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IIUM Engineering Journal, Vol. 11, No. 1, 2010 Al-Khateeb and Al-Khateeb 

 41

DESIGN AND PERFORMANCE ANALYSIS OF VCO FOR 
STANDARD GSM USING MEMS 

 
KHALID A. S. AL-KHATEEB* AND WAJDI F. AL-KHATEEB 

 

Department of Electrical and Computer Engineering, 
Kulliyah of Engineering, International Islamic University Malaysia, 

P.O. Box 10, Kuala Lumpur, 50728, MALAYSIA 
 

*E-mail: khalid@iiu.edu.my  

ABSTRACT: The design of a prototype monolithic Micro Electro-Mechanical Systems 
(MEMS) electronic circuits, namely the Voltage Controlled Oscillators (VCOs) is 
presented. The components can achieve the stringent requirements of wireless 
communication applications such as GSM cellular telephony. The VCO meets the low 
phase noise specifications of -136 dBc/Hz at large offset frequency of 3MHz, over the 
appropriate frequency range. The model of the monolithic VCO is based on the topology 
of the Colpitts Oscillator. It is relatively less complicated, which facilitates the practical 
integration of the MEMS components into the configuration. The variable capacitor and 
the monolithic 3-D coil inductor are suitable for low phase-noise and low power 
consumption at the application frequencies. A PSpice simulation model was developed 
with MEMS switching devices that can be integrated into the system. The model helps in 
determining the design parameters, which affect the performance and operation 
reliability of the RF transceiver system, for which a prototype has been tested and proved 
successful.  

 

 
KEYWORDS : MEMS; Electronic Circuits; VCO; GSM; Phase Noise. 

 
 

1.  INTRODUCTION  
 
Mobility and portability are features, which have a strong driving force in the 

miniaturization process of wireless communication interfaces. They have raised much 
interest in single-chip applications. The integration of passives devices such as variable 
capacitors and inductors, typically involves some trade-offs between noise, power 
consumption, linearity, frequency range, gain and supply voltage. Higher Q-factors and 
lower insertion losses however, may mitigate some of the trade-offs. A low phase noise 
VCO operating at radio frequency (RF) can be designed by integrating a variety of 
suitable MEMS components. Other applications that may involve MEMS capacitive 
switches are output-stage audio amplifiers, which should satisfy the GSM specifications. 
The important design parameters however, have to be identified before the implementation 
of such circuits. MEMS can be used to replace standard variable capacitors (varicaps) and 
inductors. Both of these passive components can be fabricated on silicon substrates and 
thus are amenable to monolithic integration by standard IC processes. The MEMS 
technology is attractive for the implementation of on-chip high-quality RF variable 
capacitors and inductors, especially in low noise power amplifiers, matching networks, 



IIUM Engineering Journal, Vol. 11, No. 1, 2010 Al-Khateeb and Al-Khateeb 

 42

and monolithic low-noise VCOs. In fact, the Q-factor of these components may ultimately 
determine the phase noise performance, which is critical in high performance 
communication systems [1]. The introduction of MEMS in RF systems increases the 
functionality and improves the performance. The challenge however remains in how to 
minimize the phase noise while maintaining lowest possible power consumption..  

 
 

2.  THE PHASE NOISE 
 
The requirements of a versatile VCO are low phase noise, low power consumption, 

wide tuning range and a high power output. However, to achieve these characteristics all 
at once is a challenging task, because of trade-offs. Much of the research is aimed at 
reducing the phase noise, which is a rapid short term random fluctuation. It can be 
expressed in terms of signal to noise power ratio in unit bandwidth. The expression, which 
can be used to calculate the noise power at the offset frequency fm, is based on the classical 
Leeson’s model [2]: 

 
                                                                                                                                               
 

                                                                                              ……      ………… ( 1 ) 

 

Where; F is the excess noise factor, k Boltzmann constant, T the absolute temperature, Ao 
the amplitude of oscillation, Q the resonator loaded quality factor, Rp is the parallel 
resistance to model losses in the resonator, and Δf1 / f 

3 is the corner frequency in the phase 
noise spectrum. 

