ADP
iajs-89	160	13	to	to	ADP
iajs-89	160	14	ionization	ionization	NOUN
iajs-89	160	15	,	,	PUNCT
iajs-89	160	16	vacancies	vacancy	NOUN
iajs-89	160	17	and	and	CCONJ
iajs-89	160	18	phonons	phonon	NOUN
iajs-89	160	19	,	,	PUNCT
iajs-89	160	20	respectively	respectively	ADV
iajs-89	160	21	.	.	PUNCT
iajs-89	161	1	figure	figure	NOUN
iajs-89	161	2	(	(	PUNCT
iajs-89	161	3	3	3	NUM
iajs-89	161	4	)	)	PUNCT
iajs-89	161	5	the	the	DET
iajs-89	161	6	dependence	dependence	NOUN
iajs-89	161	7	of	of	ADP
iajs-89	161	8	the	the	DET
iajs-89	161	9	sputtering	sputtering	ADJ
iajs-89	161	10	yield	yield	NOUN
iajs-89	161	11	of	of	ADP
iajs-89	161	12	zn	zn	PROPN
iajs-89	161	13	on	on	ADP
iajs-89	161	14	the	the	DET
iajs-89	161	15	xenon	xenon	NOUN
iajs-89	161	16	ion	ion	NOUN
iajs-89	161	17	energy	energy	NOUN
iajs-89	161	18	for	for	ADP
iajs-89	161	19	different	different	ADJ
iajs-89	161	20	ion	ion	NOUN
iajs-89	161	21	number	number	NOUN
iajs-89	161	22	and	and	CCONJ
iajs-89	161	23	and	and	CCONJ
iajs-89	161	24	direct	direct	ADJ
iajs-89	161	25	incident	incident	NOUN
iajs-89	161	26	.	.	PUNCT
iajs-89	162	1	physics	physics	NOUN
iajs-89	162	2	|	|	ADV
iajs-89	162	3	112	112	NUM
iajs-89	162	4	2016	2016	NUM
iajs-89	162	5	)	)	PUNCT
iajs-89	162	6	عام	عام	ADP
iajs-89	162	7	2(العدد	2(العدد	NUM
iajs-89	162	8	29المجلد	29المجلد	NUM
iajs-89	162	9	مجلة	مجلة	PROPN
iajs-89	162	10	إبن	إبن	NOUN
iajs-89	162	11	الهيثم	الهيثم	ADJ
iajs-89	162	12	للعلوم	للعلوم	NOUN
iajs-89	162	13	الصرفة	الصرفة	NOUN
iajs-89	163	1	و	و	PRON
iajs-89	163	2	التطبيقية	التطبيقية	ADJ
iajs-89	163	3	ibn	ibn	PROPN
iajs-89	163	4	al	al	PROPN
iajs-89	163	5	-	-	PUNCT
iajs-89	163	6	haitham	haitham	PROPN
iajs-89	163	7	j.	j.	PROPN
iajs-89	163	8	for	for	ADP
iajs-89	163	9	pure	pure	PROPN
iajs-89	163	10	&	&	CCONJ
iajs-89	163	11	appl	appl	PROPN
iajs-89	163	12	.	.	PUNCT
iajs-89	164	1	sci	sci	PROPN
iajs-89	164	2	.	.	PUNCT
iajs-89	165	1	vol.29	vol.29	PROPN
iajs-89	165	2	(	(	PUNCT
iajs-89	165	3	2	2	NUM
iajs-89	165	4	)	)	PUNCT
iajs-89	165	5	2016	2016	NUM
iajs-89	165	6	figure	figure	NOUN
iajs-89	165	7	4	4	NUM
iajs-89	165	8	:	:	PUNCT
iajs-89	165	9	the	the	DET
iajs-89	165	10	dependence	dependence	NOUN
