id	sid	tid	token	lemma	pos
iajs-9	1	1	conseguences	conseguence	NOUN
iajs-9	1	2	of	of	ADP
iajs-9	1	3	soil	soil	NOUN
iajs-9	1	4	crude	crude	ADJ
iajs-9	1	5	oil	oil	NOUN
iajs-9	1	6	pollution	pollution	NOUN
iajs-9	1	7	on	on	ADP
iajs-9	1	8	some	some	DET
iajs-9	1	9	wood	wood	NOUN
iajs-9	1	10	properties	property	NOUN
iajs-9	1	11	of	of	ADP
iajs-9	1	12	olive	olive	NOUN
iajs-9	1	13	trees	tree	NOUN
iajs-9	1	14	physics	physics	PROPN
iajs-9	1	15	|	|	ADV
iajs-9	1	16	26	26	NUM
iajs-9	1	17	2016	2016	NUM
iajs-9	1	18	(	(	PUNCT
iajs-9	1	19	عاو	عاو	NOUN
iajs-9	1	20	3)انعذد	3)انعذد	NUM
iajs-9	1	21	22انًجهذ	22انًجهذ	NUM
iajs-9	1	22	يجهت	يجهت	NOUN
iajs-9	1	23	إبٍ	إبٍ	VERB
iajs-9	1	24	انهٍثى	انهٍثى	PROPN
iajs-9	1	25	نهعهىو	نهعهىو	PROPN
iajs-9	2	1	انصشفت	انصشفت	NOUN
iajs-9	2	2	و	و	PRON
iajs-9	2	3	انتطبٍقٍت	انتطبٍقٍت	PROPN
iajs-9	2	4	ibn	ibn	PROPN
iajs-9	2	5	al	al	PROPN
iajs-9	2	6	-	-	PUNCT
iajs-9	2	7	haitham	haitham	PROPN
iajs-9	2	8	j.	j.	PROPN
iajs-9	2	9	for	for	ADP
iajs-9	2	10	pure	pure	PROPN
iajs-9	2	11	&	&	CCONJ
iajs-9	2	12	appl	appl	PROPN
iajs-9	2	13	.	.	PUNCT
iajs-9	3	1	sci	sci	PROPN
iajs-9	3	2	.	.	PUNCT
iajs-9	4	1	vol.29	vol.29	PROPN
iajs-9	4	2	(	(	PUNCT
iajs-9	4	3	3	3	NUM
iajs-9	4	4	)	)	PUNCT
iajs-9	4	5	2016	2016	NUM
iajs-9	4	6	calculating	calculate	VERB
iajs-9	4	7	the	the	DET
iajs-9	4	8	sputtering	sputtering	ADJ
iajs-9	4	9	yield	yield	NOUN
iajs-9	4	10	of	of	ADP
iajs-9	4	11	lithium	lithium	NOUN
iajs-9	4	12	,	,	PUNCT
iajs-9	4	13	sodium	sodium	NOUN
iajs-9	4	14	and	and	CCONJ
iajs-9	4	15	krypton	krypton	PROPN
iajs-9	4	16	bombarded	bombard	VERB
iajs-9	4	17	by	by	ADP
iajs-9	4	18	same	same	ADJ
iajs-9	4	19	target	target	NOUN
iajs-9	4	20	ion	ion	NOUN
iajs-9	4	21	using	use	VERB
iajs-9	4	22	trim	trim	NOUN
iajs-9	4	23	simulation	simulation	NOUN
iajs-9	4	24	program	program	NOUN
iajs-9	4	25	enas	enas	PROPN
iajs-9	4	26	ahmed	ahmed	PROPN
iajs-9	4	27	jawad	jawad	PROPN
iajs-9	4	28	mustafa	mustafa	PROPN
iajs-9	4	29	kamel	kamel	PROPN
iajs-9	4	30	jassim	jassim	PROPN
iajs-9	4	31	huda	huda	PROPN
iajs-9	4	32	majeed	majeed	PROPN
iajs-9	4	33	tawfeek	tawfeek	PROPN
iajs-9	4	34	dept	dept	PROPN
iajs-9	4	35	.	.	PROPN
iajs-9	4	36	of	of	ADP
iajs-9	4	37	physics	physics	PROPN
iajs-9	4	38	/	/	SYM
iajs-9	4	39	college	college	PROPN
iajs-9	4	40	of	of	ADP
iajs-9	4	41	education	education	NOUN
iajs-9	4	42	for	for	ADP
iajs-9	4	43	pure	pure	ADJ
iajs-9	4	44	science	science	NOUN
iajs-9	4	45	(	(	PUNCT
iajs-9	4	46	ibn	ibn	PROPN
iajs-9	4	47	al	al	PROPN
iajs-9	4	48	-	-	PUNCT
iajs-9	4	49	haitham	haitham	PROPN
iajs-9	4	50	)	)	PUNCT
iajs-9	4	51	university	university	PROPN
iajs-9	4	52	of	of	ADP
iajs-9	4	53	baghdad	baghdad	PROPN
iajs-9	4	54	received	receive	VERB
iajs-9	4	55	in	in	ADP
iajs-9	4	56	:	:	PUNCT
iajs-9	4	57	10	10	NUM
iajs-9	4	58	/	/	SYM
iajs-9	4	59	april/2016,accepted	april/2016,accepte	VERB
iajs-9	4	60	in	in	ADP
iajs-9	4	61	:	:	PUNCT
iajs-9	4	62	19	19	NUM
iajs-9	4	63	/july/2016	/july/2016	PUNCT
iajs-9	4	64	abstract	abstract	ADJ
iajs-9	4	65	calculations	calculation	NOUN
iajs-9	4	66	of	of	ADP
iajs-9	4	67	sputtering	sputtering	ADJ
iajs-9	4	68	yield	yield	NOUN
iajs-9	4	69	for	for	ADP
iajs-9	4	70	lithium	lithium	NOUN
iajs-9	4	71	,	,	PUNCT
iajs-9	4	72	sodium	sodium	NOUN
iajs-9	4	73	and	and	CCONJ
iajs-9	4	74	krypton	krypton	PROPN
iajs-9	4	75	bombarded	bombard	VERB
iajs-9	4	76	by	by	ADP
iajs-9	4	77	the	the	DET
iajs-9	4	78	same	same	ADJ
iajs-9	4	79	own	own	ADJ
iajs-9	4	80	ions	ion	NOUN
iajs-9	4	81	are	be	AUX
iajs-9	4	82	achieved	achieve	VERB
iajs-9	4	83	by	by	ADP
iajs-9	4	84	using	use	VERB
iajs-9	4	85	trim	trim	NOUN
iajs-9	4	86	program.the	program.the	DET
iajs-9	4	87	relation	relation	NOUN
iajs-9	4	88	of	of	ADP
iajs-9	4	89	angular	angular	ADJ
iajs-9	4	90	dependent	dependent	NOUN
iajs-9	4	91	of	of	ADP
iajs-9	4	92	sputtering	sputtering	ADJ
iajs-9	4	93	yield	yield	NOUN
iajs-9	4	94	for	for	ADP
iajs-9	4	95	each	each	DET
iajs-9	4	96	ion	ion	NOUN
iajs-9	4	97	/	/	SYM
iajs-9	4	98	target	target	NOUN
iajs-9	4	99	is	be	AUX
iajs-9	4	100	studied	study	VERB
iajs-9	4	101	.	.	PUNCT
iajs-9	5	1	also	also	ADV
iajs-9	5	2	,	,	PUNCT
iajs-9	5	3	the	the	DET
iajs-9	5	4	dependence	dependence	NOUN
iajs-9	5	5	of	of	ADP
iajs-9	5	6	the	the	DET
iajs-9	5	7	sputtering	sputtering	ADJ
iajs-9	5	8	yield	yield	NOUN
iajs-9	5	9	of	of	ADP
iajs-9	5	10	target	target	NOUN
iajs-9	5	11	on	on	ADP
iajs-9	5	12	the	the	DET
iajs-9	5	13	energy	energy	NOUN
iajs-9	5	14	of	of	ADP
iajs-9	5	15	the	the	DET
iajs-9	5	16	same	same	ADJ
iajs-9	5	17	ion	ion	NOUN
iajs-9	5	18	is	be	AUX
iajs-9	5	19	discussed	discuss	VERB
iajs-9	5	20	and	and	CCONJ
iajs-9	5	21	plotted	plot	VERB
iajs-9	5	22	graphically	graphically	ADV
iajs-9	5	23	.	.	PUNCT
iajs-9	6	1	many	many	ADJ
iajs-9	6	2	researchers	researcher	NOUN
iajs-9	6	3	applied	apply	VERB
iajs-9	6	4	polynomials	polynomial	NOUN
iajs-9	6	5	function	function	VERB
iajs-9	6	6	to	to	PART
iajs-9	6	7	fit	fit	VERB
iajs-9	6	8	the	the	DET
iajs-9	6	9	sputtering	sputter	VERB
iajs-9	6	10	data	datum	NOUN
iajs-9	6	11	from	from	ADP
iajs-9	6	12	experimental	experimental	ADJ
iajs-9	6	13	and	and	CCONJ
iajs-9	6	14	simulation	simulation	NOUN
iajs-9	6	15	programs	program	NOUN
iajs-9	6	16	,	,	PUNCT
iajs-9	6	17	however	however	ADV
iajs-9	6	18	,	,	PUNCT
iajs-9	6	19	we	we	PRON
iajs-9	6	20	suggest	suggest	VERB
iajs-9	6	21	to	to	PART
iajs-9	6	22	use	use	VERB
iajs-9	6	23	ior	ior	NOUN
iajs-9	6	24	function	function	NOUN
iajs-9	6	25	for	for	ADP
iajs-9	6	26	fitting	fit	VERB
iajs-9	6	27	the	the	DET
iajs-9	6	28	angular	angular	ADJ
iajs-9	6	29	distribution	distribution	NOUN
iajs-9	6	30	of	of	ADP
iajs-9	6	31	the	the	DET
iajs-9	6	32	sputtering	sputtering	ADJ
iajs-9	6	33	yield	yield	NOUN
iajs-9	6	34	.	.	PUNCT
iajs-9	7	1	a	a	DET
iajs-9	7	2	new	new	ADJ
iajs-9	7	3	data	datum	NOUN
iajs-9	7	4	for	for	ADP
iajs-9	7	5	fitting	fitting	ADJ
iajs-9	7	6	coefficients	coefficient	NOUN
iajs-9	7	7	of	of	ADP
iajs-9	7	8	the	the	DET
iajs-9	7	9	used	use	VERB
iajs-9	7	10	ion	ion	NOUN
iajs-9	7	11	/	/	SYM
iajs-9	7	12	target	target	NOUN
iajs-9	7	13	are	be	AUX
iajs-9	7	14	presented	present	VERB
iajs-9	7	15	by	by	ADP
iajs-9	7	16	applying	apply	VERB
iajs-9	7	17	used	used	ADJ
iajs-9	7	18	function	function	NOUN
iajs-9	7	19	for	for	ADP
iajs-9	7	20	the	the	DET
iajs-9	7	21	dependence	dependence	NOUN
iajs-9	7	22	of	of	ADP
iajs-9	7	23	the	the	DET
iajs-9	7	24	sputtering	sputtering	ADJ
iajs-9	7	25	yield	yield	NOUN
iajs-9	7	26	on	on	ADP
iajs-9	7	27	the	the	DET
iajs-9	7	28	ion	ion	NOUN
iajs-9	7	29	energy	energy	NOUN
iajs-9	7	30	.	.	PUNCT
iajs-9	8	1	keywords	keyword	NOUN
iajs-9	8	2	:	:	PUNCT
iajs-9	8	3	sputtering	sputtering	ADJ
iajs-9	8	4	,	,	PUNCT
iajs-9	8	5	trim	trim	NOUN
iajs-9	8	6	program	program	NOUN
iajs-9	8	7	,	,	PUNCT
iajs-9	8	8	ion	ion	NOUN
iajs-9	8	9	plasma	plasma	NOUN
iajs-9	8	10	,	,	PUNCT
iajs-9	8	11	lithium	lithium	NOUN
iajs-9	8	12	,	,	PUNCT
iajs-9	8	13	sodium	sodium	NOUN
iajs-9	8	14	,	,	PUNCT
iajs-9	8	15	krypton	krypton	PROPN
iajs-9	8	16	.	.	PUNCT
iajs-9	9	1	physics	physics	PROPN
iajs-9	9	2	|	|	ADV
iajs-9	9	3	27	27	NUM
iajs-9	9	4	2016	2016	NUM
iajs-9	9	5	(	(	PUNCT
iajs-9	9	6	عاو	عاو	NOUN
iajs-9	9	7	3)انعذد	3)انعذد	NUM
iajs-9	9	8	22انًجهذ	22انًجهذ	NUM
iajs-9	9	9	يجهت	يجهت	NOUN
iajs-9	9	10	إبٍ	إبٍ	VERB
iajs-9	9	11	انهٍثى	انهٍثى	PROPN
iajs-9	9	12	نهعهىو	نهعهىو	PROPN
iajs-9	10	1	انصشفت	انصشفت	NOUN
iajs-9	10	2	و	و	PRON
iajs-9	10	3	انتطبٍقٍت	انتطبٍقٍت	PROPN
iajs-9	10	4	ibn	ibn	PROPN
iajs-9	10	5	al	al	PROPN
iajs-9	10	6	-	-	PUNCT
iajs-9	10	7	haitham	haitham	PROPN
iajs-9	10	8	j.	j.	PROPN
iajs-9	10	9	for	for	ADP
iajs-9	10	10	pure	pure	PROPN
iajs-9	10	11	&	&	CCONJ
iajs-9	10	12	appl	appl	PROPN
iajs-9	10	13	.	.	PUNCT
iajs-9	11	1	sci	sci	PROPN
iajs-9	11	2	.	.	PUNCT
iajs-9	12	1	vol.29	vol.29	PROPN
iajs-9	12	2	(	(	PUNCT
iajs-9	12	3	3	3	NUM
iajs-9	12	4	)	)	SYM
iajs-9	12	5	2016	2016	NUM
iajs-9	12	6	introduction	introduction	NOUN
iajs-9	12	7	sputtering	sputtering	NOUN
iajs-9	12	8	is	be	AUX
iajs-9	12	9	a	a	DET
iajs-9	12	10	process	process	NOUN
iajs-9	12	11	whereby	whereby	SCONJ
iajs-9	12	12	atoms	atom	NOUN
iajs-9	12	13	are	be	AUX
iajs-9	12	14	ejected	eject	VERB
iajs-9	12	15	from	from	ADP
iajs-9	12	16	a	a	DET
iajs-9	12	17	solid	solid	ADJ
iajs-9	12	18	target	target	NOUN
iajs-9	12	19	material	material	NOUN
iajs-9	12	20	due	due	ADP
iajs-9	12	21	to	to	ADP
iajs-9	12	22	bombardment	bombardment	NOUN
iajs-9	12	23	of	of	ADP
iajs-9	12	24	the	the	DET
iajs-9	12	25	target	target	NOUN
iajs-9	12	26	by	by	ADP
iajs-9	12	27	energetic	energetic	ADJ
iajs-9	12	28	particles	particle	NOUN
iajs-9	12	29	[	[	PUNCT
iajs-9	12	30	1	1	NUM
iajs-9	12	31	–	–	PUNCT
iajs-9	12	32	4	4	NUM
iajs-9	12	33	]	]	PUNCT
iajs-9	12	34	.	.	PUNCT
iajs-9	13	1	sputtering	sputtering	NOUN
iajs-9	13	2	begins	begin	VERB
iajs-9	13	3	when	when	SCONJ
iajs-9	13	4	an	an	DET
iajs-9	13	5	energetic	energetic	ADJ
iajs-9	13	6	particle	particle	NOUN
iajs-9	13	7	strikes	strike	VERB
iajs-9	13	8	a	a	DET
iajs-9	13	9	target	target	NOUN
iajs-9	13	10	surface	surface	NOUN
iajs-9	13	11	atom	atom	NOUN
iajs-9	13	12	.	.	PUNCT
iajs-9	14	1	this	this	DET
iajs-9	14	2	particle	particle	NOUN
iajs-9	14	3	is	be	AUX
iajs-9	14	4	often	often	ADV
iajs-9	14	5	called	call	VERB
iajs-9	14	6	the	the	DET
iajs-9	14	7	incident	incident	NOUN
iajs-9	14	8	,	,	PUNCT
iajs-9	14	9	primary	primary	NOUN
iajs-9	14	10	,	,	PUNCT
iajs-9	14	11	or	or	CCONJ
iajs-9	14	12	projectile	projectile	NOUN
iajs-9	14	13	particle.sputtering	particle.sputtering	NOUN
iajs-9	14	14	occurs	occur	VERB
iajs-9	14	15	as	as	ADP
iajs-9	14	16	the	the	DET
iajs-9	14	17	result	result	NOUN
iajs-9	14	18	of	of	ADP
iajs-9	14	19	a	a	DET
iajs-9	14	20	series	series	NOUN
iajs-9	14	21	elastic	elastic	ADJ
iajs-9	14	22	collisions	collision	NOUN
iajs-9	14	23	where	where	SCONJ
iajs-9	14	24	the	the	DET
iajs-9	14	25	momentum	momentum	NOUN
iajs-9	14	26	is	be	AUX
iajs-9	14	27	transferred	transfer	VERB
iajs-9	14	28	from	from	ADP
iajs-9	14	29	the	the	DET
iajs-9	14	30	incident	incident	NOUN
iajs-9	14	31	ions	ion	NOUN
iajs-9	14	32	to	to	ADP
iajs-9	14	33	the	the	DET
iajs-9	14	34	target	target	NOUN
iajs-9	14	35	atoms	atom	NOUN
iajs-9	14	36	through	through	ADP
iajs-9	14	37	a	a	DET
iajs-9	14	38	series	series	NOUN
iajs-9	14	39	of	of	ADP
iajs-9	14	40	binary	binary	ADJ
iajs-9	14	41	collisions	collision	NOUN
iajs-9	14	42	or	or	CCONJ
iajs-9	14	43	a	a	DET
iajs-9	14	44	collision	collision	NOUN
iajs-9	14	45	cascades	cascade	VERB
iajs-9	14	46	region	region	NOUN
iajs-9	14	47	.	.	PUNCT
iajs-9	15	1	a	a	DET
iajs-9	15	2	surface	surface	NOUN
iajs-9	15	3	atom	atom	NOUN
iajs-9	15	4	may	may	AUX
iajs-9	15	5	be	be	AUX
iajs-9	15	6	ejected	eject	VERB
iajs-9	15	7	as	as	ADP
iajs-9	15	8	a	a	DET
iajs-9	15	9	sputtered	sputter	VERB
iajs-9	15	10	particle	particle	NOUN
iajs-9	15	11	if	if	SCONJ
iajs-9	15	12	it	it	PRON
iajs-9	15	13	receives	receive	VERB
iajs-9	15	14	a	a	DET
iajs-9	15	15	component	component	NOUN
iajs-9	15	16	of	of	ADP
iajs-9	15	17	kinetic	kinetic	ADJ
iajs-9	15	18	energy	energy	NOUN
iajs-9	15	19	that	that	PRON
iajs-9	15	20	is	be	AUX
iajs-9	15	21	sufficient	sufficient	ADJ
iajs-9	15	22	to	to	PART
iajs-9	15	23	overcome	overcome	VERB
iajs-9	15	24	the	the	DET
iajs-9	15	25	surface	surface	NOUN
iajs-9	15	26	binding	bind	VERB
iajs-9	15	27	energy	energy	NOUN
iajs-9	15	28	(	(	PUNCT
iajs-9	15	29	sbe	sbe	PROPN
iajs-9	15	30	)	)	PUNCT
iajs-9	15	31	of	of	ADP
iajs-9	15	32	the	the	DET
iajs-9	15	33	target	target	NOUN
iajs-9	15	34	material	material	NOUN
iajs-9	15	35	[	[	X
iajs-9	15	36	5	5	NUM
iajs-9	15	37	]	]	PUNCT
iajs-9	15	38	.	.	PUNCT
iajs-9	16	1	the	the	DET
iajs-9	16	2	minimum	minimum	ADJ
iajs-9	16	3	ion	ion	NOUN
iajs-9	16	4	energy	energy	NOUN
iajs-9	16	5	required	require	VERB