 
For an ideal oscillator, the shape of the spectrum is an impulse at a resonant frequency, 

ωo. However, in actual oscillators, a skirt shape is formed around ωo. Figure 1(a) shows 
the single spike of energy at the center carrier frequency, ωo and Figure 1(b) shows the 
skirts around ωo due to phase noise. Actually, the phase noise is expressed as the power at 
particular offset, ωm from ωo. The signal power is measured in a 1 Hz bandwidth at ωm 
[3]. The unit of phase noise is dBc/Hz represented as decibels below the carrier per hertz. 
 
 

 

 

 

 

(a)                                                                  (b) 

Fig. 1: (a) Output spectra of ideal oscillator, (b) Output spectra of practical 
noisy oscillator. 



IIUM Engineering Journal, Vol. 11, No. 1, 2010 Al-Khateeb and Al-Khateeb 

 43

 
In the prototype MEMS oscillator, there is an additional noise source due to the 

mechanical thermal vibration, which is included instead of thermal and flicker noise. In 
practice, this kind of additional noise is due to the vibrations of the suspended plate which 
cause variation in the capacitance and affect the overall output of the phase noise [1]. 

 
 

3.   MEMS PASSIVE DEVICES IN VCO 
 
There are two approaches to design and fabricate a VCO using MEMS passive devices. 

The first is to replace the MOS capacitors with MEMS, which is good for a wide tuning 
range. The second is to use a monolithic 3-D coil inductor.  The high Q varicap is a key 
element in a low phase noise VCO. The MEMS varicap also enables a complete 
monolithic fabrication of RF VCO for on-chip IC compatible devices, with lower loss, 
larger tuning range and higher linearity [4]. The high-Q variable capacitor can be realized 
by a surface micro-machined all aluminum microstructure. The top and cross-section are 
shown in Fig. 2. It consists of 1 µm-thick aluminum plate suspended in air 1.5 µm above 
the bottom layer and anchored with four folded beam suspensions acting as springs.  
Aluminum sheet resistance is low, which is critical to minimize the ohmic losses, and the 
fabrication temperature of 150ºC [1] is also low. The plate size of 200 µm by 200 µm and 
1.5 µm nominal air gap results in a nominal capacitance value of approximately 200 pF. 
Thus, large capacitance can be obtained by parallel connection [5]. In RF transceivers, the 
DC tuning voltage is typically limited to 3.3 V or less. Thus with a 1.5 μm air gap and a 
200 μm square plate it requires 3.8 N/m for a 3.3 V operation. This corresponds to a 
mechanical resonant frequency of 30 kHz [1]. Each of the suspension four folded beams is 
100 μm long and 20 μm wide as in Fig. 2. 

 
 

        
 
 
 
 

 Fig. 2: Micro-machined variable capacitor. 

 
A high Q inductor is another key element in low phase noise VCO, since the inductors 

produced by silicon processes cannot provide high Q factors, due to ohmic loss in the thin 
metal layers and eddy-currents [6]. Several methods have been proposed. However, the 
bond-wires types are chosen as an attractive alternative because the Q values are at least 
an order of magnitude higher than the on-chip spiral inductors. They have been 



IIUM Engineering Journal, Vol. 11, No. 1, 2010 Al-Khateeb and Al-Khateeb 

 44

implemented in RF VCOs and high efficiency power amplifiers. The 3-D microstructure 
also minimizes the capacitive coupling and eddy current loss, leading to larger Q-factor at 
higher frequencies. Bigger inductors and smaller capacitors allow operation with less 
power [6]. 

 
In a high Q inductor every mm of bond-wire contributes about 1 nH. Therefore, a few 

nH requirement for wireless applications can be provided readily, with a lead frame of a 
standard IC package [1]. 

 

       
 
 

Fig. 3: 3-D coil inductor. 