iajs-89	165	11	of	of	ADP
iajs-89	165	12	the	the	DET
iajs-89	165	13	sputtering	sputtering	ADJ
iajs-89	165	14	yield	yield	NOUN
iajs-89	165	15	of	of	ADP
iajs-89	165	16	zn	zn	PROPN
iajs-89	165	17	target	target	NOUN
iajs-89	165	18	bombarded	bombard	VERB
iajs-89	165	19	directly	directly	ADV
iajs-89	165	20	by	by	ADP
iajs-89	165	21	xenon	xenon	NOUN
iajs-89	165	22	ions	ion	NOUN
iajs-89	165	23	on	on	ADP
iajs-89	165	24	the	the	DET
iajs-89	165	25	ions	ion	NOUN
iajs-89	165	26	number	number	NOUN
iajs-89	165	27	for	for	ADP
iajs-89	165	28	fixed	fix	VERB
iajs-89	165	29	of	of	ADP
iajs-89	165	30	target	target	NOUN
iajs-89	165	31	at	at	ADP
iajs-89	165	32	figure(5	figure(5	PROPN
iajs-89	165	33	):	):	PUNCT
iajs-89	165	34	the	the	DET
iajs-89	165	35	angular	angular	ADJ
iajs-89	165	36	dependence	dependence	NOUN
iajs-89	165	37	of	of	ADP
iajs-89	165	38	the	the	DET
iajs-89	165	39	normalized	normalize	VERB
iajs-89	165	40	sputtering	sputtering	ADJ
iajs-89	165	41	yield	yield	NOUN
iajs-89	165	42	of	of	ADP
iajs-89	165	43	width	width	ADJ
iajs-89	165	44	target	target	NOUN
iajs-89	165	45	of	of	ADP
iajs-89	165	46	zn	zn	PROPN
iajs-89	165	47	bombarded	bombard	VERB
iajs-89	165	48	by	by	ADP
iajs-89	165	49	ions	ion	NOUN
iajs-89	165	50	number	number	NOUN
iajs-89	165	51	of	of	ADP
iajs-89	165	52	xenon	xenon	NOUN
iajs-89	165	53	.	.	PUNCT
iajs-89	166	1	physics	physics	NOUN
iajs-89	166	2	|	|	ADV
iajs-89	166	3	113	113	NUM
iajs-89	166	4	2016	2016	NUM
iajs-89	166	5	)	)	PUNCT
iajs-89	166	6	عام	عام	ADP
iajs-89	166	7	2(العدد	2(العدد	NUM
iajs-89	166	8	29المجلد	29المجلد	NUM
iajs-89	166	9	مجلة	مجلة	PROPN
iajs-89	166	10	إبن	إبن	NOUN
iajs-89	166	11	الهيثم	الهيثم	ADJ
iajs-89	166	12	للعلوم	للعلوم	NOUN
iajs-89	166	13	الصرفة	الصرفة	NOUN
iajs-89	167	1	و	و	PRON
iajs-89	167	2	التطبيقية	التطبيقية	ADJ
iajs-89	167	3	ibn	ibn	PROPN
iajs-89	167	4	al	al	PROPN
iajs-89	167	5	-	-	PUNCT
iajs-89	167	6	haitham	haitham	PROPN
iajs-89	167	7	j.	j.	PROPN
iajs-89	167	8	for	for	ADP
iajs-89	167	9	pure	pure	PROPN
iajs-89	167	10	&	&	CCONJ
iajs-89	167	11	appl	appl	PROPN
iajs-89	167	12	.	.	PUNCT
iajs-89	168	1	sci	sci	PROPN
iajs-89	168	2	.	.	PUNCT