iajs-9	16	6	for	for	ADP
iajs-9	16	7	sputtering	sputtering	NOUN
iajs-9	16	8	is	be	AUX
iajs-9	16	9	called	call	VERB
iajs-9	16	10	threshold	threshold	NOUN
iajs-9	16	11	energy	energy	NOUN
iajs-9	16	12	which	which	PRON
iajs-9	16	13	depends	depend	VERB
iajs-9	16	14	on	on	ADP
iajs-9	16	15	the	the	DET
iajs-9	16	16	heat	heat	NOUN
iajs-9	16	17	of	of	ADP
iajs-9	16	18	sublimation	sublimation	NOUN
iajs-9	16	19	of	of	ADP
iajs-9	16	20	target	target	NOUN
iajs-9	16	21	material	material	NOUN
iajs-9	16	22	;	;	PUNCT
iajs-9	16	23	it	it	PRON
iajs-9	16	24	is	be	AUX
iajs-9	16	25	relatively	relatively	ADV
iajs-9	16	26	insensitive	insensitive	ADJ
iajs-9	16	27	to	to	ADP
iajs-9	16	28	the	the	DET
iajs-9	16	29	nature	nature	NOUN
iajs-9	16	30	of	of	ADP
iajs-9	16	31	the	the	DET
iajs-9	16	32	bombarding	bombard	VERB
iajs-9	16	33	ions	ion	NOUN
iajs-9	16	34	[	[	X
iajs-9	16	35	6	6	NUM
iajs-9	16	36	]	]	PUNCT
iajs-9	16	37	.	.	PUNCT
iajs-9	17	1	trim	trim	NOUN
iajs-9	17	2	(	(	PUNCT
iajs-9	17	3	transport	transport	NOUN
iajs-9	17	4	of	of	ADP
iajs-9	17	5	ions	ion	NOUN
iajs-9	17	6	in	in	ADP
iajs-9	17	7	matter	matter	NOUN
iajs-9	17	8	)	)	PUNCT
iajs-9	17	9	is	be	AUX
iajs-9	17	10	a	a	DET
iajs-9	17	11	simulation	simulation	NOUN
iajs-9	17	12	program	program	NOUN
iajs-9	17	13	which	which	PRON
iajs-9	17	14	employs	employ	VERB
iajs-9	17	15	monte	monte	PROPN
iajs-9	17	16	carlo	carlo	PROPN
iajs-9	17	17	algorithm	algorithm	PROPN
iajs-9	17	18	to	to	PART
iajs-9	17	19	simulate	simulate	VERB
iajs-9	17	20	sputtering	sputtering	ADJ
iajs-9	17	21	process	process	NOUN
iajs-9	17	22	.	.	PUNCT
iajs-9	18	1	it	it	PRON
iajs-9	18	2	is	be	AUX
iajs-9	18	3	part	part	NOUN
iajs-9	18	4	of	of	ADP
iajs-9	18	5	the	the	DET
iajs-9	18	6	srim(stopping	srim(stopping	NOUN
iajs-9	18	7	and	and	CCONJ
iajs-9	18	8	range	range	NOUN
iajs-9	18	9	of	of	ADP
iajs-9	18	10	ions	ion	NOUN
iajs-9	18	11	in	in	ADP
iajs-9	18	12	matter	matter	NOUN
iajs-9	18	13	)	)	PUNCT
iajs-9	18	14	,	,	PUNCT
iajs-9	18	15	the	the	DET
iajs-9	18	16	software	software	NOUN
iajs-9	18	17	package	package	NOUN
iajs-9	18	18	which	which	PRON
iajs-9	18	19	contains	contain	VERB
iajs-9	18	20	a	a	DET
iajs-9	18	21	set	set	NOUN
iajs-9	18	22	of	of	ADP
iajs-9	18	23	programs	program	NOUN
iajs-9	18	24	that	that	PRON
iajs-9	18	25	related	relate	VERB
iajs-9	18	26	to	to	ADP
iajs-9	18	27	the	the	DET
iajs-9	18	28	stopping	stop	VERB
iajs-9	18	29	range	range	NOUN
iajs-9	18	30	of	of	ADP
iajs-9	18	31	ions	ion	NOUN
iajs-9	18	32	in	in	ADP
iajs-9	18	33	matter	matter	NOUN
iajs-9	18	34	calculations	calculation	NOUN
iajs-9	18	35	through	through	ADP
iajs-9	18	36	quantum	quantum	ADJ
iajs-9	18	37	mechanical	mechanical	ADJ
iajs-9	18	38	treatment	treatment	NOUN
iajs-9	18	39	of	of	ADP
iajs-9	18	40	ion	ion	NOUN
iajs-9	18	41	atom	atom	NOUN
iajs-9	18	42	collisions	collision	NOUN
iajs-9	19	1	[	[	X
iajs-9	19	2	7	7	NUM
iajs-9	19	3	]	]	PUNCT
iajs-9	19	4	.	.	PUNCT
iajs-9	20	1	in	in	ADP
iajs-9	20	2	this	this	DET
iajs-9	20	3	paper	paper	NOUN
iajs-9	20	4	we	we	PRON
iajs-9	20	5	use	use	VERB
iajs-9	20	6	trim	trim	NOUN
iajs-9	20	7	program	program	NOUN
iajs-9	20	8	to	to	PART
iajs-9	20	9	calculate	calculate	VERB
iajs-9	20	10	thesputtering	thesputtering	NOUN
iajs-9	20	11	yield	yield	NOUN
iajs-9	20	12	of	of	ADP
iajs-9	20	13	light	light	ADJ
iajs-9	20	14	/	/	SYM
iajs-9	20	15	heavy	heavy	ADJ
iajs-9	20	16	target	target	NOUN
iajs-9	20	17	bombard	bombard	NOUN
iajs-9	20	18	by	by	ADP
iajs-9	20	19	its	its	PRON
iajs-9	20	20	own	own	ADJ
iajs-9	20	21	ion	ion	NOUN
iajs-9	20	22	.	.	PUNCT
iajs-9	21	1	we	we	PRON
iajs-9	21	2	choose	choose	VERB
iajs-9	21	3	li	li	PROPN
iajs-9	21	4	,	,	PUNCT
iajs-9	21	5	na	na	NOUN
iajs-9	21	6	and	and	CCONJ
iajs-9	21	7	kr	kr	PROPN
iajs-9	21	8	to	to	PART
iajs-9	21	9	study	study	VERB
iajs-9	21	10	the	the	DET
iajs-9	21	11	sputtering	sputtering	ADJ
iajs-9	21	12	yield	yield	NOUN
iajs-9	21	13	parameters	parameter	NOUN
iajs-9	21	14	that	that	PRON
iajs-9	21	15	affect	affect	VERB
iajs-9	21	16	the	the	DET
iajs-9	21	17	sputtering	sputtering	ADJ
iajs-9	21	18	process	process	NOUN
iajs-9	21	19	,	,	PUNCT
iajs-9	21	20	such	such	ADJ
iajs-9	21	21	as	as	ADP
iajs-9	21	22	kinetic	kinetic	ADJ
iajs-9	21	23	energy	energy	NOUN
iajs-9	21	24	of	of	ADP
iajs-9	21	25	bombarding	bombard	VERB
iajs-9	21	26	ions	ion	NOUN
iajs-9	21	27	and	and	CCONJ
iajs-9	21	28	incidence	incidence	NOUN
iajs-9	21	29	angle	angle	NOUN
iajs-9	21	30	.	.	PUNCT
iajs-9	22	1	in	in	ADP
iajs-9	22	2	this	this	DET
iajs-9	22	3	way	way	NOUN
iajs-9	22	4	,	,	PUNCT
iajs-9	22	5	we	we	PRON
iajs-9	22	6	can	can	AUX
iajs-9	22	7	explore	explore	VERB
iajs-9	22	8	how	how	SCONJ
iajs-9	22	9	the	the	DET
iajs-9	22	10	sputtering	sputtering	ADJ
iajs-9	22	11	yield	yield	NOUN
iajs-9	22	12	is	be	AUX
iajs-9	22	13	when	when	SCONJ
iajs-9	22	14	the	the	DET
iajs-9	22	15	target	target	NOUN
iajs-9	22	16	is	be	AUX
iajs-9	22	17	bombarded	bombard	VERB
iajs-9	22	18	by	by	ADP
iajs-9	22	19	its	its	PRON
iajs-9	22	20	own	own	ADJ
iajs-9	22	21	ions	ion	NOUN
iajs-9	22	22	.	.	PUNCT
iajs-9	23	1	theory	theory	NOUN
iajs-9	23	2	sputtering	sputtering	NOUN
iajs-9	23	3	yield	yield	NOUN
iajs-9	23	4	can	can	AUX
iajs-9	23	5	be	be	AUX
iajs-9	23	6	defined	define	VERB
iajs-9	23	7	as	as	ADP
iajs-9	23	8	the	the	DET
iajs-9	23	9	mean	mean	ADJ
iajs-9	23	10	number	number	NOUN
iajs-9	23	11	of	of	ADP
iajs-9	23	12	atoms	atom	NOUN
iajs-9	23	13	removed	remove	VERB
iajs-9	23	14	per	per	ADP
iajs-9	23	15	incident	incident	NOUN
iajs-9	23	16	particle	particle	NOUN
iajs-9	23	17	:	:	PUNCT
iajs-9	23	18	…	…	PUNCT
iajs-9	23	19	…	…	PUNCT
iajs-9	23	20	…	…	PUNCT
iajs-9	23	21	…	…	PUNCT
iajs-9	23	22	…	…	PUNCT
iajs-9	23	23	…	…	PUNCT
iajs-9	23	24	…	…	PUNCT
iajs-9	23	25	…	…	PUNCT
iajs-9	23	26	…	…	PUNCT
iajs-9	23	27	…	…	PUNCT
iajs-9	23	28	…	…	PUNCT
iajs-9	23	29	…	…	PUNCT
iajs-9	23	30	…	…	PUNCT
iajs-9	23	31	…	…	PUNCT
iajs-9	23	32	…	…	PUNCT
iajs-9	23	33	…	…	PUNCT
iajs-9	23	34	…	…	PUNCT
iajs-9	23	35	…	…	PUNCT
iajs-9	23	36	…	…	PUNCT
iajs-9	23	37	…	…	PUNCT
iajs-9	23	38	…	…	PUNCT
iajs-9	23	39	…	…	PUNCT
iajs-9	23	40	…	…	PUNCT
iajs-9	23	41	…	…	PUNCT
iajs-9	23	42	..	..	PUNCT
iajs-9	23	43	(	(	PUNCT
iajs-9	23	44	1	1	X
iajs-9	23	45	)	)	PUNCT
iajs-9	23	46	the	the	DET
iajs-9	23	47	sputtering	sputtering	ADJ
iajs-9	23	48	threshold	threshold	NOUN
iajs-9	23	49	is	be	AUX
iajs-9	23	50	defined	define	VERB
iajs-9	23	51	as	as	ADP
iajs-9	23	52	the	the	DET
iajs-9	23	53	minimum	minimum	ADJ
iajs-9	23	54	kinetic	kinetic	ADJ
iajs-9	23	55	energy	energy	NOUN
iajs-9	23	56	of	of	ADP
iajs-9	23	57	the	the	DET
iajs-9	23	58	bombarding	bombarding	NOUN
iajs-9	23	59	particle	particle	NOUN
iajs-9	23	60	for	for	ADP
iajs-9	23	61	sputtering	sputter	VERB
iajs-9	23	62	to	to	PART
iajs-9	23	63	occur	occur	VERB
iajs-9	23	64	[	[	X
iajs-9	23	65	8].thus	8].thus	NUM
iajs-9	23	66	,	,	PUNCT
iajs-9	23	67	the	the	DET
iajs-9	23	68	bombarding	bombarding	NOUN
iajs-9	23	69	particle	particle	NOUN
iajs-9	23	70	must	must	AUX
iajs-9	23	71	have	have	AUX
iajs-9	23	72	a	a	DET
iajs-9	23	73	kinetic	kinetic	ADJ
iajs-9	23	74	energy	energy	NOUN
iajs-9	23	75	above	above	ADP
iajs-9	23	76	.the	.the	DET
iajs-9	23	77	sputtering	sputtering	ADJ
iajs-9	23	78	yield	yield	NOUN
iajs-9	23	79	depends	depend	VERB
iajs-9	23	80	on	on	ADP
iajs-9	23	81	the	the	DET
iajs-9	23	82	properties	property	NOUN
iajs-9	23	83	of	of	ADP
iajs-9	23	84	both	both	DET
iajs-9	23	85	the	the	DET
iajs-9	23	86	incident	incident	NOUN
iajs-9	23	87	particle	particle	NOUN
iajs-9	23	88	(	(	PUNCT
iajs-9	23	89	energy	energy	NOUN
iajs-9	23	90	,	,	PUNCT
iajs-9	23	91	mass	mass	ADJ
iajs-9	23	92	and	and	CCONJ
iajs-9	23	93	incidence	incidence	NOUN
iajs-9	23	94	angle	angle	NOUN
iajs-9	23	95	)	)	PUNCT
iajs-9	23	96	and	and	CCONJ
iajs-9	23	97	the	the	DET
iajs-9	23	98	target(atomic	target(atomic	PROPN
iajs-9	23	99	mass	mass	PROPN
iajs-9	23	100	,	,	PUNCT
iajs-9	23	101	surface	surface	NOUN
iajs-9	23	102	binding	bind	VERB
iajs-9	23	103	energy	energy	NOUN
iajs-9	23	104	,	,	PUNCT
iajs-9	23	105	surface	surface	NOUN
iajs-9	23	106	etexture	etexture	NOUN
iajs-9	23	107	and	and	CCONJ
iajs-9	23	108	crystal	crystal	NOUN
iajs-9	23	109	orientation	orientation	NOUN
iajs-9	23	110	)	)	PUNCT
iajs-9	24	1	[	[	X
iajs-9	24	2	9].the	9].the	DET
iajs-9	24	3	sputtering	sputtering	ADJ
iajs-9	24	4	yield	yield	NOUN
iajs-9	24	5	can	can	AUX
iajs-9	24	6	be	be	AUX
iajs-9	24	7	expressed	express	VERB
iajs-9	24	8	as	as	ADP
iajs-9	24	9	in	in	ADP
iajs-9	24	10	the	the	DET
iajs-9	24	11	following	follow	VERB
iajs-9	24	12	expression	expression	NOUN
iajs-9	24	13	[	[	X
iajs-9	24	14	10	10	NUM
iajs-9	24	15	]	]	PUNCT
iajs-9	24	16	.	.	PUNCT
iajs-9	25	1	…	…	PUNCT
iajs-9	25	2	…	…	PUNCT
iajs-9	25	3	…	…	PUNCT
iajs-9	25	4	…	…	PUNCT
iajs-9	25	5	…	…	PUNCT
iajs-9	25	6	…	…	PUNCT
iajs-9	25	7	…	…	PUNCT
iajs-9	25	8	…	…	PUNCT
iajs-9	25	9	…	…	PUNCT
iajs-9	25	10	…	…	PUNCT
iajs-9	25	11	…	…	PUNCT
iajs-9	25	12	…	…	PUNCT
iajs-9	25	13	…	…	PUNCT
iajs-9	25	14	…	…	PUNCT
iajs-9	25	15	…	…	PUNCT
iajs-9	25	16	…	…	PUNCT
iajs-9	25	17	…	…	PUNCT
iajs-9	25	18	…	…	PUNCT
iajs-9	25	19	…	…	PUNCT
iajs-9	25	20	…	…	PUNCT
iajs-9	25	21	…	…	PUNCT
iajs-9	25	22	.(2	.(2	NOUN
iajs-9	25	23	)	)	PUNCT
iajs-9	25	24	where	where	SCONJ
iajs-9	25	25	is	be	AUX
iajs-9	25	26	a	a	DET
iajs-9	25	27	factor	factor	NOUN
iajs-9	25	28	associated	associate	VERB
iajs-9	25	29	with	with	ADP
iajs-9	25	30	target	target	NOUN
iajs-9	25	31	material	material	NOUN
iajs-9	25	32	,	,	PUNCT
iajs-9	25	33	and	and	CCONJ
iajs-9	25	34	have	have	VERB
iajs-9	25	35	expression	expression	NOUN
iajs-9	25	36	used	use	VERB
iajs-9	25	37	in	in	ADP
iajs-9	25	38	numerical	numerical	ADJ
iajs-9	25	39	calculations	calculation	NOUN
iajs-9	25	40	given	give	VERB
iajs-9	25	41	as	as	ADP
iajs-9	25	42	[	[	X
iajs-9	25	43	10	10	NUM
iajs-9	25	44	]	]	PUNCT
iajs-9	25	45	.	.	PUNCT
iajs-9	26	1	…	…	PUNCT
iajs-9	26	2	…	…	PUNCT
iajs-9	26	3	…	…	PUNCT
iajs-9	26	4	…	…	PUNCT
iajs-9	26	5	…	…	PUNCT
iajs-9	26	6	…	…	PUNCT
iajs-9	26	7	…	…	PUNCT
iajs-9	26	8	…	…	PUNCT
iajs-9	26	9	…	…	PUNCT
iajs-9	26	10	…	…	PUNCT
iajs-9	26	11	…	…	PUNCT
iajs-9	26	12	…	…	PUNCT
iajs-9	26	13	…	…	PUNCT
iajs-9	26	14	…	…	PUNCT
iajs-9	26	15	…	…	PUNCT
iajs-9	26	16	…	…	PUNCT
iajs-9	26	17	…	…	PUNCT
iajs-9	26	18	…	…	PUNCT
iajs-9	26	19	…	…	PUNCT
iajs-9	26	20	…	…	PUNCT
iajs-9	26	21	…	…	PUNCT
iajs-9	26	22	..	..	PUNCT
iajs-9	26	23	(	(	PUNCT
iajs-9	26	24	3	3	X
iajs-9	26	25	)	)	PUNCT
iajs-9	26	26	in	in	ADP
iajs-9	26	27	which	which	PRON
iajs-9	26	28	is	be	AUX
iajs-9	26	29	a	a	DET
iajs-9	26	30	correction	correction	NOUN
iajs-9	26	31	factor	factor	NOUN
iajs-9	26	32	,	,	PUNCT
iajs-9	26	33	which	which	PRON
iajs-9	26	34	is	be	AUX
iajs-9	26	35	a	a	DET
iajs-9	26	36	function	function	NOUN
iajs-9	26	37	of	of	ADP
iajs-9	26	38	the	the	DET
iajs-9	26	39	mass	mass	NOUN
iajs-9	26	40	ratio	ratio	NOUN
iajs-9	26	41	between	between	ADP
iajs-9	26	42	bombarding	bombard	VERB
iajs-9	26	43	target	target	NOUN
iajs-9	26	44	mass	mass	NOUN
iajs-9	26	45	to	to	ADP
iajs-9	26	46	the	the	DET
iajs-9	26	47	mass	mass	NOUN
iajs-9	26	48	of	of	ADP
iajs-9	26	49	the	the	DET
iajs-9	26	50	particle	particle	NOUN
iajs-9	26	51	projectile	projectile	NOUN
iajs-9	26	52	⁄	⁄	PROPN
iajs-9	26	53	,	,	PUNCT
iajs-9	26	54	is	be	AUX
iajs-9	26	55	atomic	atomic	ADJ
iajs-9	26	56	density	density	NOUN
iajs-9	26	57	of	of	ADP
iajs-9	26	58	the	the	DET
iajs-9	26	59	target	target	NOUN
iajs-9	26	60	,	,	PUNCT
iajs-9	26	61	is	be	AUX
iajs-9	26	62	initial	initial	ADJ
iajs-9	26	63	angle	angle	NOUN
iajs-9	26	64	of	of	ADP
iajs-9	26	65	incidence	incidence	NOUN
iajs-9	26	66	,	,	PUNCT
iajs-9	26	67	and	and	CCONJ
iajs-9	26	68	is	be	AUX
iajs-9	26	69	a	a	DET
iajs-9	26	70	nuclear	nuclear	ADJ
iajs-9	26	71	stopping	stopping	NOUN
iajs-9	26	72	cross	cross	NOUN