 

The 3-D coil inductor, shown in Fig. 3, consists of two 5 μm thick turns, 50μm wide 
copper traces electroplated around an insulating core with a 650µm by 500µm cross-
section. The core is alumina, which has negligible loss tangent, which is another key 
parameter to ensure high Q. A core width of 500µm is found experimentally to be the 
minimum that avoids tilting during attachment. The fabrication process is described in 
details elsewhere [8].  

 

4.   THE DESIGN PROCEDURE OF THE VCO 
 
There are many types of oscillator topologies which can be used to construct an RF 

VCO for frequencies below 1 MHz. For frequencies above 1 MHz however, LC feedback 
oscillators are normally used. Due to the frequency limitations of most op-amps, transistor 
amplifiers are used as the gain elements. Thus, a popular topology, which proved 
successful in many commercial modules, is the Colpitts oscillator (Fig. 4), due to its 
simplicity, robustness and wide range of operating frequencies, from IF to RF [8]. 

 
The frequency is determined by the resonant frequency of the feedback network, which 

is a parallel resonant tank circuit, in which any change in the inductor or capacitor will 
change the oscillation frequency, fo given by: 

 

…………………..  ( 2 ) 

1

2 T
f

L C







IIUM Engineering Journal, Vol. 11, No. 1, 2010 Al-Khateeb and Al-Khateeb 

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where, CT = Cv + C12,  Cv = (Cvar x Co)/(Cvar + Co),  and     C12 = (C1 x C2) / (C1 + C2) 

(Note: The above equation is accurate only if the LC circuit has a high Q). 

 

   

 Fig. 4: Colpitts circuit topology for VCO. 

 

 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

 Fig. 5: The actual circuit design of the VCO. 

 
Considering the Colpitts VCO (Fig. 5), which uses parallel-mode LC tank 

configuration, the analysis is straightforward. The FET is a medium power amplifier as 
compared to a bipolar transistor. It may provide double the power for a given frequency or 
double frequency for a given power. In fact, FET can be used up to 30 GHz. At 10 GHz, 
the FET itself may actually provide several watts of output power [9]. In the simulation 
model however, the VCO operates at a frequency fo of approximately 1 GHz.  

 



IIUM Engineering Journal, Vol. 11, No. 1, 2010 Al-Khateeb and Al-Khateeb 

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The task for phase noise performance analysis is to reconfigure the Colpitts oscillator as 
an amplifier with positive LC feedback, as in Fig. 5. Hence a readily available set of 
design equations can be used, which are clear and convenient. Instead of only analyzing 
the phase noise, this model can also be useful in calculating the loop gain and the 
amplitude of the oscillation [9].    

 
The factors that affect the accuracy of phase noise simulation and measurement are 

many. It may be possible addressed these factors accurately with a prudent selection of the 
passive components and proper resonator modeling. For an acceptable level of simulation 
accuracy of a VCO that operates at RF and above, all components in the linear network 
such as transmission lines and discontinuities must be accurately characterized over 
several harmonics of the fundamental oscillation frequency. This is important because the 
accuracy of the oscillation signal affects the noise analysis, and the noise analysis itself 
depends on the linear network. This means that any inaccuracy in the network 
characterization will affect the quality of the phase noise simulation. The simulation 
accuracy of the VCO will ultimately determine the parameters of all the fabricated parts, 
including the dimensions of the circuit board, material properties, and component models 
of any parasitic behavior [10]. 

 
 

5.   ANALYSIS OF THE VCO DESIGN 
 
Microwave Office is a software, which can be useful in simulating many circuit designs. 

Therefore it has been for the simulation of the VCO. It also enables the prediction of the 
performance characteristics. The analysis can either be performed in the frequency domain 
using the harmonic balance technique, or in the time domain using transient simulators 
such as SPICE and Spectre. The simulation method involves three main steps. First, it 
attempts to locate the start-up frequency with respect to the well-known loop gain 
criterion. When the loop gain saturates to a magnitude of 1 in the large-signal steady state, 
the simulator will step the probe voltage in an attempt to detect loop gain saturation. Then, 
the neighborhood of gain saturation is used as the starting point for the analysis. Then the 
voltage and frequency of the probe are adjusted in a way that results in zero probe-current. 
After setting all the requirements, as in Fig. 6, the simulation begins to perform the 
analysis automatically.  