iajs-89	169	1	vol.29	vol.29	PROPN
iajs-89	169	2	(	(	PUNCT
iajs-89	169	3	2	2	NUM
iajs-89	169	4	)	)	PUNCT
iajs-89	169	5	2016	2016	NUM
iajs-89	169	6	figure(6	figure(6	NOUN
iajs-89	169	7	):	):	PUNCT
iajs-89	169	8	the	the	DET
iajs-89	169	9	dependence	dependence	NOUN
iajs-89	169	10	of	of	ADP
iajs-89	169	11	the	the	DET
iajs-89	169	12	sputtering	sputtering	ADJ
iajs-89	169	13	yield	yield	NOUN
iajs-89	169	14	on	on	ADP
iajs-89	169	15	the	the	DET
iajs-89	169	16	ion	ion	NOUN
iajs-89	169	17	energy	energy	NOUN
iajs-89	169	18	for	for	ADP
iajs-89	169	19	the	the	DET
iajs-89	169	20	zn	zn	PROPN
iajs-89	169	21	target	target	NOUN
iajs-89	169	22	bombarded	bombard	VERB
iajs-89	169	23	by	by	ADP
iajs-89	169	24	xenon	xenon	NOUN
iajs-89	169	25	ion	ion	NOUN
iajs-89	169	26	at	at	ADP
iajs-89	169	27	different	different	ADJ
iajs-89	169	28	angles	angle	NOUN
iajs-89	169	29	of	of	ADP
iajs-89	169	30	incidence	incidence	NOUN
iajs-89	169	31	.	.	PUNCT
iajs-89	170	1	physics	physics	NOUN
iajs-89	170	2	|	|	ADV
iajs-89	170	3	114	114	NUM
iajs-89	170	4	2016	2016	NUM
iajs-89	170	5	)	)	PUNCT
iajs-89	170	6	عام	عام	ADP
iajs-89	170	7	2(العدد	2(العدد	NUM
iajs-89	170	8	29المجلد	29المجلد	NUM
iajs-89	170	9	مجلة	مجلة	PROPN
iajs-89	170	10	إبن	إبن	NOUN
iajs-89	170	11	الهيثم	الهيثم	ADJ
iajs-89	170	12	للعلوم	للعلوم	NOUN
iajs-89	170	13	الصرفة	الصرفة	NOUN
iajs-89	171	1	و	و	PRON
iajs-89	171	2	التطبيقية	التطبيقية	ADJ
iajs-89	171	3	ibn	ibn	PROPN
iajs-89	171	4	al	al	PROPN
iajs-89	171	5	-	-	PUNCT
iajs-89	171	6	haitham	haitham	PROPN
iajs-89	171	7	j.	j.	PROPN
iajs-89	171	8	for	for	ADP
iajs-89	171	9	pure	pure	PROPN
iajs-89	171	10	&	&	CCONJ
iajs-89	171	11	appl	appl	PROPN
iajs-89	171	12	.	.	PUNCT
iajs-89	172	1	sci	sci	PROPN
iajs-89	172	2	.	.	PUNCT
iajs-89	173	1	vol.29	vol.29	PROPN
iajs-89	173	2	(	(	PUNCT
iajs-89	173	3	2	2	NUM
iajs-89	173	4	)	)	PUNCT
iajs-89	173	5	2016	2016	NUM
iajs-89	173	6	لدراسة	لدراسة	NOUN
iajs-89	173	7	حاصل	حاصل	PROPN
iajs-89	173	8	ترذيذ	ترذيذ	PROPN
iajs-89	173	9	هدف	هدف	VERB
iajs-89	173	10	من	من	PROPN
iajs-89	173	11	الزنك	الزنك	NOUN
iajs-89	173	12	المقصوف	المقصوف	ADV
iajs-89	173	13	بأيونات	بأيونات	PROPN
