Journal of large-scale research facilities, 2, A59 (2016) http://dx.doi.org/10.17815/jlsrf-2-105 Published: 14.03.2016 FEI Helios NanoLab 460F1 FIB-SEM Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons (ER-C), Forschungszentrum Jülich and RWTH Aachen * Instrument O�cer: - Maximilian Kruth, Ernst Ruska-Centre, Jülich Research Centre, 52425 Jülich, Germany, phone: ++49.2461.61.2418, e-mail: m.kruth@fz-juelich.de Deputy Instrument O�cer: - Doris Meertens, Ernst Ruska-Centre, Jülich Research Centre, 52425 Jülich, Germany, phone: ++49.2461.61.3910, e-mail: d.meertens@fz-juelich.de General Management: - Dr. Karsten Tillmann, Ernst Ruska-Centre, Jülich Research Centre, 52425 Jülich, Germany, phone: ++49.2461.61.1438, e-mail: k.tillmann@fz-juelich.de Abstract: The FEI Helios NanoLab 460F1 is a highly advanced dual beam FIB-SEM platform for imag- ing and analytical measurements, transmission electron microscopy (TEM) sample and atom probe (AP) needle preparation, process development and process control. For these purposes, the FEI Helios NanoLab 460F1 combines an Elstar™ UC technology electron column for high-resolution and high ma- terial contrast imaging with the high-performance Tomahawk™ ion column for fast and precise sample preparation. The FEI Helios NanoLab 460F1 is additionally equipped with the MultiChem™ gas deliv- ery system, an EasyLift™ nanomanipulator, a cooling trap, an inert gas transfer (IGT) holder load-lock, a quick loader, a FlipStage 3™ , an EDX-System and an STEM III detector. This instrument is one of the few dual beam systems which combine an IGT holder loadlock with a FlipStage 3+™ EasyLift™ nanomanipulator. Typical examples of use and technical speci�cations for the instrument are given below. *Cite article as: Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons. (2016). FEI Helios NanoLab 460F1 FIB-SEM. Journal of large-scale research facilities, 2, A59. http://dx.doi.org/10.17815/jlsrf-2-105 1 http://jlsrf.org/ http://dx.doi.org/10.17815/jlsrf-2-105 http://dx.doi.org/10.17815/jlsrf-2-105 https://creativecommons.org/licenses/by/4.0/ Journal of large-scale research facilities, 2, A59 (2016) http://dx.doi.org/10.17815/jlsrf-2-105 1 System Overview Figure 1: FEI Helios NanoLab 460F1 DualBeam (photograph by courtesy of FEI company). 2 Typical Applications and Limitations of Use The con�guration of the FEI Helios NanoLab 460F1 allows a variety of advanced imaging and prepa- ration techniques to be applied to wide bunch of solid state materials. These techniques include TEM sample preparation (normal- and backside milling) without breaking the vacuum (with Flipstage 3), STEM imaging on thin TEM samples (with STEM 3 detector), slice and view operation (automatic), nee- dle preparation for tomography, atom probe sample preparation, plan-view preparation and the prepa- ration of lamellas on heating chips for TEM annealing experiments. Making use of the IGT-loadlock, even samples who are not allowed to be supposed to air can be prepared on any of the previously described ways except needle and atom probe preparation. The FEI Helios NanoLab 460F1 is not intended for the investigation of aqueous, ferromagnetic or or- ganic samples without further discussions with both of the instruments o�cers and the ER-C general management. 3 Sample Environment The vacuum is about 10−7 mbar under normal operating conditions. 2 http://dx.doi.org/10.17815/jlsrf-2-105 https://creativecommons.org/licenses/by/4.0/ http://dx.doi.org/10.17815/jlsrf-2-105 Journal of large-scale research facilities, 2, A59 (2016) 4 Technical Speci�cations • electron landing voltage 20 V ... 30 kV • ion landing voltage 500 V . . . 30 kV • electron beam current ≤ 0.1 µA • ion beam current ≤ 65 nA • electron source Schottky thermal �eld emitter • resolution optimal WD (SEM) @ 2 . . . 15 kV < 0.6 nm • resolution optimal WD (SEM) @ 1 kV < 0.7 nm • resolution optimal WD (SEM) @ 200 V with beam deceleration < 1.5 nm • resolution (STEM) < 0.6 nm • ion source Gallium liquid metal • resolution (FIB) 30 kV < 4 nm • resolution (EDX) < 30 nm 5 Detectors • ETD – Everhart Thornley detector • TLD – through-the-lens detector • ICE – in-chamber electron • ICD – in-column detector • STEM 3+ – STEM detector (BF, DF, HAADF) • MD – mirror detector • CBS – retractable backscatter detector • CCD – charge-coupled detector • Nav-Cam – in-chamber navigation camera 6 Specimen Stages • Flipstage 3 with in situ STEM 3 detector • 5 axis all piezo motorised • 100 mm XY motion • IGT-Loadlock • Quick Loader 3 http://dx.doi.org/10.17815/jlsrf-2-105 https://creativecommons.org/licenses/by/4.0/ Journal of large-scale research facilities, 2, A59 (2016) http://dx.doi.org/10.17815/jlsrf-2-105 7 MultiChem Gas Delivery System • Pt, C, W for deposition • TEOS for insulator deposition • H2O etching gas 8 EDX System • TEAM software for measurement and analyses • "Octane Super" Detector • Active Area: 60mm2 9 Miscellaneous The FEI Helios NanoLab 460F1 was funded by the German Federal Ministry of Education and Re- search (BMBF) via the project SABLE (SABLE-Skalenübergreifende, multi-modale 3D-Bildgebung Elek- trochemischer Hochleistungskomponenten) under support code 03EK3543. 4 http://dx.doi.org/10.17815/jlsrf-2-105 https://creativecommons.org/licenses/by/4.0/ System Overview Typical Applications and Limitations of Use Sample Environment Technical Specifications Detectors Specimen Stages MultiChem Gas Delivery System EDX System Miscellaneous