iajs-9	26	73	–	–	PUNCT
iajs-9	26	74	section.the	section.the	DET
iajs-9	26	75	latter	latter	ADV
iajs-9	26	76	is	be	AUX
iajs-9	26	77	given	give	VERB
iajs-9	26	78	by	by	ADP
iajs-9	26	79	[	[	PUNCT
iajs-9	26	80	11	11	NUM
iajs-9	26	81	]	]	NUM
iajs-9	26	82	:	:	PUNCT
iajs-9	26	83	(	(	PUNCT
iajs-9	26	84	)	)	PUNCT
iajs-9	26	85	(	(	PUNCT
iajs-9	26	86	)	)	PUNCT
iajs-9	26	87	…	…	PUNCT
iajs-9	26	88	…	…	PUNCT
iajs-9	26	89	…	…	PUNCT
iajs-9	26	90	…	…	PUNCT
iajs-9	26	91	…	…	PUNCT
iajs-9	26	92	…	…	PUNCT
iajs-9	26	93	…	…	PUNCT
iajs-9	26	94	…	…	PUNCT
iajs-9	26	95	…	…	PUNCT
iajs-9	26	96	…	…	PUNCT
iajs-9	26	97	…	…	PUNCT
iajs-9	26	98	.(4	.(4	NOUN
iajs-9	26	99	)	)	PUNCT
iajs-9	26	100	where	where	SCONJ
iajs-9	26	101	,	,	PUNCT
iajs-9	26	102	are	be	AUX
iajs-9	26	103	the	the	DET
iajs-9	26	104	atomic	atomic	ADJ
iajs-9	26	105	numbers	number	NOUN
iajs-9	26	106	for	for	ADP
iajs-9	26	107	each	each	PRON
iajs-9	26	108	of	of	ADP
iajs-9	26	109	the	the	DET
iajs-9	26	110	incident	incident	NOUN
iajs-9	26	111	particle	particle	NOUN
iajs-9	26	112	and	and	CCONJ
iajs-9	26	113	material	material	NOUN
iajs-9	26	114	target	target	NOUN
iajs-9	26	115	bombard	bombard	NOUN
iajs-9	26	116	respectively	respectively	ADV
iajs-9	26	117	,	,	PUNCT
iajs-9	26	118	and	and	CCONJ
iajs-9	26	119	is	be	AUX
iajs-9	26	120	the	the	DET
iajs-9	26	121	limit	limit	NOUN
iajs-9	26	122	of	of	ADP
iajs-9	26	123	the	the	DET
iajs-9	26	124	decline	decline	NOUN
iajs-9	26	125	in	in	ADP
iajs-9	26	126	the	the	DET
iajs-9	26	127	nuclear	nuclear	PROPN
iajs-9	26	128	cross	cross	PROPN
iajs-9	26	129	section	section	NOUN
iajs-9	26	130	and	and	CCONJ
iajs-9	26	131	it	it	PRON
iajs-9	26	132	is	be	AUX
iajs-9	26	133	expressed	express	VERB
iajs-9	26	134	by	by	ADP
iajs-9	26	135	[	[	X
iajs-9	26	136	10	10	NUM
iajs-9	26	137	]	]	PUNCT
iajs-9	26	138	.	.	PUNCT
iajs-9	27	1	…	…	PUNCT
iajs-9	27	2	…	…	PUNCT
iajs-9	27	3	…	…	PUNCT
iajs-9	27	4	…	…	PUNCT
iajs-9	27	5	…	…	PUNCT
iajs-9	27	6	…	…	PUNCT
iajs-9	27	7	…	…	PUNCT
iajs-9	27	8	…	…	PUNCT
iajs-9	27	9	…	…	PUNCT
iajs-9	27	10	…	…	PUNCT
iajs-9	27	11	…	…	PUNCT
iajs-9	27	12	…	…	PUNCT
iajs-9	27	13	…	…	PUNCT
iajs-9	27	14	…	…	PUNCT
iajs-9	27	15	…	…	PUNCT
iajs-9	27	16	…	…	PUNCT
iajs-9	27	17	…	…	PUNCT
iajs-9	27	18	…	…	PUNCT
iajs-9	27	19	…	…	PUNCT
iajs-9	27	20	(	(	PUNCT
iajs-9	27	21	5	5	NUM
iajs-9	27	22	)	)	PUNCT
iajs-9	27	23	where	where	SCONJ
iajs-9	27	24	is	be	AUX
iajs-9	27	25	the	the	DET
iajs-9	27	26	reduced	reduce	VERB
iajs-9	27	27	energy	energy	NOUN
iajs-9	27	28	which	which	PRON
iajs-9	27	29	is	be	AUX
iajs-9	27	30	given	give	VERB
iajs-9	27	31	by	by	ADP
iajs-9	27	32	equation	equation	NOUN
iajs-9	27	33	[	[	X
iajs-9	27	34	10	10	NUM
iajs-9	27	35	]	]	X
iajs-9	27	36	physics	physics	NOUN
iajs-9	27	37	|	|	ADV
iajs-9	27	38	28	28	NUM
iajs-9	27	39	2016	2016	NUM
iajs-9	27	40	(	(	PUNCT
iajs-9	27	41	عاو	عاو	NOUN
iajs-9	27	42	3)انعذد	3)انعذد	NUM
iajs-9	27	43	22انًجهذ	22انًجهذ	NUM
iajs-9	27	44	يجهت	يجهت	NOUN
iajs-9	27	45	إبٍ	إبٍ	VERB
iajs-9	27	46	انهٍثى	انهٍثى	PROPN
iajs-9	27	47	نهعهىو	نهعهىو	PROPN
iajs-9	28	1	انصشفت	انصشفت	NOUN
iajs-9	28	2	و	و	PRON
iajs-9	28	3	انتطبٍقٍت	انتطبٍقٍت	PROPN
iajs-9	28	4	ibn	ibn	PROPN
iajs-9	28	5	al	al	PROPN
iajs-9	28	6	-	-	PUNCT
iajs-9	28	7	haitham	haitham	PROPN
iajs-9	28	8	j.	j.	PROPN
iajs-9	28	9	for	for	ADP
iajs-9	28	10	pure	pure	PROPN
iajs-9	28	11	&	&	CCONJ
iajs-9	28	12	appl	appl	PROPN
iajs-9	28	13	.	.	PUNCT
iajs-9	29	1	sci	sci	PROPN
iajs-9	29	2	.	.	PUNCT
iajs-9	30	1	vol.29	vol.29	PROPN
iajs-9	30	2	(	(	PUNCT
iajs-9	30	3	3	3	NUM
iajs-9	30	4	)	)	PUNCT
iajs-9	30	5	2016	2016	NUM
iajs-9	30	6	(	(	PUNCT
iajs-9	30	7	)	)	PUNCT
iajs-9	30	8	…	…	PUNCT
iajs-9	30	9	…	…	PUNCT
iajs-9	30	10	…	…	PUNCT
iajs-9	30	11	…	…	PUNCT
iajs-9	30	12	…	…	PUNCT
iajs-9	30	13	…	…	PUNCT
iajs-9	30	14	…	…	PUNCT
iajs-9	30	15	…	…	PUNCT
iajs-9	30	16	…	…	PUNCT
iajs-9	30	17	…	…	PUNCT
iajs-9	30	18	…	…	PUNCT
iajs-9	30	19	…	…	PUNCT
iajs-9	30	20	…	…	PUNCT
iajs-9	30	21	…	…	PUNCT
iajs-9	30	22	…	…	PUNCT
iajs-9	30	23	…	…	PUNCT
iajs-9	30	24	…	…	PUNCT
iajs-9	30	25	…	…	PUNCT
iajs-9	30	26	…	…	PUNCT
iajs-9	30	27	…	…	PUNCT
iajs-9	30	28	…	…	PUNCT
iajs-9	30	29	…	…	SYM
iajs-9	30	30	.(6	.(6	NOUN
iajs-9	30	31	)	)	PUNCT
iajs-9	30	32	results	result	NOUN
iajs-9	30	33	and	and	CCONJ
iajs-9	30	34	discussion	discussion	NOUN
iajs-9	30	35	1	1	NUM
iajs-9	30	36	.	.	PUNCT
iajs-9	30	37	effect	effect	NOUN
iajs-9	30	38	of	of	ADP
iajs-9	30	39	increasing	increase	VERB
iajs-9	30	40	incident	incident	NOUN
iajs-9	30	41	ion	ion	NOUN
iajs-9	30	42	angle	angle	NOUN
iajs-9	30	43	on	on	ADP
iajs-9	30	44	the	the	DET
iajs-9	30	45	sputtering	sputtering	ADJ
iajs-9	30	46	yield	yield	NOUN
iajs-9	30	47	figures	figure	NOUN
iajs-9	30	48	(	(	PUNCT
iajs-9	30	49	1	1	NUM
iajs-9	30	50	–	–	SYM
iajs-9	30	51	3	3	NUM
iajs-9	30	52	)	)	PUNCT
iajs-9	30	53	show	show	VERB
iajs-9	30	54	the	the	DET
iajs-9	30	55	sputtering	sputter	VERB
iajs-9	30	56	yield	yield	NOUN
iajs-9	30	57	as	as	ADP
iajs-9	30	58	a	a	DET
iajs-9	30	59	function	function	NOUN
iajs-9	30	60	of	of	ADP
iajs-9	30	61	ion	ion	NOUN
iajs-9	30	62	incidence	incidence	NOUN
iajs-9	30	63	angle	angle	NOUN
iajs-9	30	64	for	for	ADP
iajs-9	30	65	litarget	litarget	NOUN
iajs-9	30	66	bombarded	bombard	VERB
iajs-9	30	67	by	by	ADP
iajs-9	30	68	,	,	PUNCT
iajs-9	30	69	na	na	PART
iajs-9	30	70	target	target	NOUN
iajs-9	30	71	bombarded	bombard	VERB
iajs-9	30	72	by	by	ADP
iajs-9	30	73	and	and	CCONJ
iajs-9	30	74	kr	kr	PROPN
iajs-9	30	75	target	target	NOUN
iajs-9	30	76	bombarded	bombard	VERB
iajs-9	30	77	by	by	ADP
iajs-9	30	78	at	at	ADP
iajs-9	30	79	fixed	fix	VERB
iajs-9	30	80	ion	ion	NOUN
iajs-9	30	81	energy	energy	NOUN
iajs-9	30	82	of	of	ADP
iajs-9	30	83	and	and	CCONJ
iajs-9	30	84	with	with	ADP
iajs-9	30	85	constant	constant	ADJ
iajs-9	30	86	ion	ion	NOUN
iajs-9	30	87	number	number	NOUN
iajs-9	30	88	of	of	ADP
iajs-9	30	89	.in	.in	PUNCT
iajs-9	30	90	all	all	DET
iajs-9	30	91	figures	figure	NOUN
iajs-9	30	92	mentioned	mention	VERB
iajs-9	30	93	the	the	DET
iajs-9	30	94	sputtering	sputter	VERB
iajs-9	30	95	yield	yield	NOUN
iajs-9	30	96	has	have	VERB
iajs-9	30	97	a	a	DET
iajs-9	30	98	slight	slight	ADJ
iajs-9	30	99	increase	increase	NOUN
iajs-9	30	100	from	from	ADP
iajs-9	30	101	the	the	DET
iajs-9	30	102	incident	incident	NOUN
iajs-9	30	103	angle	angle	NOUN
iajs-9	30	104	of	of	ADP
iajs-9	30	105	(	(	PUNCT
iajs-9	30	106	)	)	PUNCT
iajs-9	30	107	,	,	PUNCT
iajs-9	30	108	and	and	CCONJ
iajs-9	30	109	then	then	ADV
iajs-9	30	110	a	a	DET
iajs-9	30	111	significant	significant	ADJ
iajs-9	30	112	increase	increase	NOUN
iajs-9	30	113	between	between	ADP
iajs-9	30	114	(	(	PUNCT
iajs-9	30	115	)	)	PUNCT
iajs-9	30	116	of	of	ADP
iajs-9	30	117	incident	incident	NOUN
iajs-9	30	118	angle	angle	NOUN
iajs-9	30	119	until	until	SCONJ
iajs-9	30	120	finally	finally	ADV
iajs-9	30	121	decreases	decrease	VERB
iajs-9	30	122	rapidly	rapidly	ADV
iajs-9	30	123	at	at	ADP
iajs-9	30	124	larger	large	ADJ
iajs-9	30	125	angles.the	angles.the	DET
iajs-9	30	126	reason	reason	NOUN
iajs-9	30	127	for	for	ADP
iajs-9	30	128	the	the	DET
iajs-9	30	129	increase	increase	NOUN
iajs-9	30	130	of	of	ADP
iajs-9	30	131	the	the	DET
iajs-9	30	132	sputtering	sputter	VERB
iajs-9	30	133	yield	yield	NOUN
iajs-9	30	134	is	be	AUX
iajs-9	30	135	that	that	SCONJ
iajs-9	30	136	the	the	DET
iajs-9	30	137	deposited	deposit	VERB
iajs-9	30	138	energy	energy	NOUN
iajs-9	30	139	distribution	distribution	NOUN
iajs-9	30	140	is	be	AUX
iajs-9	30	141	shifted	shift	VERB
iajs-9	30	142	closer	close	ADV
iajs-9	30	143	to	to	ADP
iajs-9	30	144	the	the	DET
iajs-9	30	145	surface	surface	NOUN
iajs-9	30	146	.	.	PUNCT
iajs-9	31	1	on	on	ADP
iajs-9	31	2	the	the	DET
iajs-9	31	3	other	other	ADJ
iajs-9	31	4	hand	hand	NOUN
iajs-9	31	5	,	,	PUNCT
iajs-9	31	6	the	the	DET
iajs-9	31	7	drop	drop	NOUN
iajs-9	31	8	–	–	PUNCT
iajs-9	31	9	off	off	ADP
iajs-9	31	10	of	of	ADP
iajs-9	31	11	the	the	DET
iajs-9	31	12	sputtering	sputtering	ADJ
iajs-9	31	13	yield	yield	NOUN
iajs-9	31	14	at	at	ADP
iajs-9	31	15	higher	high	ADJ
iajs-9	31	16	angles	angle	NOUN
iajs-9	31	17	is	be	AUX
iajs-9	31	18	thought	think	VERB
iajs-9	31	19	to	to	PART
iajs-9	31	20	be	be	AUX
iajs-9	31	21	caused	cause	VERB
iajs-9	31	22	by	by	ADP
iajs-9	31	23	the	the	DET
iajs-9	31	24	increase	increase	NOUN
iajs-9	31	25	of	of	ADP
iajs-9	31	26	ion	ion	NOUN
iajs-9	31	27	reflection	reflection	NOUN
iajs-9	31	28	from	from	ADP
iajs-9	31	29	the	the	DET
iajs-9	31	30	target	target	NOUN
iajs-9	31	31	surface	surface	NOUN
iajs-9	31	32	.	.	PUNCT
iajs-9	32	1	this	this	DET
iajs-9	32	2	behavior	behavior	NOUN
iajs-9	32	3	is	be	AUX
iajs-9	32	4	common	common	ADJ
iajs-9	32	5	and	and	CCONJ
iajs-9	32	6	similar	similar	ADJ
iajs-9	32	7	to	to	ADP
iajs-9	32	8	most	most	ADJ
iajs-9	32	9	of	of	ADP
iajs-9	32	10	elements	element	NOUN
iajs-9	32	11	and	and	CCONJ
iajs-9	32	12	alloys	alloy	NOUN
iajs-9	32	13	target	target	VERB
iajs-9	32	14	that	that	PRON
iajs-9	32	15	are	be	AUX
iajs-9	32	16	bombarded	bombard	VERB
iajs-9	32	17	by	by	ADP
iajs-9	32	18	various	various	ADJ
iajs-9	32	19	ions	ion	NOUN
iajs-9	32	20	.	.	PUNCT
iajs-9	33	1	the	the	DET
iajs-9	33	2	difference	difference	NOUN
iajs-9	33	3	is	be	AUX
iajs-9	33	4	in	in	ADP
iajs-9	33	5	the	the	DET
iajs-9	33	6	sputtering	sputtering	ADJ
iajs-9	33	7	yield	yield	NOUN
iajs-9	33	8	values	value	NOUN
iajs-9	33	9	at	at	ADP
iajs-9	33	10	different	different	ADJ
iajs-9	33	11	angles	angle	NOUN
iajs-9	33	12	of	of	ADP
iajs-9	33	13	incident	incident	NOUN
iajs-9	33	14	as	as	ADV
iajs-9	33	15	well	well	ADV
iajs-9	33	16	as	as	ADP
iajs-9	33	17	in	in	ADP
iajs-9	33	18	the	the	DET
iajs-9	33	19	angle	angle	NOUN
iajs-9	33	20	which	which	PRON
iajs-9	33	21	provides	provide	VERB
iajs-9	33	22	the	the	DET
iajs-9	33	23	maximum	maximum	NOUN
iajs-9	33	24	of	of	ADP
iajs-9	33	25	sputtering	sputtering	ADJ
iajs-9	33	26	yield	yield	NOUN
iajs-9	33	27	.for	.for	PUNCT
iajs-9	33	28	the	the	DET
iajs-9	33	29	sputtering	sputter	VERB
iajs-9	33	30	yield	yield	NOUN
iajs-9	33	31	of	of	ADP
iajs-9	33	32	the	the	DET
iajs-9	33	33	elements	element	NOUN
iajs-9	33	34	used	use	VERB
iajs-9	33	35	,	,	PUNCT
iajs-9	33	36	it	it	PRON
iajs-9	33	37	is	be	AUX
iajs-9	33	38	clear	clear	ADJ
iajs-9	33	39	that	that	SCONJ
iajs-9	33	40	light	light	ADJ
iajs-9	33	41	lithium	lithium	NOUN
iajs-9	33	42	has	have	VERB
iajs-9	33	43	a	a	DET
iajs-9	33	44	higher	high	ADJ
iajs-9	33	45	sputtering	sputtering	ADJ
iajs-9	33	46	yield	yield	NOUN
iajs-9	33	47	than	than	ADP
iajs-9	33	48	krypton	krypton	NOUN
iajs-9	33	49	and	and	CCONJ
iajs-9	33	50	sodium	sodium	NOUN
iajs-9	33	51	respectively	respectively	ADV
iajs-9	33	52	.	.	PUNCT
iajs-9	34	1	obviously	obviously	ADV
iajs-9	34	2	,	,	PUNCT
iajs-9	34	3	from	from	ADP
iajs-9	34	4	figures	figure	NOUN
iajs-9	34	5	(	(	PUNCT
iajs-9	34	6	1	1	NUM
iajs-9	34	7	–	–	SYM
iajs-9	34	8	3	3	NUM
iajs-9	34	9	)	)	PUNCT
iajs-9	34	10	the	the	DET
iajs-9	34	11	peak	peak	NOUN
iajs-9	34	12	of	of	ADP
iajs-9	34	13	sputtering	sputtering	ADJ
iajs-9	34	14	yield	yield	NOUN
iajs-9	34	15	of	of	ADP
iajs-9	34	16	krypton	krypton	PROPN
iajs-9	34	17	is	be	AUX
iajs-9	34	18	located	locate	VERB
iajs-9	34	19	at	at	ADP
iajs-9	34	20	lower	low	ADJ
iajs-9	34	21	angle	angle	NOUN
iajs-9	34	22	than	than	ADP
iajs-9	34	23	the	the	DET
iajs-9	34	24	other	other	ADJ
iajs-9	34	25	elements	element	NOUN
iajs-9	34	26	.	.	PUNCT
iajs-9	35	1	generally	generally	ADV
iajs-9	35	2	,	,	PUNCT
iajs-9	35	3	the	the	DET
iajs-9	35	4	degree	degree	NOUN
iajs-9	35	5	of	of	ADP
iajs-9	35	6	effect	effect	NOUN
iajs-9	35	7	of	of	ADP
iajs-9	35	8	the	the	DET
iajs-9	35	9	bombarding	bombard	VERB
iajs-9	35	10	angle	angle	NOUN
iajs-9	35	11	on	on	ADP
iajs-9	35	12	the	the	DET
iajs-9	35	13	sputtering	sputter	VERB