iajs-89	173	14	الزينون	الزينون	PROPN
iajs-89	173	15	محاكاة	محاكاة	PROPN
iajs-89	173	16	سميرة	سميرة	PUNCT
iajs-89	173	17	احمد	احمد	PROPN
iajs-89	173	18	ابراهيم	ابراهيم	PROPN
iajs-89	173	19	فراس	فراس	PROPN
iajs-89	173	20	محمود	محمود	PROPN
iajs-89	173	21	هادي	هادي	NOUN
iajs-89	173	22	مصطفى	مصطفى	VERB
iajs-89	173	23	كامل	كامل	NOUN
iajs-89	173	24	جاسم	جاسم	NOUN
iajs-89	173	25	هدى	هدى	VERB
iajs-89	173	26	مجيد	مجيد	NOUN
iajs-89	173	27	توفيق	توفيق	NOUN
iajs-89	174	1	جامعة	جامعة	PROPN
iajs-89	174	2	بغداد	بغداد	PROPN
iajs-89	174	3	/كلية	/كلية	PROPN
iajs-89	174	4	التربية	التربية	PROPN
iajs-89	174	5	للعلوم	للعلوم	NOUN
iajs-89	174	6	الصرفة	الصرفة	NOUN
iajs-89	174	7	(	(	PUNCT
iajs-89	174	8	ابن	ابن	PROPN
iajs-89	174	9	الهيثم	الهيثم	PROPN
iajs-89	174	10	)	)	PUNCT
iajs-89	174	11	/قسم	/قسم	PUNCT
iajs-89	174	12	الفيزياء	الفيزياء	NOUN
iajs-89	174	13	2016	2016	NUM
iajs-89	174	14	/	/	SYM
iajs-89	174	15	حزيران/28	حزيران/28	PROPN
iajs-89	174	16	:	:	PUNCT
iajs-89	174	17	،	،	X
iajs-89	174	18	قبل	قبل	NOUN
iajs-89	174	19	في2016	في2016	PROPN
iajs-89	174	20	/	/	SYM
iajs-89	174	21	نيسان/7	نيسان/7	NUM
iajs-89	174	22	:	:	PUNCT
iajs-89	174	23	استلم	استلم	PROPN
iajs-89	174	24	في	في	ADP
iajs-89	174	25	الخالصة	الخالصة	PROPN
iajs-89	174	26	،	،	PROPN
iajs-89	174	27	تم	تم	PROPN
iajs-89	174	28	دراسة	دراسة	PROPN
iajs-89	174	29	سلوك	سلوك	PROPN
iajs-89	174	30	حاصل	حاصل	PROPN
iajs-89	174	31	الترذيذ	الترذيذ	ADJ
iajs-89	174	32	لهدف	لهدف	NOUN
iajs-89	174	33	من	من	ADP
iajs-89	174	34	الزنك	الزنك	PROPN
iajs-89	174	35	المقصوف	المقصوف	ADJ
iajs-89	174	36	trimباستخدام	trimباستخدام	PROPN
iajs-89	174	37	بيانات	بيانات	NOUN
iajs-89	174	38	محاكاة	محاكاة	ADJ
iajs-89	174	39	برنامج	برنامج	NOUN
iajs-89	174	40	التـــرم	التـــرم	NOUN
iajs-89	174	41	،	،	PROPN
iajs-89	174	42	ولعدد	ولعدد	PROPN
iajs-89	174	43	znالثقيلة	znالثقيلة	PROPN
iajs-89	174	44	.	.	PUNCT
iajs-89	175	1	تمت	تمت	PROPN
iajs-89	175	2	اجراء	اجراء	NOUN
iajs-89	175	3	حسابات	حسابات	PROPN
iajs-89	175	4	حاصل	حاصل	NOUN
iajs-89	175	5	الترذيذ	الترذيذ	VERB
iajs-89	175	6	كدالة	كدالة	VERB
iajs-89	175	7	لعرض	لعرض	PROPN
iajs-89	175	8	طبقة	طبقة	NOUN
iajs-89	175	9	من	من	PROPN