 
The analysis uses a special device called oscillator probe that allows fast and robust 

oscillator simulations, even for the case of extremely high resonator Q. The oscillator 
probe refers to the combination of the source and the ideal impedance element. In the 
Microwave Office simulator, the oscillator probe is denoted as OSCAPROBE, as shown in 
Fig. 7. The most significant probe parameters are Fstart and Fend. These parameters 
indicate the range of search for start-up frequency. Another parameter is the Fsteps, which 
refers to the number of steps used in the search for start-up frequency and rarely needs to 
be changed from default. However, in extremely high-Q cases, Fsteps may be increased or 
the frequency range is narrowed. The recommended location of the oscillation probe is at a 
node connecting the resonator and the active device. 

 
 
 



IIUM Engineering Journal, Vol. 11, No. 1, 2010 Al-Khateeb and Al-Khateeb 

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OSCNOISE 
ID=NS1 

OFstart=1e-8 GHz 
OFend=0.1 GHz 

OFsteps=5 
SwpType=LOG 

Harm={1,2} 

   

Fig. 6: Flow chart of the analysis.               Fig. 7: Schematic symbol of OSCAPROBE. 

 
 
The main objective of simulating the VCO is to measure the phase noise performance, 

then to compare it with the values of a real prototype VCO at the offset frequency of 
3MHz.  The OSCNOISE simulator shown in Fig 8 was employed to determine the phase 
noise performance of the VCO. The results are shown in Fig. 9. The phase noise is 
measured in dB/Hz offset from the carrier and is plotted on a log frequency scale. In this 
simulation, the OFstart and OFend parameters were set to 1e-008 GHz and 0.1 GHz 
respectively. 

 
 
 
 
 
 
 
 
 
 
 

         Fig. 8: Schematic symbol of OSCNOISE. 

 
It is shown that at an offset frequency of approximately 3MHz, the value of the phase 

noise is -138.05 dBc/Hz, which is in good agreement with the actual value for the 
prototype -136 dBc/Hz. The noise components in conventional LC tuned oscillators are; 
electrical thermal noise, flicker noise (l/f noise), supply voltage noise, and the noise 
contribution from the substrate. In practical MEMS tuned LC oscillators however, 
additional phase noise is introduced by the mechanical thermal vibration of the variable 
capacitors. The vibration of the suspended plates causes variation in the capacitance value, 
which results in phase noise or jitter in the output frequency [1]. The noise power spectral 
density due to plate displacement can be expressed as follows:  

 

 
OSCAPROBE 

ID=X1 
Fstart=1 GHz 
Fend=2 GHz 
Fsteps=200 
Vsteps=40 

 



IIUM Engineering Journal, Vol. 11, No. 1, 2010 Al-Khateeb and Al-Khateeb 

 48

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

Fig. 9: Plot of the simulated phase noise. 

 
 

 
 

                                                                                                    …. …. …. …. ( 3 ) 

 
 

Where k is Boltzmann constant, T is the absolute temperature, b is damping coefficient 
due to the surrounding gas ambient and internal dissipation of the system, ωn is the 
mechanical resonant frequency of the capacitor, km is the structure compliance and QM is 
the mechanical quality factor. Additional phase noise can be further expressed as given 
below: 

                                 … … … … …  ( 4 ) 
 
Where xo is the nominal air gap of the capacitor, N is the number of parallel-connected 

devices and α is the ratio between the nominal tank tunable capacitance and its parasitics, 
fo and fm are the oscillation and the offset frequencies, respectively. 