iajs-9	35	14	yields	yield	NOUN
iajs-9	35	15	depends	depend	VERB
iajs-9	35	16	on	on	ADP
iajs-9	35	17	the	the	DET
iajs-9	35	18	target	target	NOUN
iajs-9	35	19	used	use	VERB
iajs-9	35	20	.	.	PUNCT
iajs-9	36	1	since	since	SCONJ
iajs-9	36	2	the	the	DET
iajs-9	36	3	calculations	calculation	NOUN
iajs-9	36	4	are	be	AUX
iajs-9	36	5	distinct	distinct	ADJ
iajs-9	36	6	and	and	CCONJ
iajs-9	36	7	singular	singular	ADJ
iajs-9	36	8	for	for	ADP
iajs-9	36	9	each	each	DET
iajs-9	36	10	individual	individual	ADJ
iajs-9	36	11	angle	angle	NOUN
iajs-9	36	12	,	,	PUNCT
iajs-9	36	13	the	the	DET
iajs-9	36	14	fitting	fitting	ADJ
iajs-9	36	15	process	process	NOUN
iajs-9	36	16	has	have	VERB
iajs-9	36	17	to	to	PART
iajs-9	36	18	be	be	AUX
iajs-9	36	19	working	work	VERB
iajs-9	36	20	to	to	PART
iajs-9	36	21	provide	provide	VERB
iajs-9	36	22	equation	equation	NOUN
iajs-9	36	23	that	that	PRON
iajs-9	36	24	describes	describe	VERB
iajs-9	36	25	the	the	DET
iajs-9	36	26	behavior	behavior	NOUN
iajs-9	36	27	.	.	PUNCT
iajs-9	37	1	of	of	ADP
iajs-9	37	2	course	course	NOUN
iajs-9	37	3	,	,	PUNCT
iajs-9	37	4	the	the	DET
iajs-9	37	5	suggested	suggest	VERB
iajs-9	37	6	fitting	fitting	NOUN
iajs-9	37	7	would	would	AUX
iajs-9	37	8	result	result	VERB
iajs-9	37	9	in	in	ADP
iajs-9	37	10	different	different	ADJ
iajs-9	37	11	coefficients	coefficient	NOUN
iajs-9	37	12	for	for	ADP
iajs-9	37	13	each	each	DET
iajs-9	37	14	element	element	NOUN
iajs-9	37	15	under	under	ADP
iajs-9	37	16	consideration	consideration	NOUN
iajs-9	37	17	.	.	PUNCT
iajs-9	38	1	we	we	PRON
iajs-9	38	2	use	use	VERB
iajs-9	38	3	two	two	NUM
iajs-9	38	4	types	type	NOUN
iajs-9	38	5	of	of	ADP
iajs-9	38	6	best	good	ADJ
iajs-9	38	7	–	–	PUNCT
iajs-9	38	8	fit	fit	ADJ
iajs-9	38	9	function	function	NOUN
iajs-9	38	10	to	to	PART
iajs-9	38	11	express	express	VERB
iajs-9	38	12	the	the	DET
iajs-9	38	13	sputtering	sputter	VERB
iajs-9	38	14	yield	yield	NOUN
iajs-9	38	15	data	datum	NOUN
iajs-9	38	16	for	for	ADP
iajs-9	38	17	comparison	comparison	NOUN
iajs-9	38	18	provided	provide	VERB
iajs-9	38	19	by	by	ADP
iajs-9	38	20	igor	igor	ADJ
iajs-9	38	21	pro	pro	X
iajs-9	38	22	program	program	NOUN
iajs-9	38	23	.	.	PUNCT
iajs-9	39	1	the	the	DET
iajs-9	39	2	first	first	ADJ
iajs-9	39	3	function	function	NOUN
iajs-9	39	4	is	be	AUX
iajs-9	39	5	a	a	DET
iajs-9	39	6	six	six	NUM
iajs-9	39	7	degree	degree	NOUN
iajs-9	39	8	polynomial	polynomial	ADJ
iajs-9	39	9	…	…	PUNCT
iajs-9	39	10	…	…	PUNCT
iajs-9	39	11	…	…	PUNCT
iajs-9	39	12	…	…	PUNCT
iajs-9	39	13	…	…	PUNCT
iajs-9	39	14	…	…	PUNCT
iajs-9	39	15	…	…	PUNCT
iajs-9	39	16	…	…	PUNCT
iajs-9	39	17	…	…	PUNCT
iajs-9	39	18	…	…	PUNCT
iajs-9	39	19	…	…	PUNCT
iajs-9	39	20	…	…	PUNCT
iajs-9	39	21	…	…	PUNCT
iajs-9	39	22	…	…	PUNCT
iajs-9	39	23	...	...	PUNCT
iajs-9	39	24	(	(	PUNCT
iajs-9	39	25	7	7	NUM
iajs-9	39	26	)	)	PUNCT
iajs-9	39	27	and	and	CCONJ
iajs-9	39	28	the	the	DET
iajs-9	39	29	second	second	ADJ
iajs-9	39	30	is	be	AUX
iajs-9	39	31	called	call	VERB
iajs-9	39	32	(	(	PUNCT
iajs-9	39	33	ior	ior	NOUN
iajs-9	39	34	)	)	PUNCT
iajs-9	39	35	function	function	NOUN
iajs-9	39	36	:	:	PUNCT
iajs-9	39	37	…	…	PUNCT
iajs-9	39	38	…	…	PUNCT
iajs-9	39	39	…	…	PUNCT
iajs-9	39	40	…	…	PUNCT
iajs-9	39	41	…	…	PUNCT
iajs-9	39	42	…	…	PUNCT
iajs-9	39	43	…	…	PUNCT
iajs-9	39	44	…	…	PUNCT
iajs-9	39	45	…	…	PUNCT
iajs-9	39	46	…	…	PUNCT
iajs-9	39	47	…	…	PUNCT
iajs-9	39	48	…	…	PUNCT
iajs-9	39	49	…	…	PUNCT
iajs-9	39	50	…	…	PUNCT
iajs-9	39	51	…	…	PUNCT
iajs-9	39	52	…	…	PUNCT
iajs-9	39	53	…	…	PUNCT
iajs-9	39	54	…	…	PUNCT
iajs-9	39	55	…	…	PUNCT
iajs-9	39	56	…	…	PUNCT
iajs-9	39	57	…	…	PUNCT
iajs-9	39	58	…	…	PUNCT
iajs-9	39	59	…	…	PUNCT
iajs-9	39	60	…	…	PUNCT
iajs-9	39	61	…	…	PUNCT
iajs-9	39	62	(	(	PUNCT
iajs-9	39	63	8)	8)	NUM
iajs-9	39	64	where	where	SCONJ
iajs-9	39	65	the	the	DET
iajs-9	39	66	coefficients	coefficient	NOUN
iajs-9	39	67	of	of	ADP
iajs-9	39	68	the	the	DET
iajs-9	39	69	best	good	ADJ
iajs-9	39	70	fit	fit	ADJ
iajs-9	39	71	values	value	NOUN
iajs-9	39	72	of	of	ADP
iajs-9	39	73	equation	equation	NOUN
iajs-9	39	74	(	(	PUNCT
iajs-9	39	75	7	7	X
iajs-9	39	76	)	)	PUNCT
iajs-9	39	77	which	which	PRON
iajs-9	39	78	are	be	AUX
iajs-9	39	79	given	give	VERB
iajs-9	39	80	in	in	ADP
iajs-9	39	81	table	table	NOUN
iajs-9	39	82	1	1	NUM
iajs-9	39	83	,	,	PUNCT
iajs-9	39	84	and	and	CCONJ
iajs-9	39	85	for	for	ADP
iajs-9	39	86	equation	equation	NOUN
iajs-9	39	87	(	(	PUNCT
iajs-9	39	88	8)	8)	NUM
iajs-9	39	89	in	in	ADP
iajs-9	39	90	table	table	NOUN
iajs-9	39	91	2	2	NUM
iajs-9	39	92	.	.	PUNCT
iajs-9	40	1	although	although	SCONJ
iajs-9	40	2	,	,	PUNCT
iajs-9	40	3	many	many	ADJ
iajs-9	40	4	researchers	researcher	NOUN
iajs-9	40	5	used	use	VERB
iajs-9	40	6	polynomials	polynomial	NOUN
iajs-9	40	7	function	function	VERB
iajs-9	40	8	for	for	ADP
iajs-9	40	9	fitting	fit	VERB
iajs-9	40	10	the	the	DET
iajs-9	40	11	sputtering	sputtering	ADJ
iajs-9	40	12	yield	yield	NOUN
iajs-9	40	13	vs.	vs.	ADP
iajs-9	40	14	angle	angle	NOUN
iajs-9	40	15	of	of	ADP
iajs-9	40	16	incident	incident	NOUN
iajs-9	40	17	ion	ion	NOUN
iajs-9	40	18	,	,	PUNCT
iajs-9	40	19	we	we	PRON
iajs-9	40	20	suggest	suggest	VERB
iajs-9	40	21	using	use	VERB
iajs-9	40	22	and	and	CCONJ
iajs-9	40	23	activating	activate	VERB
iajs-9	40	24	the	the	DET
iajs-9	40	25	other	other	ADJ
iajs-9	40	26	fitting	fit	VERB
iajs-9	40	27	given	give	VERB
iajs-9	40	28	by	by	ADP
iajs-9	40	29	ior	ior	PROPN
iajs-9	40	30	function	function	NOUN
iajs-9	40	31	due	due	ADP
iajs-9	40	32	to	to	ADP
iajs-9	40	33	the	the	DET
iajs-9	40	34	absence	absence	NOUN
iajs-9	40	35	of	of	ADP
iajs-9	40	36	fluctuations	fluctuation	NOUN
iajs-9	40	37	at	at	ADP
iajs-9	40	38	small	small	ADJ
iajs-9	40	39	angles	angle	NOUN
iajs-9	40	40	in	in	ADP
iajs-9	40	41	compassion	compassion	NOUN
iajs-9	40	42	to	to	ADP
iajs-9	40	43	the	the	DET
iajs-9	40	44	polynomial	polynomial	ADJ
iajs-9	40	45	functions	function	NOUN
iajs-9	40	46	.	.	PUNCT
iajs-9	41	1	2	2	X
iajs-9	41	2	.	.	X
iajs-9	41	3	effect	effect	NOUN
iajs-9	41	4	of	of	ADP
iajs-9	41	5	increasing	increase	VERB
iajs-9	41	6	ion	ion	NOUN
iajs-9	41	7	energy	energy	NOUN
iajs-9	41	8	on	on	ADP
iajs-9	41	9	the	the	DET
iajs-9	41	10	sputtering	sputtering	ADJ
iajs-9	41	11	yield	yield	NOUN
iajs-9	41	12	figures	figure	NOUN
iajs-9	41	13	(	(	PUNCT
iajs-9	41	14	4	4	NUM
iajs-9	41	15	–	–	SYM
iajs-9	41	16	6	6	NUM
iajs-9	41	17	)	)	PUNCT
iajs-9	41	18	show	show	VERB
iajs-9	41	19	the	the	DET
iajs-9	41	20	sputtering	sputter	VERB
iajs-9	41	21	yield	yield	NOUN
iajs-9	41	22	vs.	vs.	ADP
iajs-9	41	23	ion	ion	NOUN
iajs-9	41	24	energy	energy	NOUN
iajs-9	41	25	for	for	ADP
iajs-9	41	26	li	li	PROPN
iajs-9	41	27	,	,	PUNCT
iajs-9	41	28	na	na	NOUN
iajs-9	41	29	,	,	PUNCT
iajs-9	41	30	and	and	CCONJ
iajs-9	41	31	kr	kr	PROPN
iajs-9	41	32	at	at	ADP
iajs-9	41	33	direct	direct	ADJ
iajs-9	41	34	incident	incident	NOUN
iajs-9	41	35	of	of	ADP
iajs-9	41	36	ions	ion	NOUN
iajs-9	41	37	,	,	PUNCT
iajs-9	41	38	respectively	respectively	ADV
iajs-9	41	39	.	.	PUNCT
iajs-9	42	1	the	the	DET
iajs-9	42	2	sputtering	sputtering	ADJ
iajs-9	42	3	yield	yield	NOUN
iajs-9	42	4	increases	increase	NOUN
iajs-9	42	5	with	with	ADP
iajs-9	42	6	the	the	DET
iajs-9	42	7	increase	increase	NOUN
iajs-9	42	8	of	of	ADP
iajs-9	42	9	incident	incident	NOUN
iajs-9	42	10	ions	ion	NOUN
iajs-9	42	11	energy	energy	NOUN
iajs-9	42	12	until	until	SCONJ
iajs-9	42	13	it	it	PRON
iajs-9	42	14	reaches	reach	VERB
iajs-9	42	15	a	a	DET
iajs-9	42	16	maximum	maximum	ADJ
iajs-9	42	17	sputtering	sputtering	ADJ
iajs-9	42	18	yield	yield	NOUN
iajs-9	42	19	and	and	CCONJ
iajs-9	42	20	then	then	ADV
iajs-9	42	21	begins	begin	VERB
iajs-9	42	22	to	to	PART
iajs-9	42	23	decrease	decrease	VERB
iajs-9	42	24	at	at	ADP
iajs-9	42	25	higher	high	ADJ
iajs-9	42	26	ion	ion	NOUN
iajs-9	42	27	energy	energy	NOUN
iajs-9	42	28	.	.	PUNCT
iajs-9	43	1	the	the	DET
iajs-9	43	2	width	width	NOUN
iajs-9	43	3	of	of	ADP
iajs-9	43	4	the	the	DET
iajs-9	43	5	each	each	DET
iajs-9	43	6	target	target	NOUN
iajs-9	43	7	is	be	AUX
iajs-9	43	8	,	,	PUNCT
iajs-9	43	9	and	and	CCONJ
iajs-9	43	10	the	the	DET
iajs-9	43	11	ion	ion	NOUN
iajs-9	43	12	number	number	NOUN
iajs-9	43	13	used	use	VERB
iajs-9	43	14	for	for	ADP
iajs-9	43	15	these	these	DET
iajs-9	43	16	colocations	colocation	NOUN
iajs-9	43	17	is	be	AUX
iajs-9	43	18	.	.	PUNCT
iajs-9	44	1	this	this	DET
iajs-9	44	2	huge	huge	ADJ
iajs-9	44	3	of	of	ADP
iajs-9	44	4	ion	ion	NOUN
iajs-9	44	5	number	number	NOUN
iajs-9	44	6	will	will	AUX
iajs-9	44	7	interact	interact	VERB
iajs-9	44	8	per	per	ADP
iajs-9	44	9	second	second	NOUN
iajs-9	44	10	with	with	ADP
iajs-9	44	11	the	the	DET
iajs-9	44	12	target	target	NOUN
iajs-9	44	13	atoms	atom	NOUN
iajs-9	44	14	at	at	ADP
iajs-9	44	15	a	a	DET
iajs-9	44	16	direct	direct	ADJ
iajs-9	44	17	bombardment	bombardment	NOUN
iajs-9	44	18	and	and	CCONJ
iajs-9	44	19	will	will	AUX
iajs-9	44	20	stop	stop	VERB
iajs-9	44	21	at	at	ADP
iajs-9	44	22	certain	certain	ADJ
iajs-9	44	23	range	range	NOUN
iajs-9	44	24	of	of	ADP
iajs-9	44	25	the	the	DET
iajs-9	44	26	target	target	NOUN
iajs-9	44	27	.	.	PUNCT
iajs-9	45	1	the	the	DET
iajs-9	45	2	maximum	maximum	ADJ
iajs-9	45	3	energy	energy	NOUN
iajs-9	45	4	transferred	transfer	VERB
iajs-9	45	5	by	by	ADP
iajs-9	45	6	ions	ion	NOUN
iajs-9	45	7	to	to	ADP
iajs-9	45	8	the	the	DET
iajs-9	45	9	target	target	NOUN
iajs-9	45	10	occurs	occur	VERB
iajs-9	45	11	approximately	approximately	ADV
iajs-9	45	12	at	at	ADP
iajs-9	45	13	a	a	DET
iajs-9	45	14	half	half	ADJ
iajs-9	45	15	distance	distance	NOUN
iajs-9	45	16	of	of	ADP
iajs-9	45	17	the	the	DET
iajs-9	45	18	ion	ion	NOUN
iajs-9	45	19	range	range	NOUN
iajs-9	45	20	in	in	ADP
iajs-9	45	21	the	the	DET
iajs-9	45	22	target	target	NOUN
iajs-9	45	23	.	.	PUNCT
iajs-9	46	1	therefore	therefore	ADV
iajs-9	46	2	,	,	PUNCT
iajs-9	46	3	the	the	DET
iajs-9	46	4	collision	collision	NOUN
iajs-9	46	5	cascades	cascade	VERB
iajs-9	46	6	regions	region	NOUN
iajs-9	46	7	are	be	AUX
iajs-9	46	8	extended	extend	VERB
iajs-9	46	9	from	from	ADP
iajs-9	46	10	the	the	DET
iajs-9	46	11	surface	surface	NOUN
iajs-9	46	12	to	to	ADP
iajs-9	46	13	the	the	DET
iajs-9	46	14	distance	distance	NOUN
iajs-9	46	15	of	of	ADP
iajs-9	46	16	maximum	maximum	ADJ
iajs-9	46	17	energy	energy	NOUN
iajs-9	46	18	deposited	deposit	VERB
iajs-9	46	19	in	in	ADP
iajs-9	46	20	to	to	ADP
iajs-9	46	21	the	the	DET
iajs-9	46	22	target	target	NOUN
iajs-9	46	23	.	.	PUNCT
iajs-9	47	1	for	for	ADP
iajs-9	47	2	the	the	DET
iajs-9	47	3	same	same	ADJ
iajs-9	47	4	reason	reason	NOUN
iajs-9	47	5	mentioned	mention	VERB
iajs-9	47	6	above	above	ADV
iajs-9	47	7	,	,	PUNCT
iajs-9	47	8	we	we	PRON
iajs-9	47	9	work	work	VERB
iajs-9	47	10	the	the	DET
iajs-9	47	11	fitting	fitting	ADJ
iajs-9	47	12	process	process	NOUN
iajs-9	47	13	,	,	PUNCT
iajs-9	47	14	but	but	CCONJ
iajs-9	47	15	now	now	ADV
iajs-9	47	16	we	we	PRON
iajs-9	47	17	use	use	VERB
iajs-9	47	18	a	a	DET
iajs-9	47	19	ready	ready	ADJ
iajs-9	47	20	formula	formula	NOUN
iajs-9	47	21	proposed	propose	VERB
iajs-9	47	22	earlier	early	ADV
iajs-9	47	23	for	for	ADP
iajs-9	47	24	a	a	DET
iajs-9	47	25	particular	particular	ADJ
iajs-9	47	26	ion	ion	NOUN
iajs-9	47	27	–	–	PUNCT
iajs-9	47	28	target	target	NOUN
iajs-9	47	29	sputtering	sputtering	NOUN
iajs-9	47	30	[	[	PUNCT
iajs-9	47	31	11	11	NUM
iajs-9	47	32	]	]	NUM
iajs-9	47	33	:	:	PUNCT
iajs-9	47	34	(	(	PUNCT
iajs-9	47	35	)	)	PUNCT
iajs-9	47	36	(	(	PUNCT
iajs-9	47	37	)	)	PUNCT
iajs-9	47	38	…	…	PUNCT
iajs-9	47	39	…	…	PUNCT
iajs-9	47	40	…	…	PUNCT
iajs-9	47	41	…	…	PUNCT
iajs-9	47	42	…	…	PUNCT
iajs-9	47	43	…	…	PUNCT
iajs-9	47	44	…	…	PUNCT
iajs-9	47	45	…	…	PUNCT
iajs-9	47	46	…	…	PUNCT
iajs-9	47	47	…	…	PUNCT
iajs-9	47	48	…	…	PUNCT
iajs-9	47	49	…	…	PUNCT