iajs-89	175	10	الزنك	الزنك	NOUN
iajs-89	175	11	xeبوساطة	xeبوساطة	PROPN
iajs-89	175	12	ايونات	ايونات	PROPN
iajs-89	175	13	بــالزما	بــالزما	PROPN
iajs-89	175	14	الزينون	الزينون	PROPN
iajs-89	175	15	الهدف	الهدف	ADP
iajs-89	175	16	وتم	وتم	NOUN
iajs-89	175	17	مناقشتها	مناقشتها	NOUN
iajs-89	175	18	ورسمها	ورسمها	ADJ
iajs-89	175	19	.	.	PUNCT
iajs-89	176	1	كذلك	كذلك	PROPN
iajs-89	176	2	تم	تم	PUNCT
iajs-89	176	3	مناقشة	مناقشة	PROPN
iajs-89	176	4	ورسم	ورسم	PROPN
iajs-89	176	5	خسائر	خسائر	PROPN
iajs-89	177	1	الطاقة	الطاقة	PROPN
iajs-89	177	2	ايونات	ايونات	PROPN
iajs-89	177	3	الزينون	الزينون	PROPN
iajs-89	177	4	،	،	PROPN
iajs-89	177	5	وطاقتها	وطاقتها	PROPN
iajs-89	177	6	،	،	PROPN
iajs-89	177	7	وزاوية	وزاوية	PROPN
iajs-89	177	8	السقوط	السقوط	PROPN
iajs-89	177	9	أيونات	أيونات	PROPN
iajs-89	177	10	على	على	PROPN
iajs-89	177	11	المترافقة	المترافقة	NOUN
iajs-89	177	12	مع	مع	PROPN
iajs-89	177	13	الترذيذ	الترذيذ	VERB
iajs-89	177	14	بسبب	بسبب	PROPN
iajs-89	177	15	التأين	التأين	PROPN
iajs-89	177	16	،	،	PROPN
iajs-89	177	17	والشواغر	والشواغر	NOUN
iajs-89	177	18	والفونونات	والفونونات	PROPN
iajs-89	177	19	.	.	PUNCT
iajs-89	178	1	وعالوة	وعالوة	PROPN
iajs-89	178	2	على	على	PROPN
iajs-89	178	3	ذلك	ذلك	PROPN
iajs-89	178	4	،	،	PROPN
iajs-89	178	5	تم	تم	PUNCT
iajs-89	178	6	مالئمة	مالئمة	PROPN
iajs-89	178	7	الحسابات	الحسابات	PROPN
iajs-89	179	1	والتعبير	والتعبير	PROPN
iajs-89	179	2	عن	عن	PROPN
iajs-89	179	3	منحنيات	منحنيات	PROPN
iajs-89	179	4	الحسابات	الحسابات	VERB
iajs-89	179	5	بمعادالت	بمعادالت	ADJ
iajs-89	179	6	مالئمة	مالئمة	PROPN
iajs-89	179	7	و	و	PRON
iajs-89	179	8	وضعت	وضعت	NOUN
iajs-89	179	9	معامالتها	معامالتها	NOUN
iajs-89	179	10	.	.	PUNCT
iajs-89	180	1	zn	zn	PROPN
iajs-89	180	2	،	،	PROPN
iajs-89	180	3	الزنك	الزنك	PROPN
iajs-89	180	4	xeحاصل	xeحاصل	PROPN
iajs-89	180	5	الترذيذ	الترذيذ	VERB
iajs-89	180	6	،	،	PROPN
iajs-89	180	7	أيونات	أيونات	PROPN
iajs-89	180	8	الزينون	الزينون	PROPN
iajs-89	180	9	،	،	PROPN
iajs-89	180	10	trim	trim	PROPN
iajs-89	180	11	:	:	PUNCT
iajs-89	180	12	برنامج	برنامج	NOUN
iajs-89	180	13	التــرم	التــرم	NOUN
iajs-89	180	14	الكلمات	الكلمات	NOUN
iajs-89	180	15	المفتاحية	المفتاحية	VERB