 
These two equations enable the phase noise induced by the Brownian motion to be 

determined at various offset frequencies. For a typical design condition in which xo = 

1.5μm, QM ≅ 1 at 1 atm, ωn = 2π (30 kHz), N = 4, α ≅ 0.5, and fo = 1GHz, the phase 
noise at offset frequencies fm of 10KHz, 100KHz, and 3 MHz are respectively [1]  
64dBc/Hz, -105dBc/Hz, and -136dBc/Hz, Typical wireless communication applications 
specify low phase noise requirement at relatively large offset frequency, for example –136 



IIUM Engineering Journal, Vol. 11, No. 1, 2010 Al-Khateeb and Al-Khateeb 

 49

dBc/Hz at 3 MHz offset for GSM. In order to fulfill these norms, the VCO phase noise 
must be maintained better than –135 dBc/Hz at 3 MHz offset over the appropriate 
frequency range of 855 MHz to 863 MHz. 

 
 

6.    CONCLUSION 
 
MEMS tunable VCO is a viable proposition for GSM applications. It can provide 

superior performance characteristics over other types of VCO. It is expected to make large 
impact in many applications, especially in wireless mobile telephony. The phase noise 
analysis performed by simulation and described explicitly in this work is one of the most 
important aspects of VCO design. The Microwave Office software tool can be very useful 
in designing such circuits and predicting their performance. It is a powerful tool for 
simulation and design analysis of linear and nonlinear circuits and for measurements 
carried out under specifically set conditions. The practical application of the VCO 
simulation model was the fabrication using real MEMS passive devices i.e. the high-Q 
variable capacitors and 3-D coil inductors. The prototype in which MEMS constitute the 
frequency determining components of low phase-noise with low power consumption may 
prove to be commercially attractive, as it meets the stringent performance requirements of 
GSM at the application frequencies.  

 
 

REFERENCES  
 

[1] D. J. Young, V. Malba, A. F. Bemhardt, and   B. E. Boser, “A Micromachined RF 
Low Phase Noise Voltage-Controlled Oscillator for Wireless Communications”, IEDM 
Dig. Tech. Papers, pp. 285-300, 24 April 2001. 

[2] D.B. Lesson, “A Simple Model of Feedback  Oscillator Noise Spectrum”, Proc. IEEE, 
54 (2), pp. 329-330, 1996. 

[3]  V. K. Saraf, “Low Power Wide Tuning Range LC-VCO using RF MEMS Passives”, 
Master thesis, Univ. of Carnegie Mellon, Pittsburgh, PA, August 2004. 

[4]  B. S. Darade and  T. A. Parmar, “Low Phase Noise Fully Integrated VCO”, 18th Intl. 
Conference on VLSI Design, Jan 2005. 

[5]  D. J. Young and B. E. Boser, “A Micromachined Variable Capacitor for Monolithic 
Low-Noise VCOS”, Solid-State Sensor and Actuator Workshop, Dig. Tech. Papers, 
pp. 86-89, June 1996. 

[6]   E. C. Park, Y. S. Choi, J. Yoon, S. Hong and E. Yoon, “Fully Integrated Low Phase-
Noise VCOs With On-Chip MEMS Inductors”, IEEE Transactions on Microwave 
Theory and Techniques, vol. 51, no. 1, January 2003. 

[7]  D. J. Young, V. Malba, J. J. Ou, A. F. Bemhardt and B. E. Baser, “Monolithic High-
Performance Three-Dimensional Coil Inductors for Wireless Communication 
Applications”, IEDM Dig. Tech. Papers, pp. 67-70, December 1997. 

[8] R. H. Berube, “Computer Simulated Experiments for Electronic Devices Using 
Electronic Workbench”, Prentice-Hall, Inc., 2000. 

[9]  C.O’Connor, “Develop A Trimless Voltage-Controlled Oscillator”, Microwaves & RF 
Magazine, pp. 94-105, 2000. 

[10]  D.Vye, “Improving VCO Phase Noise Performance Through Enhanced 
Characterization”, High Frequency Electronics Magazine, pp. 56-60, 2004.