iajs-9	47	50	…	…	PUNCT
iajs-9	47	51	…	…	PUNCT
iajs-9	47	52	…	…	PUNCT
iajs-9	47	53	…	…	PUNCT
iajs-9	47	54	…	…	PUNCT
iajs-9	47	55	..	..	PUNCT
iajs-9	47	56	(	(	PUNCT
iajs-9	47	57	9	9	X
iajs-9	47	58	)	)	PUNCT
iajs-9	47	59	physics	physics	NOUN
iajs-9	47	60	|	|	ADV
iajs-9	47	61	29	29	NUM
iajs-9	47	62	2016	2016	NUM
iajs-9	47	63	(	(	PUNCT
iajs-9	47	64	عاو	عاو	NOUN
iajs-9	47	65	3)انعذد	3)انعذد	NUM
iajs-9	47	66	22انًجهذ	22انًجهذ	NUM
iajs-9	47	67	يجهت	يجهت	NOUN
iajs-9	47	68	إبٍ	إبٍ	VERB
iajs-9	47	69	انهٍثى	انهٍثى	PROPN
iajs-9	47	70	نهعهىو	نهعهىو	PROPN
iajs-9	48	1	انصشفت	انصشفت	NOUN
iajs-9	48	2	و	و	PRON
iajs-9	48	3	انتطبٍقٍت	انتطبٍقٍت	PROPN
iajs-9	48	4	ibn	ibn	PROPN
iajs-9	48	5	al	al	PROPN
iajs-9	48	6	-	-	PUNCT
iajs-9	48	7	haitham	haitham	PROPN
iajs-9	48	8	j.	j.	PROPN
iajs-9	48	9	for	for	ADP
iajs-9	48	10	pure	pure	PROPN
iajs-9	48	11	&	&	CCONJ
iajs-9	48	12	appl	appl	PROPN
iajs-9	48	13	.	.	PUNCT
iajs-9	49	1	sci	sci	PROPN
iajs-9	49	2	.	.	PUNCT
iajs-9	50	1	vol.29	vol.29	PROPN
iajs-9	50	2	(	(	PUNCT
iajs-9	50	3	3	3	NUM
iajs-9	50	4	)	)	PUNCT
iajs-9	50	5	2016	2016	NUM
iajs-9	50	6	for	for	ADP
iajs-9	50	7	the	the	DET
iajs-9	50	8	presented	present	VERB
iajs-9	50	9	work	work	NOUN
iajs-9	50	10	the	the	DET
iajs-9	50	11	coefficients	coefficient	NOUN
iajs-9	50	12	of	of	ADP
iajs-9	50	13	,	,	PUNCT
iajs-9	50	14	,	,	PUNCT
iajs-9	50	15	,	,	PUNCT
iajs-9	50	16	and	and	CCONJ
iajs-9	50	17	which	which	PRON
iajs-9	50	18	give	give	VERB
iajs-9	50	19	the	the	DET
iajs-9	50	20	best	good	ADJ
iajs-9	50	21	fitting	fitting	NOUN
iajs-9	50	22	of	of	ADP
iajs-9	50	23	trim	trim	NOUN
iajs-9	50	24	are	be	AUX
iajs-9	50	25	tabulated	tabulate	VERB
iajs-9	50	26	in	in	ADP
iajs-9	50	27	table	table	NOUN
iajs-9	50	28	(	(	PUNCT
iajs-9	50	29	3).it	3).it	PRON
iajs-9	50	30	is	be	AUX
iajs-9	50	31	for	for	ADP
iajs-9	50	32	a	a	DET
iajs-9	50	33	specific	specific	ADJ
iajs-9	50	34	interaction	interaction	NOUN
iajs-9	50	35	between	between	ADP
iajs-9	50	36	certain	certain	ADJ
iajs-9	50	37	similarly	similarly	ADV
iajs-9	50	38	ion	ion	NOUN
iajs-9	50	39	/	/	SYM
iajs-9	50	40	target	target	NOUN
iajs-9	50	41	using	use	VERB
iajs-9	50	42	above	above	ADP
iajs-9	50	43	equation	equation	NOUN
iajs-9	50	44	and	and	CCONJ
iajs-9	50	45	it	it	PRON
iajs-9	50	46	is	be	AUX
iajs-9	50	47	new	new	ADJ
iajs-9	50	48	and	and	CCONJ
iajs-9	50	49	not	not	PART
iajs-9	50	50	mentioned	mention	VERB
iajs-9	50	51	before	before	ADV
iajs-9	50	52	.	.	PUNCT
iajs-9	51	1	3	3	X
iajs-9	51	2	.	.	X
iajs-9	51	3	the	the	DET
iajs-9	51	4	effect	effect	NOUN
iajs-9	51	5	of	of	ADP
iajs-9	51	6	the	the	DET
iajs-9	51	7	mass	mass	NOUN
iajs-9	51	8	of	of	ADP
iajs-9	51	9	both	both	DET
iajs-9	51	10	incident	incident	NOUN
iajs-9	51	11	ions	ion	NOUN
iajs-9	51	12	and	and	CCONJ
iajs-9	51	13	target	target	VERB
iajs-9	51	14	the	the	DET
iajs-9	51	15	calculations	calculation	NOUN
iajs-9	51	16	were	be	AUX
iajs-9	51	17	carried	carry	VERB
iajs-9	51	18	out	out	ADP
iajs-9	51	19	with	with	ADP
iajs-9	51	20	ion	ion	NOUN
iajs-9	51	21	number	number	NOUN
iajs-9	51	22	for	for	ADP
iajs-9	51	23	each	each	DET
iajs-9	51	24	ions	ion	NOUN
iajs-9	51	25	incident	incident	NOUN
iajs-9	51	26	on	on	ADP
iajs-9	51	27	the	the	DET
iajs-9	51	28	same	same	ADJ
iajs-9	51	29	width	width	ADJ
iajs-9	51	30	element	element	NOUN
iajs-9	51	31	targets	target	NOUN
iajs-9	51	32	of	of	ADP
iajs-9	51	33	.	.	PUNCT
iajs-9	52	1	the	the	DET
iajs-9	52	2	following	follow	VERB
iajs-9	52	3	table	table	NOUN
iajs-9	52	4	describes	describe	VERB
iajs-9	52	5	the	the	DET
iajs-9	52	6	properties	property	NOUN
iajs-9	52	7	of	of	ADP
iajs-9	52	8	ion	ion	NOUN
iajs-9	52	9	/	/	SYM
iajs-9	52	10	target	target	NOUN
iajs-9	52	11	used	use	VERB
iajs-9	52	12	in	in	ADP
iajs-9	52	13	the	the	DET
iajs-9	52	14	calculations	calculation	NOUN
iajs-9	52	15	.	.	PUNCT
iajs-9	53	1	ion	ion	NOUN
iajs-9	53	2	mass	mass	NOUN
iajs-9	53	3	target	target	NOUN
iajs-9	53	4	mass	mass	NOUN
iajs-9	53	5	target	target	NOUN
iajs-9	53	6	density	density	NOUN
iajs-9	53	7	lithium	lithium	NOUN
iajs-9	53	8	⁄	⁄	PROPN
iajs-9	53	9	sodium	sodium	NOUN
iajs-9	53	10	⁄	⁄	ADP
iajs-9	53	11	krypton	krypton	PROPN
iajs-9	53	12	⁄	⁄	PROPN
iajs-9	53	13	figure	figure	NOUN
iajs-9	53	14	(	(	PUNCT
iajs-9	53	15	7	7	X
iajs-9	53	16	)	)	PUNCT
iajs-9	53	17	shows	show	VERB
iajs-9	53	18	the	the	DET
iajs-9	53	19	angular	angular	ADJ
iajs-9	53	20	dependent	dependent	NOUN
iajs-9	53	21	of	of	ADP
iajs-9	53	22	sputtering	sputtering	ADJ
iajs-9	53	23	yield	yield	NOUN
iajs-9	53	24	for	for	ADP
iajs-9	53	25	mentioned	mention	VERB
iajs-9	53	26	ion	ion	NOUN
iajs-9	53	27	/	/	SYM
iajs-9	53	28	target.clearly	target.clearly	ADV
iajs-9	53	29	,	,	PUNCT
iajs-9	53	30	the	the	PRON
iajs-9	53	31	higher	high	ADJ
iajs-9	53	32	the	the	DET
iajs-9	53	33	sputtering	sputtering	ADJ
iajs-9	53	34	yield	yield	NOUN
iajs-9	53	35	takes	take	VERB
iajs-9	53	36	place	place	NOUN
iajs-9	53	37	for	for	ADP
iajs-9	53	38	li	li	PROPN
iajs-9	53	39	,	,	PUNCT
iajs-9	53	40	na	na	NOUN
iajs-9	53	41	and	and	CCONJ
iajs-9	53	42	kr	kr	PROPN
iajs-9	53	43	respectively	respectively	ADV
iajs-9	53	44	.	.	PUNCT
iajs-9	54	1	this	this	PRON
iajs-9	54	2	is	be	AUX
iajs-9	54	3	due	due	ADJ
iajs-9	54	4	to	to	ADP
iajs-9	54	5	the	the	DET
iajs-9	54	6	lower	low	ADJ
iajs-9	54	7	mass	mass	ADJ
iajs-9	54	8	and	and	CCONJ
iajs-9	54	9	atomic	atomic	ADJ
iajs-9	54	10	number	number	NOUN
iajs-9	54	11	of	of	ADP
iajs-9	54	12	the	the	DET
iajs-9	54	13	li	li	PROPN
iajs-9	54	14	in	in	ADP
iajs-9	54	15	comparison	comparison	NOUN
iajs-9	54	16	with	with	ADP
iajs-9	54	17	the	the	DET
iajs-9	54	18	other	other	ADJ
iajs-9	54	19	used	use	VERB
iajs-9	54	20	ions.on	ions.on	PROPN
iajs-9	54	21	average	average	NOUN
iajs-9	54	22	the	the	DET
iajs-9	54	23	light	light	ADJ
iajs-9	54	24	atoms	atom	NOUN
iajs-9	54	25	in	in	ADP
iajs-9	54	26	the	the	DET
iajs-9	54	27	cascades	cascade	NOUN
iajs-9	54	28	carry	carry	VERB
iajs-9	54	29	far	far	ADV
iajs-9	54	30	greater	great	ADJ
iajs-9	54	31	momentum	momentum	NOUN
iajs-9	54	32	towards	towards	ADP
iajs-9	54	33	the	the	DET
iajs-9	54	34	surface	surface	NOUN
iajs-9	54	35	of	of	ADP
iajs-9	54	36	the	the	DET
iajs-9	54	37	target	target	NOUN
iajs-9	54	38	than	than	SCONJ
iajs-9	54	39	do	do	VERB
iajs-9	54	40	the	the	DET
iajs-9	54	41	heavy	heavy	ADJ
iajs-9	54	42	atoms	atom	NOUN
iajs-9	54	43	.	.	PUNCT
iajs-9	55	1	thus	thus	ADV
iajs-9	55	2	,	,	PUNCT
iajs-9	55	3	this	this	PRON
iajs-9	55	4	leads	lead	VERB
iajs-9	55	5	to	to	ADP
iajs-9	55	6	a	a	DET
iajs-9	55	7	higher	high	ADJ
iajs-9	55	8	sputtering	sputtering	ADJ
iajs-9	55	9	yield	yield	NOUN
iajs-9	55	10	.	.	PUNCT
iajs-9	56	1	in	in	ADP
iajs-9	56	2	this	this	DET
iajs-9	56	3	paper	paper	NOUN
iajs-9	56	4	the	the	DET
iajs-9	56	5	scheme	scheme	NOUN
iajs-9	56	6	is	be	AUX
iajs-9	56	7	to	to	PART
iajs-9	56	8	use	use	VERB
iajs-9	56	9	similar	similar	ADJ
iajs-9	56	10	ion	ion	NOUN
iajs-9	56	11	/	/	SYM
iajs-9	56	12	target	target	NOUN
iajs-9	56	13	monoatomic	monoatomic	ADJ
iajs-9	56	14	element	element	NOUN
iajs-9	56	15	.	.	PUNCT
iajs-9	57	1	this	this	PRON
iajs-9	57	2	means	mean	VERB
iajs-9	57	3	the	the	DET
iajs-9	57	4	mass	mass	NOUN
iajs-9	57	5	of	of	ADP
iajs-9	57	6	incident	incident	NOUN
iajs-9	57	7	ion	ion	NOUN
iajs-9	57	8	is	be	AUX
iajs-9	57	9	equal	equal	ADJ
iajs-9	57	10	or	or	CCONJ
iajs-9	57	11	less	less	ADJ
iajs-9	57	12	than	than	ADP
iajs-9	57	13	the	the	DET
iajs-9	57	14	target	target	NOUN
iajs-9	57	15	atom	atom	NOUN
iajs-9	57	16	mass	mass	NOUN
iajs-9	57	17	.	.	PUNCT
iajs-9	58	1	thus	thus	ADV
iajs-9	58	2	there	there	PRON
iajs-9	58	3	is	be	VERB
iajs-9	58	4	probability	probability	NOUN
iajs-9	58	5	that	that	SCONJ
iajs-9	58	6	an	an	DET
iajs-9	58	7	elastic	elastic	ADJ
iajs-9	58	8	reflection	reflection	NOUN
iajs-9	58	9	of	of	ADP
iajs-9	58	10	ion	ion	NOUN
iajs-9	58	11	from	from	ADP
iajs-9	58	12	the	the	DET
iajs-9	58	13	target	target	NOUN
iajs-9	58	14	surface	surface	NOUN
iajs-9	58	15	to	to	PART
iajs-9	58	16	takes	take	VERB
iajs-9	58	17	place	place	NOUN
iajs-9	58	18	.	.	PUNCT
iajs-9	59	1	the	the	DET
iajs-9	59	2	reflected	reflect	VERB
iajs-9	59	3	particle	particle	NOUN
iajs-9	59	4	becomes	become	VERB
iajs-9	59	5	neutral	neutral	ADJ
iajs-9	59	6	because	because	SCONJ
iajs-9	59	7	the	the	DET
iajs-9	59	8	ions	ion	NOUN
iajs-9	59	9	are	be	AUX
iajs-9	59	10	neutralized	neutralize	VERB
iajs-9	59	11	shortly	shortly	ADV
iajs-9	59	12	before	before	SCONJ
iajs-9	59	13	it	it	PRON
iajs-9	59	14	impact	impact	VERB
iajs-9	59	15	the	the	DET
iajs-9	59	16	surface	surface	NOUN
iajs-9	59	17	and	and	CCONJ
iajs-9	59	18	it	it	PRON
iajs-9	59	19	is	be	AUX
iajs-9	59	20	not	not	PART
iajs-9	59	21	unaffected	unaffected	ADJ
iajs-9	59	22	by	by	ADP
iajs-9	59	23	sheaths	sheath	NOUN
iajs-9	59	24	.	.	PUNCT
iajs-9	60	1	these	these	DET
iajs-9	60	2	neutral	neutral	ADJ
iajs-9	60	3	particles	particle	NOUN
iajs-9	60	4	believe	believe	VERB
iajs-9	60	5	to	to	PART
iajs-9	60	6	be	be	AUX
iajs-9	60	7	a	a	DET
iajs-9	60	8	source	source	NOUN
iajs-9	60	9	of	of	ADP
iajs-9	60	10	losing	lose	VERB
iajs-9	60	11	energy	energy	NOUN
iajs-9	60	12	from	from	ADP
iajs-9	60	13	incident	incident	NOUN
iajs-9	60	14	ion	ion	NOUN
iajs-9	60	15	energy	energy	NOUN
iajs-9	60	16	.	.	PUNCT
iajs-9	61	1	therefore	therefore	ADV
iajs-9	61	2	,	,	PUNCT
iajs-9	61	3	this	this	DET
iajs-9	61	4	aspect	aspect	NOUN
iajs-9	61	5	leads	lead	VERB
iajs-9	61	6	to	to	ADP
iajs-9	61	7	a	a	DET
iajs-9	61	8	significant	significant	ADJ
iajs-9	61	9	effect	effect	NOUN
iajs-9	61	10	of	of	ADP
iajs-9	61	11	the	the	DET
iajs-9	61	12	sputtering	sputtering	ADJ
iajs-9	61	13	process	process	NOUN
iajs-9	61	14	.	.	PUNCT
iajs-9	62	1	conclusions	conclusion	NOUN
iajs-9	62	2	there	there	PRON
iajs-9	62	3	are	be	VERB
iajs-9	62	4	many	many	ADJ
iajs-9	62	5	mathematical	mathematical	ADJ
iajs-9	62	6	models	model	NOUN
iajs-9	62	7	that	that	PRON
iajs-9	62	8	illustrate	illustrate	VERB
iajs-9	62	9	the	the	DET
iajs-9	62	10	interaction	interaction	NOUN
iajs-9	62	11	of	of	ADP
iajs-9	62	12	ions	ion	NOUN
iajs-9	62	13	with	with	ADP
iajs-9	62	14	metals	metal	NOUN
iajs-9	62	15	,	,	PUNCT
iajs-9	62	16	as	as	ADV
iajs-9	62	17	well	well	ADV
iajs-9	62	18	as	as	ADP
iajs-9	62	19	several	several	ADJ
iajs-9	62	20	of	of	ADP
iajs-9	62	21	the	the	DET
iajs-9	62	22	simulation	simulation	NOUN
iajs-9	62	23	programs	program	NOUN
iajs-9	62	24	describing	describe	VERB
iajs-9	62	25	these	these	DET
iajs-9	62	26	interactions	interaction	NOUN
iajs-9	62	27	.	.	PUNCT
iajs-9	63	1	in	in	ADP
iajs-9	63	2	this	this	DET
iajs-9	63	3	paper	paper	NOUN
iajs-9	63	4	,	,	PUNCT
iajs-9	63	5	the	the	DET
iajs-9	63	6	global	global	ADJ
iajs-9	63	7	trim	trim	NOUN
iajs-9	63	8	program	program	NOUN
iajs-9	63	9	has	have	AUX
iajs-9	63	10	been	be	AUX
iajs-9	63	11	used	use	VERB
iajs-9	63	12	to	to	PART
iajs-9	63	13	calculate	calculate	VERB
iajs-9	63	14	the	the	DET
iajs-9	63	15	sputtering	sputtering	ADJ
iajs-9	63	16	yield	yield	NOUN
iajs-9	63	17	of	of	ADP
iajs-9	63	18	li	li	PROPN
iajs-9	63	19	,	,	PUNCT
iajs-9	63	20	na	na	NOUN
iajs-9	63	21	and	and	CCONJ
iajs-9	63	22	kr	kr	PROPN
iajs-9	63	23	target	target	NOUN
iajs-9	63	24	bombarded	bombard	VERB
iajs-9	63	25	by	by	ADP
iajs-9	63	26	its	its	PRON
iajs-9	63	27	own	own	ADJ
iajs-9	63	28	ion	ion	NOUN
iajs-9	63	29	,	,	PUNCT
iajs-9	63	30	respectively	respectively	ADV
iajs-9	63	31	.	.	PUNCT
iajs-9	64	1	we	we	PRON
iajs-9	64	2	found	find	VERB
iajs-9	64	3	that	that	SCONJ
iajs-9	64	4	the	the	DET
iajs-9	64	5	sputtering	sputter	VERB
iajs-9	64	6	yield	yield	NOUN
iajs-9	64	7	depends	depend	VERB
iajs-9	64	8	on	on	ADP
iajs-9	64	9	the	the	DET
iajs-9	64	10	mass	mass	NOUN
iajs-9	64	11	of	of	ADP
iajs-9	64	12	the	the	DET
iajs-9	64	13	target	target	NOUN
iajs-9	64	14	and	and	CCONJ
iajs-9	64	15	the	the	DET
iajs-9	64	16	atomic	atomic	ADJ
iajs-9	64	17	number	number	NOUN
iajs-9	64	18	of	of	ADP
iajs-9	64	19	both	both	DET
iajs-9	64	20	ion	ion	NOUN
iajs-9	64	21	and	and	CCONJ
iajs-9	64	22	target	target	NOUN
iajs-9	64	23	.	.	PUNCT
iajs-9	65	1	the	the	DET
iajs-9	65	2	same	same	ADJ
iajs-9	65	3	lighter	light	ADJ
iajs-9	65	4	ion	ion	NOUN
iajs-9	65	5	/	/	SYM
iajs-9	65	6	target	target	NOUN
iajs-9	65	7	gives	give	VERB
iajs-9	65	8	lower	low	ADJ
iajs-9	65	9	sputtering	sputtering	ADJ
iajs-9	65	10	yield	yield	NOUN
iajs-9	65	11	at	at	ADP
iajs-9	65	12	lower	low	ADJ
iajs-9	65	13	angles	angle	NOUN
iajs-9	65	14	of	of	ADP
iajs-9	65	15	ion	ion	NOUN
iajs-9	65	16	incident	incident	NOUN
iajs-9	65	17	and	and	CCONJ
iajs-9	65	18	a	a	DET
iajs-9	65	19	maximum	maximum	ADJ
iajs-9	65	20	point	point	NOUN
iajs-9	65	21	of	of	ADP
iajs-9	65	22	sputtering	sputtering	ADJ
iajs-9	65	23	yield	yield	NOUN
iajs-9	65	24	at	at	ADP
iajs-9	65	25	higher	high	ADJ
iajs-9	65	26	angles	angle	NOUN
iajs-9	65	27	.	.	PUNCT
iajs-9	66	1	further	far	ADV
iajs-9	66	2	,	,	PUNCT
iajs-9	66	3	the	the	DET
iajs-9	66	4	same	same	ADJ
iajs-9	66	5	lighter	light	ADJ
iajs-9	66	6	ion	ion	NOUN
iajs-9	66	7	/	/	SYM
iajs-9	66	8	target	target	NOUN
iajs-9	66	9	has	have	VERB
iajs-9	66	10	a	a	DET
iajs-9	66	11	shifted	shift	VERB
iajs-9	66	12	peak	peak	NOUN
iajs-9	66	13	of	of	ADP
iajs-9	66	14	sputtering	sputter	VERB
iajs-9	66	15	towards	towards	ADP
iajs-9	66	16	higher	high	ADJ
iajs-9	66	17	angles	angle	NOUN
iajs-9	66	18	.	.	PUNCT
iajs-9	67	1	moreover	moreover	ADV
iajs-9	67	2	,	,	PUNCT
iajs-9	67	3	the	the	PRON
iajs-9	67	4	lower	low	ADJ
iajs-9	67	5	the	the	DET
iajs-9	67	6	sputtering	sputtering	ADJ
iajs-9	67	7	yield	yield	NOUN
iajs-9	67	8	of	of	ADP
iajs-9	67	9	the	the	DET
iajs-9	67	10	same	same	ADJ
iajs-9	67	11	ion	ion	NOUN
iajs-9	67	12	/	/	SYM
iajs-9	67	13	target	target	NOUN
iajs-9	67	14	vs.	vs.	X
iajs-9	67	15	ion	ion	NOUN
iajs-9	67	16	energy	energy	NOUN
iajs-9	67	17	is	be	AUX
iajs-9	67	18	denoted	denote	VERB
iajs-9	67	19	by	by	ADP
iajs-9	67	20	the	the	DET
iajs-9	67	21	lighter	light	ADJ
iajs-9	67	22	ion	ion	NOUN
iajs-9	67	23	/	/	SYM
iajs-9	67	24	target	target	NOUN
iajs-9	67	25	.	.	PUNCT
iajs-9	68	1	regard	regard	NOUN
iajs-9	68	2	to	to	ADP
iajs-9	68	3	the	the	DET
iajs-9	68	4	angular	angular	ADJ
iajs-9	68	5	distribution	distribution	NOUN
iajs-9	68	6	of	of	ADP
iajs-9	68	7	the	the	DET
iajs-9	68	8	sputtering	sputtering	ADJ
iajs-9	68	9	yield	yield	NOUN
iajs-9	68	10	we	we	PRON
iajs-9	68	11	suggest	suggest	VERB
iajs-9	68	12	to	to	PART
iajs-9	68	13	use	use	VERB
iajs-9	68	14	(	(	PUNCT
iajs-9	68	15	ior	ior	NOUN
iajs-9	68	16	)	)	PUNCT
iajs-9	68	17	function	function	NOUN
iajs-9	68	18	instead	instead	ADV
iajs-9	68	19	of	of	ADP
iajs-9	68	20	polynomial	polynomial	ADJ
iajs-9	68	21	functions	function	NOUN
iajs-9	68	22	because	because	SCONJ
iajs-9	68	23	it	it	PRON
iajs-9	68	24	does	do	AUX
iajs-9	68	25	not	not	PART
iajs-9	68	26	suffer	suffer	VERB
iajs-9	68	27	from	from	ADP
iajs-9	68	28	fluctuations	fluctuation	NOUN
iajs-9	68	29	and	and	CCONJ
iajs-9	68	30	smother	smother	NOUN
iajs-9	68	31	than	than	ADP
iajs-9	68	32	the	the	DET
iajs-9	68	33	second	second	ADJ
iajs-9	68	34	functions	function	NOUN
iajs-9	68	35	.	.	PUNCT
iajs-9	69	1	physics	physics	NOUN
iajs-9	69	2	|	|	ADV
iajs-9	69	3	30	30	NUM
iajs-9	69	4	2016	2016	NUM
iajs-9	69	5	(	(	PUNCT
iajs-9	69	6	عاو	عاو	NOUN
iajs-9	69	7	3)انعذد	3)انعذد	NUM
iajs-9	69	8	22انًجهذ	22انًجهذ	NUM
iajs-9	69	9	يجهت	يجهت	NOUN
iajs-9	69	10	إبٍ	إبٍ	VERB
iajs-9	69	11	انهٍثى	انهٍثى	PROPN
iajs-9	69	12	نهعهىو	نهعهىو	PROPN
iajs-9	69	13	انصشفت	انصشفت	NOUN
iajs-9	69	14	و	و	PRON
iajs-9	69	15	انتطبٍقٍت	انتطبٍقٍت	PROPN
iajs-9	69	16	ibn	ibn	PROPN
iajs-9	69	17	al	al	PROPN
iajs-9	69	18	-	-	PUNCT
iajs-9	69	19	haitham	haitham	PROPN
iajs-9	69	20	j.	j.	PROPN
iajs-9	69	21	for	for	ADP
iajs-9	69	22	pure	pure	PROPN
iajs-9	69	23	&	&	CCONJ
iajs-9	69	24	appl	appl	PROPN
iajs-9	69	25	.	.	PUNCT
iajs-9	70	1	sci	sci	PROPN
iajs-9	70	2	.	.	PUNCT
iajs-9	71	1	vol.29	vol.29	PROPN
iajs-9	71	2	(	(	PUNCT
iajs-9	71	3	3	3	NUM
iajs-9	71	4	)	)	SYM
iajs-9	71	5	2016	2016	NUM
iajs-9	71	6	reference	reference	NOUN
iajs-9	71	7	1	1	NUM
iajs-9	71	8	.	.	PUNCT
iajs-9	72	1	kirk	kirk	PROPN
iajs-9	72	2	,	,	PUNCT
iajs-9	72	3	a.	a.	PROPN
iajs-9	72	4	z.	z.	PROPN
iajs-9	72	5	(	(	PUNCT
iajs-9	72	6	2007	2007	NUM
iajs-9	72	7	)	)	PUNCT
iajs-9	72	8	“	"	PUNCT
iajs-9	72	9	differential	differential	ADJ
iajs-9	72	10	sputtering	sputtering	ADJ
iajs-9	72	11	yield	yield	NOUN
iajs-9	72	12	of	of	ADP
iajs-9	72	13	refractory	refractory	NOUN
iajs-9	72	14	metals	metal	NOUN
iajs-9	72	15	by	by	ADP
iajs-9	72	16	ion	ion	NOUN
iajs-9	72	17	bombardment	bombardment	NOUN
iajs-9	72	18	at	at	ADP
iajs-9	72	19	normal	normal	ADJ
iajs-9	72	20	and	and	CCONJ
iajs-9	72	21	oblique	oblique	ADJ
iajs-9	72	22	incidences	incidence	NOUN
iajs-9	72	23	”	"	PUNCT
iajs-9	72	24	colorado	colorado	PROPN
iajs-9	72	25	state	state	PROPN
iajs-9	72	26	university	university	PROPN
iajs-9	72	27	fall	fall	VERB
iajs-9	72	28	2	2	NUM
iajs-9	72	29	.	.	PUNCT
iajs-9	73	1	lucille	lucille	PROPN
iajs-9	73	2	,	,	PUNCT
iajs-9	73	3	a.	a.	NOUN
iajs-9	73	4	g.	g.	PROPN
iajs-9	73	5	,	,	PUNCT
iajs-9	73	6	and	and	CCONJ
iajs-9	73	7	.	.	PUNCT
iajs-9	74	1	fred	fred	PROPN
iajs-9	74	2	.	.	PUNCT
iajs-9	75	1	a	a	PRON
iajs-9	75	2	.	.	PUNCT
iajs-9	76	1	s	s	X
iajs-9	76	2	,	,	PUNCT
iajs-9	76	3	,	,	PUNCT
iajs-9	76	4	(	(	PUNCT
iajs-9	76	5	2005	2005	NUM
iajs-9	76	6	)	)	PUNCT
iajs-9	76	7	"	"	PUNCT
iajs-9	76	8	introduction	introduction	NOUN
iajs-9	76	9	to	to	ADP
iajs-9	76	10	focused	focus	VERB
iajs-9	76	11	ion	ion	NOUN
iajs-9	76	12	beams	beam	NOUN
iajs-9	76	13	:	:	PUNCT
iajs-9	76	14	instrumentation	instrumentation	NOUN
iajs-9	76	15	,	,	PUNCT
iajs-9	76	16	theory	theory	NOUN
iajs-9	76	17	,	,	PUNCT
iajs-9	76	18	techniques	technique	NOUN
iajs-9	76	19	,	,	PUNCT
iajs-9	76	20	and	and	CCONJ
iajs-9	76	21	practice	practice	NOUN
iajs-9	76	22	"	"	PUNCT
iajs-9	76	23	.	.	PUNCT
iajs-9	77	1	springer	springer	NOUN
iajs-9	77	2	.	.	PUNCT
iajs-9	78	1	3	3	X
iajs-9	78	2	.	.	X
iajs-9	78	3	sigmund	sigmund	NOUN
iajs-9	78	4	,	,	PUNCT
iajs-9	78	5	p.	p.	NOUN
iajs-9	78	6	,	,	PUNCT
iajs-9	78	7	(	(	PUNCT
iajs-9	78	8	1969	1969	NUM
iajs-9	78	9	)	)	PUNCT
iajs-9	78	10	"	"	PUNCT
iajs-9	78	11	theory	theory	NOUN
iajs-9	78	12	of	of	ADP
iajs-9	78	13	sputtering	sputtering	NOUN
iajs-9	78	14	.	.	PUNCT
iajs-9	79	1	i.	i.	PROPN
iajs-9	79	2	sputtering	sputtering	NOUN
iajs-9	79	3	yield	yield	NOUN
iajs-9	79	4	of	of	ADP
iajs-9	79	5	amorphous	amorphous	ADJ
iajs-9	79	6	and	and	CCONJ
iajs-9	79	7	polycrystalline	polycrystalline	ADJ
iajs-9	79	8	target	target	NOUN
iajs-9	79	9	"	"	PUNCT
iajs-9	79	10	,	,	PUNCT
iajs-9	79	11	physical	physical	ADJ
iajs-9	79	12	review	review	NOUN
iajs-9	79	13	,	,	PUNCT
iajs-9	79	14	(	(	PUNCT
iajs-9	79	15	148	148	NUM
iajs-9	79	16	)	)	PUNCT
iajs-9	79	17	,	,	PUNCT
iajs-9	79	18	(	(	PUNCT
iajs-9	79	19	2	2	NUM
iajs-9	79	20	)	)	PUNCT
iajs-9	79	21	,	,	PUNCT
iajs-9	79	22	383	383	NUM
iajs-9	79	23	–	–	PUNCT
iajs-9	79	24	416	416	NUM
iajs-9	79	25	.	.	NOUN
iajs-9	80	1	4	4	X
iajs-9	80	2	.	.	X
iajs-9	80	3	behrisch	behrisch	PROPN
iajs-9	80	4	,	,	PUNCT
iajs-9	80	5	r.	r.	PROPN
iajs-9	80	6	and	and	CCONJ
iajs-9	80	7	eckstein	eckstein	PROPN
iajs-9	80	8	,	,	PUNCT
iajs-9	80	9	w.	w.	PROPN
iajs-9	80	10	(	(	PUNCT
iajs-9	80	11	2007)"sputtering	2007)"sputtere	VERB
iajs-9	80	12	by	by	ADP
iajs-9	80	13	particle	particle	NOUN
iajs-9	80	14	bombardment	bombardment	NOUN
iajs-9	80	15	:	:	PUNCT
iajs-9	80	16	experiments	experiment	NOUN
iajs-9	80	17	and	and	CCONJ
iajs-9	80	18	computer	computer	NOUN
iajs-9	80	19	calculations	calculation	NOUN
iajs-9	80	20	from	from	ADP
iajs-9	80	21	threshold	threshold	NOUN
iajs-9	80	22	to	to	ADP
iajs-9	80	23	energies	energy	NOUN
iajs-9	80	24	"	"	PUNCT
iajs-9	80	25	,	,	PUNCT
iajs-9	80	26	springer	springer	NOUN
iajs-9	80	27	,	,	PUNCT
iajs-9	80	28	berlin	berlin	PROPN
iajs-9	80	29	.	.	PUNCT
iajs-9	81	1	5	5	X
iajs-9	81	2	.	.	X
iajs-9	81	3	orloff	orloff	PROPN
iajs-9	81	4	,	,	PUNCT
iajs-9	81	5	j.	j.	PROPN
iajs-9	81	6	;	;	PUNCT
iajs-9	81	7	utlaut	utlaut	PROPN
iajs-9	81	8	,	,	PUNCT
iajs-9	81	9	m.	m.	NOUN
iajs-9	81	10	and	and	CCONJ
iajs-9	81	11	.	.	PUNCT
iajs-9	81	12	swanson	swanson	PROPN
iajs-9	81	13	,	,	PUNCT
iajs-9	81	14	l.	l.	PROPN
iajs-9	81	15	(	(	PUNCT
iajs-9	81	16	2003	2003	NUM
iajs-9	81	17	)	)	PUNCT
iajs-9	81	18	.	.	PUNCT
iajs-9	82	1	“	"	PUNCT
iajs-9	82	2	high	high	ADJ
iajs-9	82	3	resolution	resolution	NOUN
iajs-9	82	4	focused	focus	VERB
iajs-9	82	5	ion	ion	NOUN
iajs-9	82	6	beams	beam	NOUN
iajs-9	82	7	:	:	PUNCT
iajs-9	82	8	fib	fib	VERB
iajs-9	82	9	and	and	CCONJ
iajs-9	82	10	its	its	PRON
iajs-9	82	11	applications	application	NOUN
iajs-9	82	12	”	"	PUNCT
iajs-9	82	13	,	,	PUNCT
iajs-9	82	14	kluwer	kluwer	NOUN
iajs-9	82	15	academic	academic	PROPN
iajs-9	82	16	/	/	SYM
iajs-9	82	17	plenum	plenum	NOUN
iajs-9	82	18	publishers	publisher	NOUN
iajs-9	82	19	,	,	PUNCT
iajs-9	82	20	ny	ny	PROPN
iajs-9	82	21	.	.	PROPN
iajs-9	82	22	6	6	NUM
iajs-9	82	23	.	.	X
iajs-9	83	1	shwartz	shwartz	PROPN
iajs-9	83	2	,	,	PUNCT
iajs-9	83	3	g.c.(2006	g.c.(2006	PROPN
iajs-9	83	4	)	)	PUNCT
iajs-9	83	5	“	"	PUNCT
iajs-9	83	6	handbook	handbook	NOUN
iajs-9	83	7	of	of	ADP
iajs-9	83	8	semiconductor	semiconductor	NOUN
iajs-9	83	9	interconnection	interconnection	NOUN
iajs-9	83	10	technology	technology	NOUN
iajs-9	83	11	”	"	PUNCT
iajs-9	83	12	,	,	PUNCT
iajs-9	83	13	crc	crc	NOUN
iajs-9	83	14	press	press	NOUN
iajs-9	83	15	book	book	NOUN
iajs-9	83	16	.	.	PUNCT
iajs-9	84	1	7	7	X
iajs-9	84	2	.	.	X
iajs-9	84	3	ziegler	ziegler	PROPN
iajs-9	84	4	,	,	PUNCT
iajs-9	84	5	j.f	j.f	PROPN
iajs-9	84	6	.	.	PROPN
iajs-9	84	7	and	and	CCONJ
iajs-9	84	8	biersack	biersack	PROPN
iajs-9	84	9	,	,	PUNCT
iajs-9	84	10	j.	j.	PROPN
iajs-9	84	11	p	p	PROPN
iajs-9	84	12	.	.	PUNCT
iajs-9	85	1	(	(	PUNCT
iajs-9	85	2	2003	2003	NUM
iajs-9	85	3	)	)	PUNCT
iajs-9	85	4	srim	srim	PROPN
iajs-9	85	5	.	.	PUNCT
iajs-9	86	1	http://www.srim.org	http://www.srim.org	PROPN
iajs-9	86	2	.	.	PUNCT
iajs-9	87	1	8	8	X
iajs-9	87	2	.	.	X
iajs-9	88	1	lucille	lucille	PROPN
iajs-9	88	2	,	,	PUNCT
iajs-9	88	3	a.g	a.g	PROPN
iajs-9	88	4	.	.	PROPN
iajs-9	88	5	and	and	CCONJ
iajs-9	88	6	fred	fred	PROPN
iajs-9	88	7	,	,	PUNCT
iajs-9	88	8	a.s	a.s	PROPN
iajs-9	88	9	.	.	PROPN
iajs-9	88	10	(	(	PUNCT
iajs-9	88	11	2005	2005	NUM
iajs-9	88	12	)	)	PUNCT
iajs-9	88	13	,	,	PUNCT
iajs-9	88	14	“	"	PUNCT
iajs-9	88	15	introduction	introduction	NOUN
iajs-9	88	16	to	to	ADP
iajs-9	88	17	focused	focus	VERB
iajs-9	88	18	ion	ion	NOUN
iajs-9	88	19	beams	beam	NOUN
iajs-9	88	20	:	:	PUNCT
iajs-9	88	21	instrumentation	instrumentation	NOUN
iajs-9	88	22	,	,	PUNCT
iajs-9	88	23	theory	theory	NOUN
iajs-9	88	24	,	,	PUNCT
iajs-9	88	25	techniques	technique	NOUN
iajs-9	88	26	,	,	PUNCT
iajs-9	88	27	and	and	CCONJ
iajs-9	88	28	practice	practice	NOUN
iajs-9	88	29	”	"	PUNCT
iajs-9	88	30	.	.	PUNCT
iajs-9	88	31	springer	springer	NOUN
iajs-9	88	32	.	.	PUNCT
iajs-9	89	1	9	9	X
iajs-9	89	2	.	.	X
iajs-9	89	3	behrisch	behrisch	PROPN
iajs-9	89	4	,	,	PUNCT
iajs-9	89	5	r.	r.	PROPN
iajs-9	89	6	(	(	PUNCT
iajs-9	89	7	1981).“introduction	1981).“introduction	NUM
iajs-9	89	8	and	and	CCONJ
iajs-9	89	9	overview	overview	NOUN
iajs-9	89	10	,	,	PUNCT
iajs-9	89	11	sputtering	sputter	VERB
iajs-9	89	12	by	by	ADP
iajs-9	89	13	particle	particle	NOUN
iajs-9	89	14	bombardment	bombardment	NOUN
iajs-9	89	15	i	i	PROPN
iajs-9	89	16	”	"	PUNCT
iajs-9	89	17	,	,	PUNCT
iajs-9	89	18	1	1	NUM
iajs-9	89	19	-	-	SYM
iajs-9	89	20	8	8	NUM
iajs-9	89	21	,	,	PUNCT
iajs-9	89	22	springer	springer	NOUN
iajs-9	89	23	-	-	PUNCT
iajs-9	89	24	verlag	verlag	PROPN
iajs-9	89	25	,	,	PUNCT
iajs-9	89	26	berlin	berlin	PROPN
iajs-9	89	27	.	.	PUNCT
iajs-9	90	1	10	10	NUM
iajs-9	90	2	.	.	X
iajs-9	90	3	guping	guping	NOUN
iajs-9	90	4	,	,	PUNCT
iajs-9	90	5	d.	d.	PROPN
iajs-9	90	6	tingwen	tingwen	PROPN
iajs-9	90	7	.	.	PUNCT
iajs-9	91	1	x.	x.	PROPN
iajs-9	91	2	and	and	CCONJ
iajs-9	91	3	yun	yun	PROPN
iajs-9	91	4	.	.	PUNCT
iajs-9	92	1	l.	l.	PROPN
iajs-9	92	2	(	(	PUNCT
iajs-9	92	3	2012	2012	NUM
iajs-9	92	4	)	)	PUNCT
iajs-9	92	5	.	.	PUNCT
iajs-9	93	1	preferential	preferential	ADJ
iajs-9	93	2	sputtering	sputtering	NOUN
iajs-9	93	3	of	of	ADP
iajs-9	93	4	ar	ar	NOUN
iajs-9	93	5	ion	ion	NOUN
iajs-9	93	6	processing	processing	NOUN
iajs-9	93	7	sio2	sio2	PROPN
iajs-9	93	8	mirror	mirror	PROPN
iajs-9	93	9	,	,	PUNCT
iajs-9	93	10	aomatt	aomatt	NOUN
iajs-9	93	11	,	,	PUNCT
iajs-9	93	12	the	the	DET
iajs-9	93	13	6th	6th	ADJ
iajs-9	93	14	spie	spie	ADJ
iajs-9	93	15	international	international	ADJ
iajs-9	93	16	symposium	symposium	NOUN
iajs-9	93	17	on	on	ADP
iajs-9	93	18	advanced	advanced	ADJ
iajs-9	93	19	optical	optical	ADJ
iajs-9	93	20	manufacturing	manufacturing	NOUN
iajs-9	93	21	and	and	CCONJ
iajs-9	93	22	testing	testing	NOUN
iajs-9	93	23	technologies	technology	NOUN
iajs-9	93	24	.	.	PUNCT
iajs-9	94	1	11	11	NUM
iajs-9	94	2	.	.	PUNCT
iajs-9	94	3	nakles	nakle	NOUN
iajs-9	94	4	,	,	PUNCT
iajs-9	94	5	m.	m.	PROPN
iajs-9	94	6	r.	r.	PROPN
iajs-9	94	7	(	(	PUNCT
iajs-9	94	8	2004	2004	NUM
iajs-9	94	9	)	)	PUNCT
iajs-9	94	10	,	,	PUNCT
iajs-9	94	11	“	"	PUNCT
iajs-9	94	12	experimental	experimental	ADJ
iajs-9	94	13	and	and	CCONJ
iajs-9	94	14	modeling	model	VERB
iajs-9	94	15	studies	study	NOUN
iajs-9	94	16	of	of	ADP
iajs-9	94	17	low	low	ADJ
iajs-9	94	18	-	-	PUNCT
iajs-9	94	19	energy	energy	NOUN
iajs-9	94	20	ion	ion	NOUN
iajs-9	94	21	sputtering	sputtering	NOUN
iajs-9	94	22	for	for	ADP
iajs-9	94	23	ion	ion	NOUN
iajs-9	94	24	thrusters	thruster	NOUN
iajs-9	94	25	”	"	PUNCT
iajs-9	94	26	,	,	PUNCT
iajs-9	94	27	msc	msc	PROPN
iajs-9	94	28	thesis	thesis	PROPN
iajs-9	94	29	,	,	PUNCT
iajs-9	94	30	virginia	virginia	PROPN
iajs-9	94	31	polytechnic	polytechnic	PROPN
iajs-9	94	32	institute	institute	PROPN
iajs-9	94	33	and	and	CCONJ
iajs-9	94	34	state	state	PROPN
iajs-9	94	35	university	university	NOUN
iajs-9	94	36	.	.	PUNCT
iajs-9	95	1	12	12	NUM
iajs-9	95	2	.	.	PUNCT
iajs-9	96	1	bianchi	bianchi	NOUN
iajs-9	96	2	,	,	PUNCT
iajs-9	96	3	s.and	s.and	NOUN
iajs-9	96	4	ferrara	ferrara	NOUN
iajs-9	96	5	,	,	PUNCT
iajs-9	96	6	a.(2005)."igm	a.(2005)."igm	PROPN
iajs-9	96	7	metal	metal	NOUN
iajs-9	96	8	enrichment	enrichment	NOUN
iajs-9	96	9	through	through	ADP
iajs-9	96	10	dust	dust	NOUN
iajs-9	96	11	sputtering	sputter	VERB
iajs-9	96	12	"	"	PUNCT
iajs-9	96	13	mon	mon	NOUN
iajs-9	96	14	.	.	PUNCT
iajs-9	97	1	not	not	PART
iajs-9	97	2	.	.	PUNCT
iajs-9	98	1	r.	r.	PROPN
iajs-9	98	2	astron	astron	PROPN
iajs-9	98	3	.	.	PUNCT
iajs-9	99	1	(	(	PUNCT
iajs-9	99	2	22	22	NUM
iajs-9	99	3	)	)	PUNCT
iajs-9	100	1	,	,	PUNCT
iajs-9	100	2	1–20	1–20	PROPN
iajs-9	100	3	.	.	PUNCT
iajs-9	100	4	physics	physics	NOUN
iajs-9	100	5	|	|	ADV
iajs-9	100	6	31	31	NUM
iajs-9	100	7	2016	2016	NUM
iajs-9	100	8	(	(	PUNCT
iajs-9	100	9	عاو	عاو	NOUN
iajs-9	100	10	3)انعذد	3)انعذد	NUM
iajs-9	100	11	22انًجهذ	22انًجهذ	NUM
iajs-9	100	12	يجهت	يجهت	NOUN
iajs-9	100	13	إبٍ	إبٍ	VERB
iajs-9	100	14	انهٍثى	انهٍثى	PROPN
iajs-9	100	15	نهعهىو	نهعهىو	PROPN
iajs-9	100	16	انصشفت	انصشفت	NOUN
iajs-9	100	17	و	و	PRON
iajs-9	100	18	انتطبٍقٍت	انتطبٍقٍت	PROPN
iajs-9	100	19	ibn	ibn	PROPN
iajs-9	100	20	al	al	PROPN
iajs-9	100	21	-	-	PUNCT
iajs-9	100	22	haitham	haitham	PROPN
iajs-9	100	23	j.	j.	PROPN
iajs-9	100	24	for	for	ADP
iajs-9	100	25	pure	pure	PROPN
iajs-9	100	26	&	&	CCONJ
iajs-9	100	27	appl	appl	PROPN
iajs-9	100	28	.	.	PUNCT
iajs-9	101	1	sci	sci	PROPN
iajs-9	101	2	.	.	PUNCT
iajs-9	102	1	vol.29	vol.29	PROPN
iajs-9	102	2	(	(	PUNCT
iajs-9	102	3	3	3	NUM
iajs-9	102	4	)	)	SYM
iajs-9	102	5	2016	2016	NUM
iajs-9	102	6	table	table	NOUN
iajs-9	102	7	(	(	PUNCT
iajs-9	102	8	1	1	NUM
iajs-9	102	9	):	):	PUNCT
iajs-9	102	10	the	the	DET
iajs-9	102	11	fitting	fitting	ADJ
iajs-9	102	12	coefficients	coefficient	NOUN
iajs-9	102	13	of	of	ADP
iajs-9	102	14	polynomial	polynomial	ADJ
iajs-9	102	15	function	function	NOUN
iajs-9	102	16	for	for	ADP
iajs-9	102	17	sputtering	sputter	VERB
iajs-9	102	18	for(li	for(li	NOUN
iajs-9	102	19	,	,	PUNCT
iajs-9	102	20	na	na	NOUN
iajs-9	102	21	and	and	CCONJ
iajs-9	102	22	kr	kr	NOUN
iajs-9	102	23	)	)	PUNCT
iajs-9	102	24	,	,	PUNCT
iajs-9	102	25	which	which	PRON
iajs-9	102	26	is	be	AUX
iajs-9	102	27	shown	show	VERB
iajs-9	102	28	in	in	ADP
iajs-9	102	29	figure	figure	NOUN
iajs-9	102	30	(	(	PUNCT
iajs-9	102	31	1,2,3	1,2,3	NUM
iajs-9	102	32	)	)	PUNCT
iajs-9	102	33	.	.	PUNCT
iajs-9	103	1	k0	k0	PROPN
iajs-9	103	2	k1	k1	PROPN
iajs-9	103	3	k2	k2	PROPN
iajs-9	103	4	k3	k3	PROPN
iajs-9	103	5	k4	k4	PROPN
iajs-9	103	6	k5	k5	PROPN
iajs-9	103	7	li	li	PROPN
iajs-9	103	8	-	-	PROPN
iajs-9	103	9	li	li	PROPN
iajs-9	103	10	1.4936	1.4936	NUM
iajs-9	103	11	-0.39993	-0.39993	NOUN
iajs-9	103	12	0.040218	0.040218	NUM
iajs-9	103	13	-0.001451	-0.001451	NOUN
iajs-9	103	14	2.1693e-3	2.1693e-3	NUM
iajs-9	103	15	-1.098e-7	-1.098e-7	ADJ
iajs-9	103	16	na	na	NOUN
iajs-9	103	17	-	-	PUNCT
iajs-9	103	18	na	na	NOUN
iajs-9	103	19	1.4668	1.4668	NUM
iajs-9	103	20	0.05796	0.05796	NUM
iajs-9	103	21	-0.05796	-0.05796	NOUN
iajs-9	103	22	-1.688e-5	-1.688e-5	PUNCT
iajs-9	103	23	2.0182e-7	2.0182e-7	NUM
iajs-9	103	24	-1.820e-8	-1.820e-8	NOUN
iajs-9	103	25	kr	kr	PROPN
iajs-9	103	26	-	-	PUNCT
iajs-9	103	27	kr	kr	PROPN
iajs-9	103	28	2.0749	2.0749	NUM
iajs-9	103	29	0.060443	0.060443	NUM
iajs-9	103	30	-0.003202	-0.003202	NOUN
iajs-9	103	31	0.007052	0.007052	NUM
iajs-9	103	32	-8.694e-7	-8.694e-7	ADJ
iajs-9	103	33	7.049e-10	7.049e-10	NUM
iajs-9	103	34	table	table	NOUN
iajs-9	103	35	(	(	PUNCT
iajs-9	103	36	2	2	NUM
iajs-9	103	37	):	):	PUNCT
iajs-9	103	38	the	the	DET
iajs-9	103	39	fitting	fitting	ADJ
iajs-9	103	40	coefficients	coefficient	NOUN
iajs-9	103	41	of	of	ADP
iajs-9	103	42	ior	ior	NOUN
iajs-9	103	43	function	function	NOUN
iajs-9	103	44	for	for	ADP
iajs-9	103	45	sputtering	sputter	VERB
iajs-9	103	46	for	for	ADP
iajs-9	103	47	(	(	PUNCT
iajs-9	103	48	li	li	PROPN
iajs-9	103	49	,	,	PUNCT
iajs-9	103	50	na	na	NOUN
iajs-9	103	51	and	and	CCONJ
iajs-9	103	52	kr	kr	NOUN
iajs-9	103	53	)	)	PUNCT
iajs-9	103	54	,	,	PUNCT
iajs-9	103	55	which	which	PRON
iajs-9	103	56	is	be	AUX
iajs-9	103	57	shown	show	VERB
iajs-9	103	58	in	in	ADP
iajs-9	103	59	figure	figure	NOUN
iajs-9	103	60	(	(	PUNCT
iajs-9	103	61	1,2	1,2	NUM
iajs-9	103	62	,	,	PUNCT
iajs-9	103	63	3	3	NUM
iajs-9	103	64	)	)	PUNCT
iajs-9	103	65	.	.	PUNCT
iajs-9	104	1	y0	y0	PRON
iajs-9	104	2	a	a	DET
iajs-9	104	3	x0	x0	PROPN
iajs-9	104	4	b	b	PROPN
iajs-9	104	5	li	li	PROPN
iajs-9	104	6	-	-	PROPN
iajs-9	104	7	li	li	PROPN
iajs-9	104	8	0.22641	0.22641	NUM
iajs-9	104	9	2295	2295	NUM
iajs-9	104	10	79.976	79.976	NUM
iajs-9	104	11	174.4	174.4	NUM
iajs-9	104	12	na	na	NOUN
iajs-9	104	13	-	-	PUNCT
iajs-9	104	14	na	na	NOUN
iajs-9	104	15	1.1915	1.1915	NUM
iajs-9	104	16	2412.5	2412.5	NUM
iajs-9	104	17	72.573	72.573	NUM
iajs-9	104	18	323.01	323.01	NUM
iajs-9	104	19	kr	kr	PROPN
iajs-9	104	20	-	-	PUNCT
iajs-9	104	21	kr	kr	PROPN
iajs-9	104	22	1.3784	1.3784	NUM
iajs-9	104	23	4958.4	4958.4	NUM
iajs-9	104	24	73.026	73.026	NUM
iajs-9	104	25	863.88	863.88	NUM
iajs-9	104	26	table	table	NOUN
iajs-9	104	27	(	(	PUNCT
iajs-9	104	28	3	3	NUM
iajs-9	104	29	):	):	PUNCT
iajs-9	104	30	the	the	DET
iajs-9	104	31	fitting	fitting	ADJ
iajs-9	104	32	coefficients	coefficient	NOUN
iajs-9	104	33	of	of	ADP
iajs-9	104	34	equation	equation	NOUN
iajs-9	104	35	(	(	PUNCT
iajs-9	104	36	10	10	NUM
iajs-9	104	37	)	)	PUNCT
iajs-9	104	38	for	for	ADP
iajs-9	104	39	the	the	DET
iajs-9	104	40	curves	curve	NOUN
iajs-9	104	41	are	be	AUX
iajs-9	104	42	shown	show	VERB
iajs-9	104	43	in	in	ADP
iajs-9	104	44	figure	figure	NOUN
iajs-9	104	45	(	(	PUNCT
iajs-9	104	46	4	4	NUM
iajs-9	104	47	–	–	SYM
iajs-9	104	48	6	6	NUM
iajs-9	104	49	)	)	PUNCT
iajs-9	104	50	.	.	PUNCT
iajs-9	105	1	li	li	PROPN
iajs-9	105	2	-	-	PUNCT
iajs-9	105	3	li	li	PROPN
iajs-9	105	4	0.238	0.238	NUM
iajs-9	105	5	0.0004	0.0004	NUM
iajs-9	105	6	3.000	3.000	NUM
iajs-9	105	7	0.688	0.688	NUM
iajs-9	105	8	2.000	2.000	NUM
iajs-9	105	9	na	na	NOUN
iajs-9	105	10	-	-	PUNCT
iajs-9	105	11	na	na	NOUN
iajs-9	105	12	2.2638	2.2638	NUM
iajs-9	105	13	0.0004	0.0004	NUM
iajs-9	105	14	6.000	6.000	NUM
iajs-9	105	15	0.4398	0.4398	NUM
iajs-9	105	16	9.000	9.000	NUM
iajs-9	105	17	kr	kr	PROPN
iajs-9	105	18	-	-	PUNCT
iajs-9	105	19	kr	kr	PROPN
iajs-9	105	20	6.787	6.787	NUM
iajs-9	105	21	0.001	0.001	NUM
iajs-9	105	22	10.000	10.000	NUM
iajs-9	105	23	0.4154	0.4154	NUM
iajs-9	105	24	62.000	62.000	NUM
iajs-9	105	25	figure	figure	NOUN
iajs-9	105	26	(	(	PUNCT
iajs-9	105	27	1	1	NUM
iajs-9	105	28	):	):	PUNCT
iajs-9	105	29	the	the	DET
iajs-9	105	30	sputtering	sputtering	ADJ
iajs-9	105	31	yield	yield	NOUN
iajs-9	105	32	as	as	ADP
iajs-9	105	33	a	a	DET
iajs-9	105	34	function	function	NOUN
iajs-9	105	35	of	of	ADP
iajs-9	105	36	ion	ion	NOUN
iajs-9	105	37	incident	incident	NOUN
iajs-9	105	38	angle	angle	NOUN
iajs-9	105	39	for	for	ADP
iajs-9	105	40	na	na	PART
iajs-9	105	41	target	target	NOUN
iajs-9	105	42	bombarded	bombard	VERB
iajs-9	105	43	by	by	ADP
iajs-9	105	44	na	na	ADP
iajs-9	105	45	ion	ion	NOUN
iajs-9	105	46	.	.	PUNCT
iajs-9	106	1	the	the	DET
iajs-9	106	2	trim	trim	NOUN
iajs-9	106	3	data	datum	NOUN
iajs-9	106	4	are	be	AUX
iajs-9	106	5	fitted	fit	VERB
iajs-9	106	6	using	use	VERB
iajs-9	106	7	double	double	ADJ
iajs-9	106	8	functions	function	NOUN
iajs-9	106	9	;	;	PUNCT
iajs-9	106	10	polynomial	polynomial	ADJ
iajs-9	106	11	and	and	CCONJ
iajs-9	106	12	ior	ior	PROPN
iajs-9	106	13	provided	provide	VERB
iajs-9	106	14	by	by	ADP
iajs-9	106	15	igor	igor	PROPN
iajs-9	106	16	program	program	PROPN
iajs-9	106	17	.	.	PUNCT
iajs-9	107	1	physics	physics	NOUN
iajs-9	107	2	|	|	ADV
iajs-9	107	3	32	32	NUM
iajs-9	107	4	2016	2016	NUM
iajs-9	107	5	(	(	PUNCT
iajs-9	107	6	عاو	عاو	NOUN
iajs-9	107	7	3)انعذد	3)انعذد	NUM
iajs-9	107	8	22انًجهذ	22انًجهذ	NUM
iajs-9	107	9	يجهت	يجهت	NOUN
iajs-9	107	10	إبٍ	إبٍ	VERB
iajs-9	107	11	انهٍثى	انهٍثى	PROPN
iajs-9	107	12	نهعهىو	نهعهىو	PROPN
iajs-9	107	13	انصشفت	انصشفت	NOUN
iajs-9	107	14	و	و	PRON
iajs-9	107	15	انتطبٍقٍت	انتطبٍقٍت	PROPN
iajs-9	107	16	ibn	ibn	PROPN
iajs-9	107	17	al	al	PROPN
iajs-9	107	18	-	-	PUNCT
iajs-9	107	19	haitham	haitham	PROPN
iajs-9	107	20	j.	j.	PROPN
iajs-9	107	21	for	for	ADP
iajs-9	107	22	pure	pure	PROPN
iajs-9	107	23	&	&	CCONJ
iajs-9	107	24	appl	appl	PROPN
iajs-9	107	25	.	.	PUNCT
iajs-9	108	1	sci	sci	PROPN
iajs-9	108	2	.	.	PUNCT
iajs-9	109	1	vol.29	vol.29	PROPN
iajs-9	109	2	(	(	PUNCT
iajs-9	109	3	3	3	NUM
iajs-9	109	4	)	)	SYM
iajs-9	109	5	2016	2016	NUM
iajs-9	109	6	figure	figure	NOUN
iajs-9	109	7	(	(	PUNCT
iajs-9	109	8	2	2	NUM
iajs-9	109	9	):	):	PUNCT
iajs-9	109	10	the	the	DET
iajs-9	109	11	sputtering	sputtering	ADJ
iajs-9	109	12	yield	yield	NOUN
iajs-9	109	13	as	as	ADP
iajs-9	109	14	a	a	DET
iajs-9	109	15	function	function	NOUN
iajs-9	109	16	of	of	ADP
iajs-9	109	17	ion	ion	NOUN
iajs-9	109	18	incident	incident	NOUN
iajs-9	109	19	angle	angle	NOUN
iajs-9	109	20	for	for	ADP
iajs-9	109	21	li	li	PROPN
iajs-9	109	22	target	target	PROPN
iajs-9	109	23	bombarded	bombard	VERB
iajs-9	109	24	by	by	ADP
iajs-9	109	25	li	li	PROPN
iajs-9	109	26	ion	ion	NOUN
iajs-9	109	27	.	.	PUNCT
iajs-9	110	1	the	the	DET
iajs-9	110	2	trim	trim	NOUN
iajs-9	110	3	data	datum	NOUN
iajs-9	110	4	are	be	AUX
iajs-9	110	5	fitted	fit	VERB
iajs-9	110	6	using	use	VERB
iajs-9	110	7	double	double	ADJ
iajs-9	110	8	functions	function	NOUN
iajs-9	110	9	;	;	PUNCT
iajs-9	110	10	polynomial	polynomial	ADJ
iajs-9	110	11	and	and	CCONJ
iajs-9	110	12	ior	ior	PROPN
iajs-9	110	13	provided	provide	VERB
iajs-9	110	14	by	by	ADP
iajs-9	110	15	igor	igor	PROPN
iajs-9	110	16	program	program	PROPN
iajs-9	110	17	.	.	PUNCT
iajs-9	111	1	figure	figure	NOUN
iajs-9	111	2	(	(	PUNCT
iajs-9	111	3	3	3	NUM
iajs-9	111	4	):	):	PUNCT
iajs-9	111	5	the	the	DET
iajs-9	111	6	sputtering	sputtering	ADJ
iajs-9	111	7	yield	yield	NOUN
iajs-9	111	8	as	as	ADP
iajs-9	111	9	a	a	DET
iajs-9	111	10	function	function	NOUN
iajs-9	111	11	of	of	ADP
iajs-9	111	12	ion	ion	NOUN
iajs-9	111	13	incident	incident	NOUN
iajs-9	111	14	angle	angle	NOUN
iajs-9	111	15	for	for	ADP
iajs-9	111	16	kr	kr	PROPN
iajs-9	111	17	target	target	NOUN
iajs-9	111	18	bombarded	bombard	VERB
iajs-9	111	19	by	by	ADP
iajs-9	111	20	kr	kr	PROPN
iajs-9	111	21	ion	ion	NOUN
iajs-9	111	22	.	.	PUNCT
iajs-9	112	1	the	the	DET
iajs-9	112	2	trim	trim	NOUN
iajs-9	112	3	data	datum	NOUN
iajs-9	112	4	are	be	AUX
iajs-9	112	5	fitted	fit	VERB
iajs-9	112	6	using	use	VERB
iajs-9	112	7	double	double	ADJ
iajs-9	112	8	functions	function	NOUN
iajs-9	112	9	;	;	PUNCT
iajs-9	112	10	polynomial	polynomial	ADJ
iajs-9	112	11	and	and	CCONJ
iajs-9	112	12	ior	ior	PROPN
iajs-9	112	13	provided	provide	VERB
iajs-9	112	14	by	by	ADP
iajs-9	112	15	igor	igor	PROPN
iajs-9	112	16	program	program	PROPN
iajs-9	112	17	.	.	PUNCT
iajs-9	113	1	physics	physics	NOUN
iajs-9	113	2	|	|	ADV
iajs-9	113	3	33	33	NUM
iajs-9	113	4	2016	2016	NUM
iajs-9	113	5	(	(	PUNCT
iajs-9	113	6	عاو	عاو	NOUN
iajs-9	113	7	3)انعذد	3)انعذد	NUM
iajs-9	113	8	22انًجهذ	22انًجهذ	NUM
iajs-9	113	9	يجهت	يجهت	NOUN
iajs-9	113	10	إبٍ	إبٍ	VERB
iajs-9	113	11	انهٍثى	انهٍثى	PROPN
iajs-9	113	12	نهعهىو	نهعهىو	PROPN
iajs-9	113	13	انصشفت	انصشفت	NOUN
iajs-9	113	14	و	و	PRON
iajs-9	113	15	انتطبٍقٍت	انتطبٍقٍت	PROPN
iajs-9	113	16	ibn	ibn	PROPN
iajs-9	113	17	al	al	PROPN
iajs-9	113	18	-	-	PUNCT
iajs-9	113	19	haitham	haitham	PROPN
iajs-9	113	20	j.	j.	PROPN
iajs-9	113	21	for	for	ADP
iajs-9	113	22	pure	pure	PROPN
iajs-9	113	23	&	&	CCONJ
iajs-9	113	24	appl	appl	PROPN
iajs-9	113	25	.	.	PUNCT
iajs-9	114	1	sci	sci	PROPN
iajs-9	114	2	.	.	PUNCT
iajs-9	115	1	vol.29	vol.29	PROPN
iajs-9	115	2	(	(	PUNCT
iajs-9	115	3	3	3	NUM
iajs-9	115	4	)	)	SYM
iajs-9	115	5	2016	2016	NUM
iajs-9	115	6	figure	figure	NOUN
iajs-9	115	7	(	(	PUNCT
iajs-9	115	8	4	4	NUM
iajs-9	115	9	):	):	PUNCT
iajs-9	115	10	sputtering	sputtering	ADJ
iajs-9	115	11	yield	yield	NOUN
iajs-9	115	12	vs.	vs.	ADP
iajs-9	115	13	ion	ion	NOUN
iajs-9	115	14	energy	energy	NOUN
iajs-9	115	15	for	for	ADP
iajs-9	115	16	sputtering	sputtering	NOUN
iajs-9	115	17	of	of	ADP
iajs-9	115	18	li	li	PROPN
iajs-9	115	19	with	with	ADP
iajs-9	115	20	theoretical	theoretical	ADJ
iajs-9	115	21	equation	equation	NOUN
iajs-9	115	22	fitting	fitting	ADJ
iajs-9	115	23	.	.	PUNCT
iajs-9	116	1	figure	figure	NOUN
iajs-9	116	2	(	(	PUNCT
iajs-9	116	3	5	5	NUM
iajs-9	116	4	):	):	PUNCT
iajs-9	116	5	sputtering	sputtering	ADJ
iajs-9	116	6	yield	yield	NOUN
iajs-9	116	7	vs.	vs.	ADP
iajs-9	116	8	ion	ion	NOUN
iajs-9	116	9	energy	energy	NOUN
iajs-9	116	10	for	for	ADP
iajs-9	116	11	sputtering	sputtering	NOUN
iajs-9	116	12	of	of	ADP
iajs-9	116	13	na	na	NOUN
iajs-9	116	14	with	with	ADP
iajs-9	116	15	theoretical	theoretical	ADJ
iajs-9	116	16	equation	equation	NOUN
iajs-9	116	17	fitting	fitting	ADJ
iajs-9	116	18	.	.	PUNCT
iajs-9	117	1	physics	physics	NOUN
iajs-9	117	2	|	|	ADV
iajs-9	117	3	34	34	NUM
iajs-9	117	4	2016	2016	NUM
iajs-9	117	5	(	(	PUNCT
iajs-9	117	6	عاو	عاو	NOUN
iajs-9	117	7	3)انعذد	3)انعذد	NUM
iajs-9	117	8	22انًجهذ	22انًجهذ	NUM
iajs-9	117	9	يجهت	يجهت	NOUN
iajs-9	117	10	إبٍ	إبٍ	VERB
iajs-9	117	11	انهٍثى	انهٍثى	PROPN
iajs-9	117	12	نهعهىو	نهعهىو	PROPN
iajs-9	117	13	انصشفت	انصشفت	NOUN
iajs-9	117	14	و	و	PRON
iajs-9	117	15	انتطبٍقٍت	انتطبٍقٍت	PROPN
iajs-9	117	16	ibn	ibn	PROPN
iajs-9	117	17	al	al	PROPN
iajs-9	117	18	-	-	PUNCT
iajs-9	117	19	haitham	haitham	PROPN
iajs-9	117	20	j.	j.	PROPN
iajs-9	117	21	for	for	ADP
iajs-9	117	22	pure	pure	PROPN
iajs-9	117	23	&	&	CCONJ
iajs-9	117	24	appl	appl	PROPN
iajs-9	117	25	.	.	PUNCT
iajs-9	118	1	sci	sci	PROPN
iajs-9	118	2	.	.	PUNCT
iajs-9	119	1	vol.29	vol.29	PROPN
iajs-9	119	2	(	(	PUNCT
iajs-9	119	3	3	3	NUM
iajs-9	119	4	)	)	SYM
iajs-9	119	5	2016	2016	NUM
iajs-9	119	6	figure	figure	NOUN
iajs-9	119	7	(	(	PUNCT
iajs-9	119	8	6	6	NUM
iajs-9	119	9	):	):	PUNCT
iajs-9	119	10	sputtering	sputtering	ADJ
iajs-9	119	11	yield	yield	NOUN
iajs-9	119	12	vs.	vs.	ADP
iajs-9	119	13	ion	ion	NOUN
iajs-9	119	14	energy	energy	NOUN
iajs-9	119	15	for	for	ADP
iajs-9	119	16	sputtering	sputtering	NOUN
iajs-9	119	17	of	of	ADP
iajs-9	119	18	kr	kr	PROPN
iajs-9	119	19	with	with	ADP
iajs-9	119	20	theoretical	theoretical	ADJ
iajs-9	119	21	equation	equation	NOUN
iajs-9	119	22	fitting	fitting	ADJ
iajs-9	119	23	.	.	PUNCT
iajs-9	120	1	figure	figure	NOUN
iajs-9	120	2	(	(	PUNCT
iajs-9	120	3	7	7	NUM
iajs-9	120	4	):	):	PUNCT
iajs-9	120	5	the	the	DET
iajs-9	120	6	angular	angular	ADJ
iajs-9	120	7	dependent	dependent	NOUN
iajs-9	120	8	of	of	ADP
iajs-9	120	9	the	the	DET
iajs-9	120	10	sputtering	sputtering	ADJ
iajs-9	120	11	yield	yield	NOUN
iajs-9	120	12	of	of	ADP
iajs-9	120	13	li	li	PROPN
iajs-9	120	14	,	,	PUNCT
iajs-9	120	15	na	na	X
iajs-9	120	16	and	and	CCONJ
iajs-9	120	17	kr	kr	PROPN
iajs-9	120	18	with	with	ADP
iajs-9	120	19	fixed	fix	VERB
iajs-9	120	20	ion	ion	NOUN
iajs-9	120	21	number	number	NOUN
iajs-9	120	22	,	,	PUNCT
iajs-9	120	23	the	the	DET
iajs-9	120	24	width	width	NOUN
iajs-9	120	25	of	of	ADP
iajs-9	120	26	the	the	DET
iajs-9	120	27	target	target	NOUN
iajs-9	120	28	and	and	CCONJ
iajs-9	120	29	ions	ion	NOUN
iajs-9	120	30	energy	energy	NOUN
iajs-9	120	31	.	.	PUNCT
iajs-9	121	1	physics	physics	NOUN
iajs-9	121	2	|	|	ADV
iajs-9	121	3	35	35	NUM
iajs-9	121	4	2016	2016	NUM
iajs-9	121	5	(	(	PUNCT
iajs-9	121	6	عاو	عاو	NOUN
iajs-9	121	7	3)انعذد	3)انعذد	NUM
iajs-9	121	8	22انًجهذ	22انًجهذ	NUM
iajs-9	121	9	يجهت	يجهت	NOUN
iajs-9	121	10	إبٍ	إبٍ	VERB
iajs-9	121	11	انهٍثى	انهٍثى	PROPN
iajs-9	121	12	نهعهىو	نهعهىو	PROPN
iajs-9	121	13	انصشفت	انصشفت	NOUN
iajs-9	121	14	و	و	PRON
iajs-9	121	15	انتطبٍقٍت	انتطبٍقٍت	PROPN
iajs-9	121	16	ibn	ibn	PROPN
iajs-9	121	17	al	al	PROPN
iajs-9	121	18	-	-	PUNCT
iajs-9	121	19	haitham	haitham	PROPN
iajs-9	121	20	j.	j.	PROPN
iajs-9	121	21	for	for	ADP
iajs-9	121	22	pure	pure	PROPN
iajs-9	121	23	&	&	CCONJ
iajs-9	121	24	appl	appl	PROPN
iajs-9	121	25	.	.	PUNCT
iajs-9	122	1	sci	sci	PROPN
iajs-9	122	2	.	.	PUNCT
iajs-9	123	1	vol.29	vol.29	PROPN
iajs-9	123	2	(	(	PUNCT
iajs-9	123	3	3	3	NUM
iajs-9	123	4	)	)	SYM
iajs-9	123	5	2016	2016	NUM
iajs-9	123	6	حساباث	حساباث	PROPN
iajs-9	123	7	حاصل	حاصل	PROPN
iajs-9	123	8	الترريز	الترريز	VERB
iajs-9	123	9	لكل	لكل	PRON
iajs-9	123	10	هي	هي	VERB
iajs-9	123	11	اللثيىم	اللثيىم	VERB
iajs-9	123	12	و	و	PRON
iajs-9	123	13	الصىديىم	الصىديىم	VERB
iajs-9	123	14	و	و	PRON
iajs-9	123	15	الكريبتىى	الكريبتىى	VERB
iajs-9	123	16	عٌذ	عٌذ	NUM
iajs-9	123	17	قصفها	قصفها	PROPN
iajs-9	124	1	بٌفس	بٌفس	PROPN
iajs-9	124	2	ايىى	ايىى	ADJ
iajs-9	124	3	الهذف	الهذف	PROPN
iajs-9	124	4	باستخذام	باستخذام	VERB
iajs-9	124	5	برًاهج	برًاهج	PROPN
iajs-9	124	6	هحاكاة	هحاكاة	ADJ
iajs-9	124	7	التــــرم	التــــرم	NOUN
iajs-9	124	8	يٌاس	يٌاس	PROPN
iajs-9	124	9	احوذ	احوذ	NOUN
iajs-9	124	10	جىاد	جىاد	PROPN
iajs-9	124	11	ا	ا	PROPN
iajs-9	124	12	هصطفً	هصطفً	PROPN
iajs-9	124	13	كاهل	كاهل	PROPN
iajs-9	124	14	جاسن	جاسن	ADJ
iajs-9	124	15	هذي	هذي	PROPN
iajs-9	124	16	هجيذ	هجيذ	PROPN
iajs-9	124	17	تىفيق	تىفيق	NOUN
iajs-9	124	18	جايعت	جايعت	ADJ
iajs-9	124	19	بغذاد	بغذاد	PROPN
iajs-9	124	20	/كهٍت	/كهٍت	PUNCT
iajs-9	125	1	انتشبٍت	انتشبٍت	PROPN
iajs-9	125	2	نهعهىو	نهعهىو	PROPN
iajs-9	125	3	انصشفت	انصشفت	PROPN
iajs-9	125	4	)	)	PUNCT
iajs-9	126	1	ابٍ	ابٍ	INTJ
iajs-9	126	2	انهٍثى	انهٍثى	PROPN
iajs-9	126	3	(	(	PUNCT
iajs-9	126	4	/قسى	/قسى	NOUN
iajs-9	126	5	انفٍضٌاء	انفٍضٌاء	NUM
iajs-9	126	6	6102	6102	NUM
iajs-9	126	7	/	/	SYM
iajs-9	126	8	توىز/	توىز/	PROPN
iajs-9	126	9	01قبل	01قبل	NOUN
iajs-9	126	10	في,6102	في,6102	NOUN
iajs-9	126	11	/ًيساى/01استلن	/ًيساى/01استلن	NOUN
iajs-9	126	12	في	في	NOUN
iajs-9	126	13	:	:	PUNCT
iajs-9	126	14	الخالصت	الخالصت	PROPN
iajs-9	126	15	بشَايج	بشَايج	PROPN
iajs-9	126	16	باستخذاو	باستخذاو	PROPN
iajs-9	126	17	أٌىَاتها	أٌىَاتها	PROPN
iajs-9	126	18	قصفها	قصفها	ADV
iajs-9	126	19	بُفسانكشٌبتىٌ	بُفسانكشٌبتىٌ	PROPN
iajs-9	126	20	عُذ	عُذ	X
iajs-9	126	21	و	و	PRON
iajs-9	126	22	انصىدٌىوٍثٍىو	انصىدٌىوٍثٍىو	X
iajs-9	126	23	،	،	NOUN
iajs-9	126	24	وهان	وهان	PROPN
iajs-9	126	25	حاصم	حاصم	PROPN
iajs-9	126	26	انتشرٌز	انتشرٌز	PROPN
iajs-9	126	27	نكم	نكم	PROPN
iajs-9	126	28	يٍ	يٍ	PROPN
iajs-9	126	29	حساباث	حساباث	PROPN
iajs-9	126	30	اَجضث	اَجضث	PROPN
iajs-9	126	31	حاصم	حاصم	PROPN
iajs-9	126	32	اعتًاد	اعتًاد	PROPN
iajs-9	126	33	وتى	وتى	PROPN
iajs-9	126	34	يُاقشت	يُاقشت	PROPN
iajs-9	126	35	،	،	NOUN
iajs-9	126	36	أٌضا	أٌضا	PROPN
iajs-9	126	37	.	.	PUNCT
iajs-9	127	1	أٌىٌ/انهذف	أٌىٌ/انهذف	PROPN
iajs-9	127	2	قٍذ	قٍذ	PROPN
iajs-9	127	3	انبحث	انبحث	PROPN
iajs-9	127	4	نكم	نكم	PROPN
iajs-9	127	5	نحاصم	نحاصم	PROPN
iajs-9	127	6	انتشرٌز	انتشرٌز	PROPN
iajs-9	127	7	انضاوياالعتًاد	انضاوياالعتًاد	PROPN
iajs-9	127	8	تى	تى	PUNCT
iajs-9	128	1	دساستعالقت	دساستعالقت	PROPN
iajs-9	128	2	.	.	PUNCT
iajs-9	129	1	انتــــشو	انتــــشو	PROPN
iajs-9	129	2	بٍاَاثعُذ	بٍاَاثعُذ	PROPN
iajs-9	129	3	اجشاءهى	اجشاءهى	NOUN
iajs-9	129	4	يالئًت	يالئًت	PROPN
iajs-9	129	5	انباحثٍٍ	انباحثٍٍ	PROPN
iajs-9	129	6	فً	فً	PRON
iajs-9	129	7	هزا	هزا	X
iajs-9	129	8	انًجال	انًجال	PUNCT
iajs-9	129	9	اٌ	اٌ	PROPN
iajs-9	129	10	انعذٌذ	انعذٌذ	NOUN
iajs-9	129	11	يٍ	يٍ	PROPN
iajs-9	129	12	بٍاٍَا.سسى	بٍاٍَا.سسى	ADV
iajs-9	129	13	انهذف	انهذف	VERB
iajs-9	129	14	و	و	PRON
iajs-9	129	15	أٌىٌ	أٌىٌ	PROPN
iajs-9	129	16	عهى	عهى	NOUN
iajs-9	129	17	طاقت	طاقت	VERB
iajs-9	129	18	َفس	َفس	ADV
iajs-9	129	19	انهذف	انهذف	NOUN
iajs-9	129	20	تشرٌز	تشرٌز	PUNCT
iajs-9	130	1	نًالئًتior	نًالئًتior	ADJ
iajs-9	130	2	دانت	دانت	PROPN
iajs-9	130	3	استخذاو	استخذاو	PROPN
iajs-9	130	4	َقتشح	َقتشح	PROPN
iajs-9	130	5	،	،	PROPN
iajs-9	130	6	ويع	ويع	PROPN
iajs-9	130	7	رنك	رنك	PROPN
iajs-9	130	8	،	،	PROPN
iajs-9	130	9	ٌستعًهىٌ	ٌستعًهىٌ	PROPN
iajs-9	130	10	يتعذدة	يتعذدة	PROPN
iajs-9	130	11	انحذود	انحذود	PROPN
iajs-9	130	12	وبشايج	وبشايج	NOUN
iajs-9	130	13	انًحاكاة	انًحاكاة	PROPN
iajs-9	130	14	انتجشٌبٍت	انتجشٌبٍت	PRON
iajs-9	130	15	تائجانُ	تائجانُ	VERB
iajs-9	130	16	رٌزحاصم	رٌزحاصم	NOUN
iajs-9	130	17	انتش	انتش	VERB
iajs-9	130	18	قٍذ	قٍذ	PROPN
iajs-9	130	19	/انهذفبٍاَاث	/انهذفبٍاَاث	PUNCT
iajs-9	131	1	حاصم	حاصم	NOUN
iajs-9	131	2	انتشرٌز	انتشرٌز	ADJ
iajs-9	131	3	أٌىٌ	أٌىٌ	NOUN
iajs-9	131	4	نًالئًت	نًالئًت	VERB
iajs-9	131	5	يعايالث	يعايالث	NOUN
iajs-9	131	6	جذٌذةقٍى	جذٌذةقٍى	PROPN
iajs-9	131	7	ت	ت	DET
iajs-9	131	8	قذو	قذو	NOUN
iajs-9	131	9	.	.	PUNCT
iajs-9	132	1	فً	فً	PUNCT
iajs-9	132	2	هزا	هزا	PROPN
iajs-9	132	3	انبحث	انبحث	PROPN
iajs-9	132	4	نحاصم	نحاصم	PROPN
iajs-9	132	5	انتشرٌز	انتشرٌز	PROPN
iajs-9	132	6	انضاوي	انضاوي	NOUN
iajs-9	132	7	انتىصٌع	انتىصٌع	NOUN
iajs-9	132	8	.انًعتًذ	.انًعتًذ	PROPN
iajs-9	132	9	عهى	عهى	PROPN
iajs-9	132	10	انطاقت	انطاقت	PROPN
iajs-9	132	11	االٌىَاث	االٌىَاث	PROPN
iajs-9	132	12	انساقطتانبحث	انساقطتانبحث	PROPN
iajs-9	132	13	انكشٌبتىٌ	انكشٌبتىٌ	PROPN
iajs-9	132	14	،	،	X
iajs-9	132	15	هٍثٍىو،انصىدٌىو	هٍثٍىو،انصىدٌىو	PROPN
iajs-9	132	16	،	،	PROPN
iajs-9	132	17	انبالصياانتــــشو	انبالصياانتــــشو	PROPN
iajs-9	132	18	،	،	PROPN
iajs-9	132	19	بشَايج	بشَايج	PROPN
iajs-9	132	20	،	،	PROPN
iajs-9	132	21	:	:	PUNCT
iajs-9	132	22	حاصم	حاصم	NOUN
iajs-9	132	23	انتشرٌز	انتشرٌز	NOUN
iajs-9	132	24	كلواث	كلواث	VERB
iajs-9	132	25	الوفتاحيتال	الوفتاحيتال	NOUN